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1. 发明授权

US06626082B2 Table feed system 有权
公开(公告)号：US06626082B2
公开(公告)日：2003-09-30
申请号：US09941937
申请日：2001-08-30
申请人： Hiromichi Morita , Goshin Ohashi , Sojiro Tsuchiya , Hisatoshi Kojima , Takayoshi Muto , Hironao Yamada
发明人： Hiromichi Morita , Goshin Ohashi , Sojiro Tsuchiya , Hisatoshi Kojima , Takayoshi Muto , Hironao Yamada
IPC分类号： F15B1108
CPC分类号： F15B11/006 , B23Q1/58 , B23Q5/266 , F15B21/087 , F15B2211/30575 , F15B2211/328 , F15B2211/6303 , F15B2211/75 , F15B2211/765
摘要： In a machine tool by pulse drive of a hydraulic system, a piston of a hydraulic cylinder is connected with a table, and an outflow valve and an inflow valve, which form a pair, are respectively connected with a right and a left hydraulic chamber. When the feed table is moved to the right, for example, control is conducted so that the valve-opening period of one valve can be a portion in the middle of the valve-opening period of the other valve. Since a portion of pressure in the hydraulic chamber is canceled, an effective pressure, the pulse width of which is narrow, remains. Accordingly, even in the case where a common inexpensive electromagnetic valve is used, it is possible to accomplish a smooth feed motion.

2. 发明授权

US07800232B2 Metallic electrode forming method and semiconductor device having metallic electrode 有权
标题翻译：金属电极形成方法和具有金属电极的半导体器件
公开(公告)号：US07800232B2
公开(公告)日：2010-09-21
申请号：US12073166
申请日：2008-02-29
申请人： Manabu Tomisaka , Hisatoshi Kojima , Akihiro Niimi
发明人： Manabu Tomisaka , Hisatoshi Kojima , Akihiro Niimi
IPC分类号： H01L23/48
CPC分类号： H01L24/13 , H01L21/7684 , H01L22/12 , H01L24/11 , H01L2224/05001 , H01L2224/05022 , H01L2224/05572 , H01L2224/05647 , H01L2224/05666 , H01L2224/05686 , H01L2224/13099 , H01L2224/131 , H01L2924/0001 , H01L2924/00014 , H01L2924/01006 , H01L2924/01013 , H01L2924/01022 , H01L2924/01023 , H01L2924/01029 , H01L2924/01033 , H01L2924/01049 , H01L2924/01052 , H01L2924/01059 , H01L2924/01068 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04941 , H01L2924/1305 , H01L2924/19042 , H01L2924/00 , H01L2224/05099
摘要： A metallic electrode forming method includes: forming a bed electrode on a substrate; forming a protective film with an opening on the bed electrode to expose the bed electrode from the opening; forming a metallic film covering the protective film and the opening; mounting the substrate on an adsorption stage, and measuring a surface shape of the metallic film by a surface shape measuring means; deforming the substrate by a deforming means so that a difference between the principal surface and a cutting surface is within a predetermined range; measuring a surface shape of the principal surface, and determining whether the difference is within a predetermined range; and cutting the substrate along with the cutting surface so that the metallic film is patterned to be a metallic electrode.
摘要翻译：金属电极形成方法包括：在基板上形成床电极; 在床电极上形成具有开口的保护膜，以使床电极从开口露出; 形成覆盖保护膜和开口的金属膜; 将基板安装在吸附台上，用表面形状测量装置测量金属膜的表面形状; 通过变形装置使基板变形，使得主表面和切割表面之间的差在预定范围内; 测量所述主表面的表面形状，以及确定所述差是否在预定范围内; 并且与切割表面一起切割基板，使得金属膜被图案化为金属电极。

3. 发明授权

US07910460B2 Metallic electrode forming method and semiconductor device having metallic electrode 有权
标题翻译：金属电极形成方法和具有金属电极的半导体器件
公开(公告)号：US07910460B2
公开(公告)日：2011-03-22
申请号：US12805537
申请日：2010-08-05
申请人： Manabu Tomisaka , Hisatoshi Kojima , Akihiro Niimi
发明人： Manabu Tomisaka , Hisatoshi Kojima , Akihiro Niimi
IPC分类号： H01L21/00
CPC分类号： H01L24/13 , H01L21/7684 , H01L22/12 , H01L24/11 , H01L2224/05001 , H01L2224/05022 , H01L2224/05572 , H01L2224/05647 , H01L2224/05666 , H01L2224/05686 , H01L2224/13099 , H01L2224/131 , H01L2924/0001 , H01L2924/00014 , H01L2924/01006 , H01L2924/01013 , H01L2924/01022 , H01L2924/01023 , H01L2924/01029 , H01L2924/01033 , H01L2924/01049 , H01L2924/01052 , H01L2924/01059 , H01L2924/01068 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04941 , H01L2924/1305 , H01L2924/19042 , H01L2924/00 , H01L2224/05099
摘要： A metallic electrode forming method includes: forming a bed electrode on a substrate; forming a protective film with an opening on the bed electrode to expose the bed electrode from the opening; forming a metallic film covering the protective film and the opening; mounting the substrate on an adsorption stage, and measuring a surface shape of the metallic film by a surface shape measuring means; deforming the substrate by a deforming means so that a difference between the principal surface and a cutting surface is within a predetermined range; measuring a surface shape of the principal surface, and determining whether the difference is within a predetermined range; and cutting the substrate along with the cutting surface so that the metallic film is patterned to be a metallic electrode.
摘要翻译：金属电极形成方法包括：在基板上形成床电极; 在床电极上形成具有开口的保护膜，以使床电极从开口露出; 形成覆盖保护膜和开口的金属膜; 将基板安装在吸附台上，用表面形状测量装置测量金属膜的表面形状; 通过变形装置使基板变形，使得主表面和切割表面之间的差在预定范围内; 测量所述主表面的表面形状，以及确定所述差是否在预定范围内; 并且与切割表面一起切割基板，使得金属膜被图案化为金属电极。

4. 发明授权

US06942555B2 Gear-shaping grindstone and method of fabricating the same 失效
标题翻译：齿轮成形磨石及其制造方法
公开(公告)号：US06942555B2
公开(公告)日：2005-09-13
申请号：US10347994
申请日：2003-01-20
申请人： Toshiya Hayashi , Hisatoshi Kojima , Kazuki Kataoka , Toru Nakanoboh
发明人： Toshiya Hayashi , Hisatoshi Kojima , Kazuki Kataoka , Toru Nakanoboh
IPC分类号： B24D5/02 , B23F21/03 , B24B53/00 , B24D3/00 , B24D3/06 , B24D18/00 , B24B17/00
CPC分类号： B24D18/0018 , B23F21/03 , B24B53/001 , B24D3/06 , Y10S451/90
摘要： A highly accurate, long-life grindstone for shaping a gear and a method of fabricating the grindstone, without depending on the accuracy of form of a base metal and without using a special grinding machine or a special lapping machine, are disclosed. A super-abrasive layer (29) of a predetermined thickness is fixedly attached on the outer periphery of a body portion (24) of the base metal (23) formed in a cylinder solid. The super-abrasive layer (29) is metal-bonded, and has the outer periphery thereof formed with a toothed portion (31) in the shape of the teeth of an external gear by electric discharge machining.
摘要翻译：公开了一种用于成形齿轮的高精度，长寿命的磨石和制造磨石的方法，而不依赖于贱金属的形状的精度，而不使用特殊的研磨机或特殊研磨机。具有预定厚度的超研磨层（29）固定地安装在形成为气缸固体的母材（23）的主体部分（24）的外周上。超研磨层（29）金属接合，并且其外周形成有通过放电加工形成外齿形齿的齿部（31）。

5. 发明申请

US20100311191A1 Metallic electrode forming method and semiconductor device having metallic electrode 有权
公开(公告)号：US20100311191A1
公开(公告)日：2010-12-09
申请号：US12805537
申请日：2010-08-05
申请人： Manabu Tomisaka , Hisatoshi Kojima , Akihiro Niimi
发明人： Manabu Tomisaka , Hisatoshi Kojima , Akihiro Niimi
IPC分类号： H01L21/66 , H01L21/60
CPC分类号： H01L24/13 , H01L21/7684 , H01L22/12 , H01L24/11 , H01L2224/05001 , H01L2224/05022 , H01L2224/05572 , H01L2224/05647 , H01L2224/05666 , H01L2224/05686 , H01L2224/13099 , H01L2224/131 , H01L2924/0001 , H01L2924/00014 , H01L2924/01006 , H01L2924/01013 , H01L2924/01022 , H01L2924/01023 , H01L2924/01029 , H01L2924/01033 , H01L2924/01049 , H01L2924/01052 , H01L2924/01059 , H01L2924/01068 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04941 , H01L2924/1305 , H01L2924/19042 , H01L2924/00 , H01L2224/05099
摘要： A metallic electrode forming method includes: forming a bed electrode on a substrate; forming a protective film with an opening on the bed electrode to expose the bed electrode from the opening; forming a metallic film covering the protective film and the opening; mounting the substrate on an adsorption stage, and measuring a surface shape of the metallic film by a surface shape measuring means; deforming the substrate by a deforming means so that a difference between the principal surface and a cutting surface is within a predetermined range; measuring a surface shape of the principal surface, and determining whether the difference is within a predetermined range; and cutting the substrate along with the cutting surface so that the metallic film is patterned to be a metallic electrode.

6. 发明申请

US20080217771A1 Metallic electrode forming method and semiconductor device having metallic electrode 有权
标题翻译：金属电极形成方法和具有金属电极的半导体器件
公开(公告)号：US20080217771A1
公开(公告)日：2008-09-11
申请号：US12073166
申请日：2008-02-29
申请人： Manabu Tomisaka , Hisatoshi Kojima , Akihiro Niimi
发明人： Manabu Tomisaka , Hisatoshi Kojima , Akihiro Niimi
IPC分类号： H01L21/66 , H01L23/498 , H01L21/78
CPC分类号： H01L24/13 , H01L21/7684 , H01L22/12 , H01L24/11 , H01L2224/05001 , H01L2224/05022 , H01L2224/05572 , H01L2224/05647 , H01L2224/05666 , H01L2224/05686 , H01L2224/13099 , H01L2224/131 , H01L2924/0001 , H01L2924/00014 , H01L2924/01006 , H01L2924/01013 , H01L2924/01022 , H01L2924/01023 , H01L2924/01029 , H01L2924/01033 , H01L2924/01049 , H01L2924/01052 , H01L2924/01059 , H01L2924/01068 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04941 , H01L2924/1305 , H01L2924/19042 , H01L2924/00 , H01L2224/05099
摘要： A metallic electrode forming method includes: forming a bed electrode on a substrate; forming a protective film with an opening on the bed electrode to expose the bed electrode from the opening; forming a metallic film covering the protective film and the opening; mounting the substrate on an adsorption stage, and measuring a surface shape of the metallic film by a surface shape measuring means; deforming the substrate by a deforming means so that a difference between the principal surface and a cutting surface is within a predetermined range; measuring a surface shape of the principal surface, and determining whether the difference is within a predetermined range; and cutting the substrate along with the cutting surface so that the metallic film is patterned to be a metallic electrode.
摘要翻译：金属电极形成方法包括：在基板上形成床电极; 在床电极上形成具有开口的保护膜，以使床电极从开口露出; 形成覆盖保护膜和开口的金属膜; 将基板安装在吸附台上，用表面形状测量装置测量金属膜的表面形状; 通过变形装置使基板变形，使得主表面和切割表面之间的差在预定范围内; 测量所述主表面的表面形状，以及确定所述差是否在预定范围内; 并且与切割表面一起切割基板，使得金属膜被图案化为金属电极。

7. 发明授权

US06561869B2 Gear grinding machine and gear grinding method 有权
公开(公告)号：US06561869B2
公开(公告)日：2003-05-13
申请号：US09731857
申请日：2000-12-08
申请人： Masahiro Asano , Katsumi Nagasaka , Toshiya Hayashi , Hisatoshi Kojima
发明人： Masahiro Asano , Katsumi Nagasaka , Toshiya Hayashi , Hisatoshi Kojima
IPC分类号： B24B4900
CPC分类号： B24B5/185 , B23F19/007 , B24B19/009 , B24B49/16
摘要： A gear grinding machine and a gear grinding method, in which a gear-shaped grinding stone is caused to engage a gear-like workpiece and one of the gear-shaped grinding stone and the gear-like workpiece is reciprocated relatively to the other in axial direction thereby to grind the tooth flanks of the workpiece, are disclosed. The rotational resistance is applied by a brake unit to the rotationally driven side. The grinding resistance and the rotational resistance interfering with the relative reciprocal motion are detected by torque sensors and input to a control unit, the average value of each of the signals is compared with a reference value by an arithmetic unit and, in the case where there is a difference between the average value and the reference value, the rotational resistance is changed by activating the brake unit. Thus, a high machining accuracy can be maintained even when the sharpness of the grinding stone is reduced.

8. 发明授权

US4023774A Orifice unit of a needle valve 失效
标题翻译：针阀的孔口单元
公开(公告)号：US4023774A
公开(公告)日：1977-05-17
申请号：US604042
申请日：1975-08-12
申请人： Hisatoshi Kojima
发明人： Hisatoshi Kojima
IPC分类号： F16K3/24 , F16K1/38 , F16K31/70 , F16K5/12
CPC分类号： F16K1/38 , Y10S251/903
摘要： An orifice assembly includes a cylindrical orifice unit formed of synthetic resin material and having at one end thereof an end wall with an orifice therethrough. A metallic needle is mounted for reciprocation in the orifice. The needle has an oblique surface which defines with the surface of the orifice a gap which is variable with reciprocation of the needle. A holder element, preferably of metal, surrounds and supports the orifice unit. An annular recess is provided, preferably in the outer surface of the orifice, radially outwardly of the orifice to allow expansion and contraction of the resin material, due to temperature variations, without constraint.
摘要翻译：孔组件包括由合成树脂材料形成的圆柱形孔单元，并且其一端具有通过其的孔口的端壁。安装金属针以在孔中往复运动。针具有一个倾斜表面，其与孔的表面限定了间隙，该间隙随针的往复运动而变化。保持器元件，优选地是金属，围绕并支撑孔单元。优选地，在孔口的外表面中设置有环形凹部，在孔口的径向外侧，以允许树脂材料由于温度变化而不受约束而膨胀和收缩。

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