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1. 发明申请

US20050221613A1 Electrode formation method, electrode and solar battery 审中-公开
标题翻译：电极形成方法，电极和太阳能电池
公开(公告)号：US20050221613A1
公开(公告)日：2005-10-06
申请号：US11142331
申请日：2005-06-02
申请人： Ryoh Ozaki , Hitomi Ohta , Hiroyuki Fukumura , Yoshiroh Takaba , Yuji Komatsu , Tohru Nunoi
发明人： Ryoh Ozaki , Hitomi Ohta , Hiroyuki Fukumura , Yoshiroh Takaba , Yuji Komatsu , Tohru Nunoi
IPC分类号： H01L31/04 , H01L21/44 , H01L31/0224 , H01L31/068
CPC分类号： H01L31/022425 , H01L31/068 , Y02E10/547
摘要： A method for forming an electrode according to the present invention includes a step of discharging a paste containing an electrode material from a discharge port of a nozzle, and drawing a fine-line pattern on a surface of a semiconductor substrate, and a step of drying and baking the drawn fine-line pattern, and forming a fine-line electrode. Herein, in the drawing step, the nozzle is arranged so that a central axis of the nozzle is inclined at a predetermined inclination angle with respect to the surface of the semiconductor substrate, and so that the discharge port is proximate to the surface of the semiconductor substrate at a predetermined distance, the nozzle and the semiconductor substrate are moved relatively to each other in a drawing direction of the fine-line pattern, and relative movement speeds of the nozzle and the semiconductor substrate are adjusted, thereby drawing the fine-line pattern so that a line width of the fine-line pattern is smaller than an inner diameter of the discharge port of the nozzle.
摘要翻译：根据本发明的电极形成方法包括从喷嘴的排出口排出含有电极材料的糊剂，并在半导体衬底的表面上绘制细线图案的步骤，以及干燥步骤并烘烤所绘制的细线图案，并形成细线电极。这里，在拉拔工序中，喷嘴被配置为使得喷嘴的中心轴相对于半导体基板的表面以预定的倾斜角倾斜，并且使得排出口靠近半导体的表面衬底在预定距离处，喷嘴和半导体衬底沿着细线图案的拉伸方向彼此相对移动，并且调节喷嘴和半导体衬底的相对移动速度，从而绘制细线图案使得细线图案的线宽小于喷嘴的排出口的内径。

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