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    • 1. 发明授权
    • Radiation sensitive resin composition
    • 辐射敏感树脂组合物
    • US07820355B2
    • 2010-10-26
    • US10534459
    • 2003-11-19
    • Hiroshi Kurakata
    • Hiroshi Kurakata
    • G03F7/004G03F7/028
    • G03F7/0382
    • A radiation sensitive resin composition which contains an alicyclic olefin resin obtained by ring-opening polymerization of a polymerizable monomer containing an alicyclic olefin monomer having carboxyl group using a ruthenium catalyst, followed by hydrogenation, an acid-generating agent, a crosslinking agent and a solvent; and a transparent resin pattern film formed on a substrate obtained by laminating a resin film formed by using the resin composition described above to the substrate, followed by irradiation with an active radiation to form a latent pattern and developing the pattern by bringing the resin film having the latent pattern into contact with a developing solution. The resin composition exhibits excellent property for development and storage stability. The transparent resin pattern film obtained from the resin composition exhibits excellent specific permittivity, transparency, dimensional stability under heating, solvent resistance and flatness and can be utilized as the resin film for electronic parts.
    • 一种辐射敏感性树脂组合物,其含有通过使用钌催化剂,含有具有羧基的脂环族烯烃单体,然后氢化,产酸剂,交联剂和溶剂的可聚合单体的开环聚合获得的脂环式烯烃树脂 ; 以及透明树脂图案膜,其形成在基板上,所述透明树脂图案膜通过将使用上述树脂组合物形成的树脂膜层压到基板上,然后用活性辐射照射形成潜像,并使树脂膜具有 潜在图案与显影液接触。 树脂组合物显示出优良的显影性和储存稳定性。 由树脂组合物获得的透明树脂图案膜的比介电常数,透明度,加热时的尺寸稳定性,耐溶剂性和平坦性均可以使用,可用作电子部件的树脂膜。
    • 2. 发明申请
    • Radiation sensitive resin composition
    • 辐射敏感树脂组合物
    • US20060040201A1
    • 2006-02-23
    • US10534459
    • 2003-11-19
    • Hiroshi Kurakata
    • Hiroshi Kurakata
    • G03C1/76
    • G03F7/0382
    • A radiation sensitive resin composition which contains an alicyclic olefin resin obtained by ring-opening polymerization of a polymerizable monomer containing an alicyclic olefin monomer having carboxyl group using a ruthenium catalyst, followed by hydrogenation, an acid-generating agent, a crosslinking agent and a solvent; and a transparent resin pattern film formed on a substrate obtained by laminating a resin film formed by using the resin composition described above to the substrate, followed by irradiation with an active radiation to form a latent pattern and developing the pattern by bringing the resin film having the latent pattern into contact with a developing solution. The resin composition exhibits excellent property for development and storage stability. The transparent resin pattern film obtained from the resin composition exhibits excellent specific permittivity, transparency, dimensional stability under heating, solvent resistance and flatness and can be utilized as the resin film for electronic parts.
    • 一种辐射敏感性树脂组合物,其含有通过使用钌催化剂,含有具有羧基的脂环族烯烃单体,然后氢化,产酸剂,交联剂和溶剂的可聚合单体的开环聚合获得的脂环式烯烃树脂 ; 以及透明树脂图案膜,其形成在基板上,所述透明树脂图案膜通过将使用上述树脂组合物形成的树脂膜层压到基板上,然后用活性辐射照射形成潜像,并使树脂膜具有 潜在图案与显影液接触。 树脂组合物显示出优良的显影性和储存稳定性。 由树脂组合物获得的透明树脂图案膜的比介电常数,透明度,加热时的尺寸稳定性,耐溶剂性和平坦性均可以使用,可用作电子部件的树脂膜。