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1. 发明授权

US06681148B2 Monitoring system for a conveying device for flat articles, especially wafers 失效
标题翻译：用于扁平制品，特别是晶片的输送装置的监测系统
公开(公告)号：US06681148B2
公开(公告)日：2004-01-20
申请号：US10149046
申请日：2002-06-03
申请人： Hans Lettner , Xaver Kollmer , Günther Schindler , Ernst Georg Frisch
发明人： Hans Lettner , Xaver Kollmer , Günther Schindler , Ernst Georg Frisch
IPC分类号： G06F700
CPC分类号： H01L21/67259 , G05B19/404 , G05B2219/37555 , G05B2219/37571 , H01L21/67742 , Y10S414/137
摘要： The invention relates to a monitoring system for a conveying device for flat articles, especially wafers, which conveying device is provided with a carriage (28) that is movable along a predetermined path next to a flat article (10) that is located at a predetermined removal location, the carriage having a receiving device for the accommodation of the flat article (10), which monitoring system contains a light source (50) having a light-exit window and a light receiver (52) having a light-admission window, whereby the light-exit window and the light-admission window are positioned in such a way that a light beam (60) directed form the light-exit window to the light-admission window is partially covered by the carriage (28) during its movement through the light beam, and an evaluation unit that is connected to the light receiver and that compares a target signal derived from its movement of the carriage along a target path with an actual signal derived from an actual movement of the carriage, and indicates a deviation.
摘要翻译：本发明涉及一种用于扁平制品，特别是晶片的输送装置的监测系统，该输送装置设置有可沿着预定路径移动的托架（28），所述托架位于预定的平坦制品（10）旁边，所述托架具有用于平坦物品（10）的容纳的接收装置，该监视系统包含具有出射窗的光源（50）和具有入光窗的光接收器（52）由此所述出光窗口和所述光入口窗口被定位成使得从所述光出射窗口到所述入光窗口的指向的光束（60）在其运动期间被所述托架（28）部分地覆盖通过光束，以及评估单元，其连接到光接收器，并且将从其沿着目标路径的滑架的移动导出的目标信号与从轿厢的实际运动导出的实际信号进行比较并且表示偏差。

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