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    • 2. 发明授权
    • Flow-control type piezoelectric element valve
    • 流量控制型压电元件阀
    • US5029610A
    • 1991-07-09
    • US481821
    • 1990-02-14
    • Hajime HiratsukaKozo KawasakiYasuhiko Miyo
    • Hajime HiratsukaKozo KawasakiYasuhiko Miyo
    • F16K31/02F16K31/00
    • F16K31/005Y10T137/8326
    • A flow-control type piezoelectric element valve simplifies calibration of the gas flow rate, permits stable control of the gas flow rate and facilitates to supply a gas at stable flow rate. A gap is produced between a valve seat and a sealing portion comprising a sheet arranged on the top of the valve seat and a piezoelectric element, by applying from a current installation element to the piezoelectric element. Then a gas is introduced into a gas channel within the valve seat through the gap, pressure of the gas flowing along the gas channel is detected by means of a pressure sensor mounted near the outlet of the gas channel. According to correlation between pressure and gas flow rate in the output characteristics on the pressure sensor, the flow rate at the time when a gas flows along the gas channel can be accurately and easily calculated.
    • 流量控制型压电元件阀简化了气体流量的校准,允许气体流量的稳定控制,并且有利于以稳定的流量供应气体。 在阀座与包括设置在阀座顶部的片材和密封部件之间产生间隙,通过从当前的安装元件施加到压电元件。 然后通过间隙将气体引入阀座内的气体通道中,通过安装在气体通道出口附近的压力传感器检测沿气体通道流动的气体的压力。 根据压力传感器输出特性的压力与气体流量的相关性,可以准确容易地计算气体沿气体通道流动时的流量。
    • 3. 发明授权
    • Gas amount measurement device
    • 气量测量装置
    • US08042378B2
    • 2011-10-25
    • US12252940
    • 2008-10-16
    • Tetsuya AbeToshihisa HatanoHajime HiratsukaKoichi HasegawaYasuhide TajimaSoichiro Omachi
    • Tetsuya AbeToshihisa HatanoHajime HiratsukaKoichi HasegawaYasuhide TajimaSoichiro Omachi
    • G01N33/20
    • G01N7/14
    • A gas amount measuring device including a vacuum container, a first pipe, an air release valve being attached to the first pipe, a second pipe, a calibration gas generator being attached to the first pipe, a third pipe, a vacuum gauge, a first valve, a leak valve, a second valve, a turbomolecular pump, a third valve, and a roughing pump being attached to the third pipe in order from a vacuum container side, a first bypass pipe connecting the third pipe between the vacuum container and the first valve to the third pipe between the leak valve and the second valve, a fourth valve being attached to the first bypass pipe, and a second bypass pipe connecting the third pipe between the leak valve and the second valve to the third pipe between the third valve and the roughing pump, a fifth valve being attached to the second bypass pipe.
    • 一种气体量测量装置,包括真空容器,第一管,安装在第一管上的排气阀,第二管,附接到第一管的校准气体发生器,第三管,真空计,第一管 阀,泄漏阀,第二阀,涡轮分子泵,第三阀和粗抽泵,从真空容器侧依次附接到第三管,第一旁通管,将第三管连接在真空容器和 第一阀到泄漏阀和第二阀之间的第三管,第四阀连接到第一旁通管,以及第二旁通管,将第二管和第二阀连接到第三管之间,第三管在第三管之间, 阀和粗抽泵,第五阀连接到第二旁通管。