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    • 1. 发明申请
    • Short and thin silicon cantilever with tip and fabrication thereof
    • 具有尖端的薄且薄的硅悬臂及其制造
    • US20070125160A1
    • 2007-06-07
    • US11599726
    • 2006-11-15
    • Chengzhi CaiChin-Ming YamGuoting QinSteven PeiQingkai Yu
    • Chengzhi CaiChin-Ming YamGuoting QinSteven PeiQingkai Yu
    • G12B21/08H01L21/302
    • G01Q60/38Y10S977/863Y10S977/879
    • Thin and short cantilevers possess both a low force constant and a high resonance frequency, thus are highly desirable for atomic force microscope (AFM) imaging and force measurement. According to some embodiments, the invention provides small silicon (Si) cantilevers integrated with a Si tip, for example fabricated from SOI wafers that are used for reducing the variation of thickness of the cantilevers. In one example, the fabrication process provided SOI chips containing 40 silicon cantilevers integrating with an ultra-sharp Si tip. The resolution of images obtained with these tips was much higher than those obtained with the commercial tips, while the force constants were much less, that is, more suitable for imaging soft samples. The availability of such SOI chips greatly facilitates large scale modification of the surfaces of the silicon cantilever tips with a monolayer of oligo(ethylene glycol) derivatives that resist the non-specific interactions with proteins, rendering them most suitable for imaging and measurement of biological samples.
    • 薄且短的悬臂具有低的力常数和高的共振频率,因此对于原子力显微镜(AFM)成像和力测量是非常需要的。 根据一些实施例,本发明提供了与Si尖端集成的小硅(Si)悬臂,例如由用于减小悬臂的厚度变化的SOI晶片制造的。 在一个示例中,制造工艺提供了包含与超尖锐Si尖端集成的40个硅悬臂的SOI芯片。 使用这些尖端获得的图像的分辨率远高于用商业尖端获得的图像的分辨率,而力常数更小,也就是更适合于成像软样品。 这种SOI芯片的可用性极大地促进了用悬臂梁尖端表面的大规模修饰,其中单层的寡聚(乙二醇)衍生物抵抗与蛋白质的非特异性相互作用,使其最适合于生物样品的成像和测量 。
    • 4. 发明授权
    • Short and thin silicon cantilever with tip and fabrication thereof
    • 具有尖端的薄且薄的硅悬臂及其制造
    • US07637960B2
    • 2009-12-29
    • US11599726
    • 2006-11-15
    • Chengzhi CaiChi-Ming YamGuoting QinSteven PeiQingkai Yu
    • Chengzhi CaiChi-Ming YamGuoting QinSteven PeiQingkai Yu
    • G12B21/08
    • G01Q60/38Y10S977/863Y10S977/879
    • Thin and short cantilevers possess both a low force constant and a high resonance frequency, thus are highly desirable for atomic force microscope (AFM) imaging and force measurement. According to some embodiments, the invention provides small silicon (Si) cantilevers integrated with a Si tip, for example fabricated from SOI wafers that are used for reducing the variation of thickness of the cantilevers. In one example, the fabrication process provided SOI chips containing 40 silicon cantilevers integrating with an ultra-sharp Si tip. The resolution of images obtained with these tips was much higher than those obtained with the commercial tips, while the force constants were much less, that is, more suitable for imaging soft samples. The availability of such SOI chips greatly facilitates large scale modification of the surfaces of the silicon cantilever tips with a monolayer of oligo(ethylene glycol) derivatives that resist the non-specific interactions with proteins, rendering them most suitable for imaging and measurement of biological samples.
    • 薄且短的悬臂具有低的力常数和高的共振频率,因此对于原子力显微镜(AFM)成像和力测量是非常需要的。 根据一些实施例,本发明提供了与Si尖端集成的小硅(Si)悬臂,例如由用于减小悬臂的厚度变化的SOI晶片制造的。 在一个示例中,制造工艺提供了包含与超尖锐Si尖端集成的40个硅悬臂的SOI芯片。 使用这些尖端获得的图像的分辨率远高于用商业尖端获得的图像的分辨率,而力常数更小,也就是更适合于成像软样品。 这种SOI芯片的可用性极大地促进了用悬臂梁尖端表面的大规模修饰,其中单层的寡聚(乙二醇)衍生物抵抗与蛋白质的非特异性相互作用,使其最适合于生物样品的成像和测量 。