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    • 3. 发明申请
    • SILICON PHOTODETECTION MODULE
    • 硅光电模块
    • US20110079708A1
    • 2011-04-07
    • US12754098
    • 2010-04-05
    • Yue-Ming HsinFang-Ping ChouGuan-Yu Chen
    • Yue-Ming HsinFang-Ping ChouGuan-Yu Chen
    • H01L31/102H03F3/08
    • H03F3/08H01L31/103H01L31/1105
    • A silicon photo-detection module is disclosed, in which a silicon photodiode detection unit and a parasitical vertical bipolar junction transistor amplification unit can be simultaneously formed by a CMOS process. The silicon photo-detection module has a silicon substrate, a silicon photodiode detection unit comprising a positive portion and a negative portion, and a parasitical vertical bipolar junction transistor amplification unit comprising a collector, a base, and an emitter. The silicon photodiode detection unit and the parasitical vertical bipolar junction transistor amplification unit are formed on the silicon substrate by a CMOS process. Besides, the positive and negative portions of the silicon photodiode detection unit are electrically connected respectively with the base and the collector of the parasitical vertical bipolar junction transistor amplification unit.
    • 公开了一种硅光电检测模块,其中可以通过CMOS工艺同时形成硅光电二极管检测单元和寄生垂直双极结型晶体管放大单元。 硅光检测模块具有硅衬底,包括正部分和负部分的硅光电二极管检测单元,以及包括集电极,基极和发射极的寄生垂直双极结型晶体管放大单元。 通过CMOS工艺在硅衬底上形成硅光电二极管检测单元和寄生垂直双极结晶体管放大单元。 此外,硅光电二极管检测单元的正极和负极分别与寄生垂直双极结型晶体管放大单元的基极和集电极电连接。
    • 6. 发明授权
    • Si photodiode with symmetry layout and deep well bias in CMOS technology
    • 硅光电二极管具有对称布局和深阱偏压CMOS技术
    • US08598639B2
    • 2013-12-03
    • US13039280
    • 2011-03-02
    • Yue-Ming HsinFang-Ping ChouChing-Wen WangGuan-Yu Chen
    • Yue-Ming HsinFang-Ping ChouChing-Wen WangGuan-Yu Chen
    • H01L31/113
    • H01L31/103H01L27/1446
    • A silicon photodiode with symmetry layout and deep well bias in CMOS technology is provided. The silicon photodiode includes a substrate, a deep well, and a PN diode structure. The deep well is disposed on the substrate, where an extra bias is applied to the deep well. The region surrounded by the deep well forms the main body of the silicon photodiode. The PN diode structure is located in the region surrounded by the deep well, where the silicon photodiode has a symmetry layout. The deep well is adopted when fabricating the silicon photodiode, and the extra bias is applied to the deep well to eliminate the interference and effect of the substrate absorbing light, and further greatly improve speed and bandwidth. Furthermore, the silicon photodiode has a symmetry layout, so that uniform electric field distribution is achieved, and the interference of the substrate noise is also reduced.
    • 提供了CMOS技术中具有对称布局和深阱偏置的硅光电二极管。 硅光电二极管包括衬底,深阱和PN二极管结构。 深井设置在衬底上,其中对深井施加额外的偏压。 由深阱包围的区域形成硅光电二极管的主体。 PN二极管结构位于由深阱包围的区域中,其中硅光电二极管具有对称布局。 在制造硅光电二极管时采用深阱,并向深阱施加额外偏压,消除基板吸收光的干扰和影响,进一步大大提高速度和带宽。 此外,硅光电二极管具有对称布局,从而实现均匀的电场分布,并且还降低了衬底噪声的干扰。
    • 7. 发明申请
    • SI PHOTODIODE WITH SYMMETRY LAYOUT AND DEEP WELL BIAS IN CMOS TECHNOLOGY
    • 在CMOS技术中具有对称布局和深度偏移的SI光电
    • US20120175690A1
    • 2012-07-12
    • US13039280
    • 2011-03-02
    • Yue-Ming HsinFang-Ping ChouChing-Wen WangGuan-Yu Chen
    • Yue-Ming HsinFang-Ping ChouChing-Wen WangGuan-Yu Chen
    • H01L31/113
    • H01L31/103H01L27/1446
    • A silicon photodiode with symmetry layout and deep well bias in CMOS technology is provided. The silicon photodiode includes a substrate, a deep well, and a PN diode structure. The deep well is disposed on the substrate, where an extra bias is applied to the deep well. The region surrounded by the deep well forms the main body of the silicon photodiode. The PN diode structure is located in the region surrounded by the deep well, where the silicon photodiode has a symmetry layout. The deep well is adopted when fabricating the silicon photodiode, and the extra bias is applied to the deep well to eliminate the interference and effect of the substrate absorbing light, and further greatly improve speed and bandwidth. Furthermore, the silicon photodiode has a symmetry layout, so that uniform electric field distribution is achieved, and the interference of the substrate noise is also reduced.
    • 提供了CMOS技术中具有对称布局和深阱偏置的硅光电二极管。 硅光电二极管包括衬底,深阱和PN二极管结构。 深井设置在衬底上,其中对深井施加额外的偏压。 由深阱包围的区域形成硅光电二极管的主体。 PN二极管结构位于由深阱包围的区域中,其中硅光电二极管具有对称布局。 在制造硅光电二极管时采用深阱,并向深阱施加额外偏压,消除基板吸收光的干扰和影响,进一步大大提高速度和带宽。 此外,硅光电二极管具有对称布局,从而实现均匀的电场分布,并且还降低了衬底噪声的干扰。