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    • 8. 发明授权
    • Hybrid cryogenic vacuum pump apparatus and method of operation
    • 混合式低温真空泵装置及其操作方法
    • US5357760A
    • 1994-10-25
    • US95956
    • 1993-07-22
    • Graham J. Higham
    • Graham J. Higham
    • F04B37/08B01D8/00
    • F04B37/08Y10S417/901
    • Apparatus for vacuum pumping an enclosed chamber without the use of activated charcoal to remove hydrogen by cryosorption. As a result, the potential for contamination by a sorbent material is eliminated. The pumping structure includes an integral two-stage vacuum pump. The first-stage pump is a cryogenic pump having a pump chamber and cryoarrays mounted on an expander for cryocondensation of the principal gases present in the vacuum chamber. The second-stage pump operates at room temperatures and includes one or more getter pumps whose principal function is to remove hydrogen molecules that may be present in the vacuum chamber after the first-stage cryopump has removed most of the cryocondensable gases from the vacuum chamber. In one aspect of the invention, the first-stage pump is separated from the second-stage pump by a gate valve to protect the getter pumps during the regeneration flushing of nitrogen through the first-stage cryogenic pump chamber. In another aspect of the invention, a technique is disclosed to eliminate the need for a gate valve separating the two pumps. In another aspect of the invention, an ion pump is added to the two-stage vacuum pump to reduce the helium and neon molecules that may be present after the pumping of hydrogen and the other cryocondensable gases in the vacuum chamber.
    • 用于真空泵送封闭室而不使用活性炭以通过冷冻吸附除去氢的装置。 结果,消除了吸附剂材料污染的可能性。 泵送结构包括一体式两级真空泵。 第一级泵是具有泵室的低温泵和安装在膨胀机上的冷凝器,用于冷凝存在于真空室中的主要气体。 第二级泵在室温下工作,并且包括一个或多个吸气泵,其主要功能是在第一级低温泵从真空室中除去大部分低温可冷凝气体之后,去除可能存在于真空室中的氢分子。 在本发明的一个方面,第一级泵通过闸阀与第二级泵分离,以在通过第一级低温泵室再生冲洗氮气期间保护吸气泵。 在本发明的另一方面,公开了一种消除对分离两个泵的闸阀的需要的技术。 在本发明的另一方面,离子泵被添加到两级真空泵中以减少在真空室中泵送氢气和其它低温可冷冻气体之后可能存在的氦和氖分子。
    • 9. 发明授权
    • Cryopump method and apparatus
    • 冷冻方法和装置
    • US5305612A
    • 1994-04-26
    • US988708
    • 1992-12-10
    • Graham J. HighamCraig Perkins
    • Graham J. HighamCraig Perkins
    • F04B37/08B01D8/00
    • F04B37/08
    • Cryopump apparatus and method for controlling the operating temperature of a cryoarray in a cryopump. The cryopump has means for thermally isolating one of more of the cryoarrays from the refrigeration source. The means for thermally isolating is a thermal switch formed from at least first and second switch elements made of materials having dissimilar coefficients of thermal expansion. The thermal switch is also used in isolating one of the pump's cryoarrays during a partial regeneration process. The thermal switch of the preferred embodiment may also be used to prevent one of the pump's cryoarrays from falling below a predetermined operating temperature.
    • 冷冻设备和控制低温泵中低温阵列工作温度的方法。 低温泵具有用于将多个冷冻阵列中的一个与制冷源热隔离的装置。 用于隔热的装置是由至少由具有不同热膨胀系数的材料制成的第一和第二开关元件形成的热开关。 在部分再生过程中,热开关还用于隔离泵的低温阵列。 优选实施例的热开关还可用于防止泵的冷冻套管中的一个下降到预定工作温度以下。