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    • 1. 发明授权
    • Wide FOV retro-null outgoing wavefront sensor
    • 宽FOV反向空出射波前传感器
    • US5198653A
    • 1993-03-30
    • US878144
    • 1992-05-04
    • Gon Y. ShenWilliam P. ZmekKer L. Shu
    • Gon Y. ShenWilliam P. ZmekKer L. Shu
    • G01J9/00G02B26/06
    • G02B26/06G01J9/00
    • A wavefront sensor includes a plurality of holographic optical elements (HOEs 50) that are disposed on a surface of a mirror (12) that defines a pupil, each of the HOEs diffracting a portion of an output beam for providing an associated sample beam. An optical wavefront sensor (54) has an input that is optically coupled to each of the sample beams through a low aberration optical train and through a transfer lens (54a) that focuses the sample beams at a focal plane (FP). A detector (54b) is positioned in a plane parallel to and offset from the focal plane (focus-biased) for detecting spot images of the sample beams. Each of the HOEs has a prescribed amount of optical power associated therewith for causing the associated sample beam to be focussed by the transfer lens at the plane of the detector, and further has a prescribed amount of optical tilt associated therewith for compensating for a distortion of the sample beam due to a distortion of the pupil for different FOV angles.
    • 波前传感器包括设置在限定瞳孔的反射镜(12)的表面上的多个全息光学元件(HOE 50),每个HOE衍射输出光束的一部分以提供相关的样品光束。 光波前传感器(54)具有通过低像差光学系统和通过将样本光束聚焦在焦平面(FP)处的转移透镜(54a)光学耦合到每个样本光束的输入。 检测器(54b)位于与焦平面平行并偏离的平面(聚焦偏置)中,用于检测样本光束的斑点图像。 每个HOE具有与其相关联的规定量的光功率,用于使相关联的采样光束由检测器的平面处的转印透镜聚焦,并且还具有与其相关联的规定量的光学倾斜,以补偿 由于不同FOV角度的瞳孔失真导致的采样光束。