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1. 发明授权

US07278817B2 Method for transferring and loading a reticle 有权
标题翻译：传送和加载掩模版的方法
公开(公告)号：US07278817B2
公开(公告)日：2007-10-09
申请号：US11337439
申请日：2006-01-24
申请人： Glenn M. Friedman , Peter Kochersperger , Joseph Laganza
发明人： Glenn M. Friedman , Peter Kochersperger , Joseph Laganza
IPC分类号： B66C1/00
CPC分类号： G03F9/7011 , G03F7/70741
摘要： An apparatus and method of transferring and loading a reticle onto a receiving station (for example, a reticle exposure stage). The reticle is first retrieved from a storage facility with an end effector having a reticle plate coupled to a mounting plate. The mounting plate connects the end effector to a robotic arm. The reticle is aligned in an out-of-plane position in an off-line alignment station. The alignment is in compliance with the alignment requirement at the receiving station. The reticle is mounted onto the reticle plate after undergoing the alignment at the off-line alignment station. The reticle is then transferred from the off-line alignment station to the receiving station while maintaining the previous alignment at the off-line alignment station. The apparatus further provides rigidity of the mounted reticle to ensure compliance with the alignment requirement at the receiving station.
摘要翻译：将掩模版传送和加载到接收站（例如，掩模版曝光阶段）上的装置和方法。首先从存储设备中取出掩模版，其末端执行器具有联接到安装板的标线板。安装板将末端执行器连接到机械手臂。掩模版在离线对准站的平面外位置对齐。对准方式符合接收站的对准要求。在离线对准站经过对准后将掩模版安装在标线板上。然后将掩模版从离线对准站传送到接收站，同时保持在离线对准站处的先前对准。该装置进一步提供所安装的掩模版的刚性，以确保符合接收站处的对准要求。

2. 发明授权

US06991416B2 System and method for reticle protection and transport 失效
公开(公告)号：US06991416B2
公开(公告)日：2006-01-31
申请号：US10216660
申请日：2002-08-12
申请人： Santiago E. del Puerto , Michael A. DeMarco , Glenn M. Friedman , Jorge S. Ivaldi , James A. McClay
发明人： Santiago E. del Puerto , Michael A. DeMarco , Glenn M. Friedman , Jorge S. Ivaldi , James A. McClay
IPC分类号： H01L21/68
CPC分类号： G03F7/70741 , B82Y10/00 , B82Y40/00 , G03F1/24 , G03F1/66 , G03F7/70808 , H01L21/67005 , H01L21/67751 , H01L21/67772 , H01L21/67778 , Y10S414/14
摘要： A substrate protection and transport system and method for transitioning a substrate from atomospheric pressure to vacuum in a lithography tool. The system includes one or more removable substrate transport cassettes. Each cassette has at least one vent and at least one filter. The system further includes an end effector coupled to a robotic arm to enable the substrate to be positioned within one of the cassettes, thereby forming a cassette-substrate arrangement. The system further includes a box having a base and a lid. The box holds one or more of the cassette-substrate arrangements. In this way, a box-cassette-substrate arrangement is provided. An out of vacuum storage rack having shelves for holding the box-cassette-substrate arrangement is also provided. Still further, an entry-exit module having a loadlock is provided for transitioning the cassette-substrate arrangement from atmospheric pressure to vacuum. To transport the substrate, the substrate is first loaded into a removable substrate transport cassette. Next, the cassette-substrate arrangement is loaded into the box. The box-cassette-substrate arrangement is then transported to a shelf of an out of vacuum storage rack. During further processing, the cassette-substrate arrangement is unloaded from the box-cassette-substrate arrangement. The cassette-substrate arrangement is then loaded into a loadlock where it can be transitioned from atmospheric pressure to vacuum. During transitioning, the filters and vents restrict particles within the loadlock from entering the cassette-substrate arrangement and reaching a surface of the substrate.

3. 发明授权

US06619903B2 System and method for reticle protection and transport 失效
标题翻译：用于掩模保护和运输的系统和方法
公开(公告)号：US06619903B2
公开(公告)日：2003-09-16
申请号：US09925722
申请日：2001-08-10
申请人： Glenn M. Friedman , Michael DeMarco , Jorge S. Ivaldi , James A. McClay
发明人： Glenn M. Friedman , Michael DeMarco , Jorge S. Ivaldi , James A. McClay
IPC分类号： B65G4907
CPC分类号： G03F7/70741 , B82Y10/00 , B82Y40/00 , G03F1/24 , G03F1/66 , G03F7/70808 , H01L21/67005 , H01L21/67751 , H01L21/67772 , H01L21/67778 , Y10S414/14
摘要： A reticle protection and transport system and method for a lithography tool. The system includes an indexer that stores a plurality of reticles and a removable reticle cassette. The removable reticle cassette is comprised of an inner chamber and an outer chamber. The system further includes an end effector coupled to a robotic arm. The end effector engages one of the plurality of reticles to enable the reticle to be positioned within the removable reticle cassette and thereafter transported. The system further includes a seal, coupled to the end effector and the robotic arm. To transport the reticle, the reticle is first loaded onto the end effector. Next, the end effector is used to create an arrangement wherein the reticle is loaded into the removable reticle cassette. Importantly, the reticle and removable reticle cassette do not come into contact with one another. The reticle and removable reticle cassette arrangement is then sealed and transported from the indexer to a mount for performing lithographic exposure. Once lithographic exposure is completed, the arrangement is returned to the indexer and the reticle is withdrawn from the removable reticle cassette.
摘要翻译：光刻工具的掩模版保护和输送系统及方法。该系统包括存储多个掩模版和可拆卸标线片盒的分度器。可移除的标线盒由内室和外室构成。该系统还包括耦合到机器臂的端部执行器。端部执行器与多个标线板中的一个接合，以使得标线片能够被定位在可移除的标线盒内并且之后传送。该系统还包括联接到末端执行器和机器臂的密封件。为了运输掩模版，首先将掩模版加载到末端执行器上。接下来，使用端部执行器来产生其中将光罩装载到可移除的标线盒中的布置。重要的是，标线和可拆卸的标线盒不会彼此接触。然后将掩模版和可去除的光罩盒装置密封并从分度器传送到用于进行光刻曝光的安装台。一旦光刻曝光完成，该布置返回到分度器，并将标线从可移除的标线片盒中取出。

4. 发明申请

US20120134769A1 Methods, Systems, And Apparatus Adapted To Transfer Sample Containers 有权
标题翻译：适用于转移样品容器的方法，系统和装置
公开(公告)号：US20120134769A1
公开(公告)日：2012-05-31
申请号：US13389320
申请日：2010-08-06
申请人： Glenn M. Friedman , Erich Kling
发明人： Glenn M. Friedman , Erich Kling
IPC分类号： B25J15/00 , B25J9/00 , B25J11/00
CPC分类号： G01N35/0099 , B25J9/041 , B25J15/0253 , G01N2035/0405
摘要： A method adapted to transfer a sample container such as a capped sample tube is disclosed. In one aspect, the method includes gripping a sample tube body with a first gripper pair and a cap with a second gripper pair of a gripper apparatus. In another aspect, a seating member may contact the cap to aid in the positioning of the sample container. Apparatus and systems for carrying out the method are provided, as are other aspects.
摘要翻译：公开了一种适于传送诸如封盖样品管的样品容器的方法。在一个方面，该方法包括用第一夹持器对夹紧样品管体和具有夹持器装置的第二夹持器对的盖。在另一方面，座位构件可与盖接触以帮助样品容器的定位。与其他方面一样，提供了用于实施该方法的装置和系统。

5. 发明授权

US09164113B2 Methods, systems, and apparatus adapted to transfer sample containers 有权
标题翻译：适于转移样品容器的方法，系统和装置
公开(公告)号：US09164113B2
公开(公告)日：2015-10-20
申请号：US13389320
申请日：2010-08-06
申请人： Glenn M. Friedman , Erich Kling
发明人： Glenn M. Friedman , Erich Kling
IPC分类号： B25J9/04 , G01N35/00 , B25J15/02 , G01N35/04
CPC分类号： G01N35/0099 , B25J9/041 , B25J15/0253 , G01N2035/0405
摘要： A method adapted to transfer a sample container such as a capped sample tube is disclosed. In one aspect, the method includes gripping a sample tube body with a first gripper pair and a cap with a second gripper pair of a gripper apparatus. In another aspect, a seating member may contact the cap to aid in the positioning of the sample container. Apparatus and systems for carrying out the method are provided, as are other aspects.
摘要翻译：公开了一种适于传送诸如封盖样品管的样品容器的方法。在一个方面，该方法包括用第一夹持器对夹紧样品管体和具有夹持器装置的第二夹持器对的盖。在另一方面，座位构件可与盖接触以帮助样品容器的定位。与其他方面一样，提供了用于实施该方法的装置和系统。

6. 发明授权

US5760778A Algorithm for representation of objects to enable robotic recongnition 失效
标题翻译：用于表示对象以实现机器人识别的算法
公开(公告)号：US5760778A
公开(公告)日：1998-06-02
申请号：US515303
申请日：1995-08-15
申请人： Glenn M. Friedman
发明人： Glenn M. Friedman
IPC分类号： G06K9/46 , G06K9/68 , G06T17/10 , G06T17/00
CPC分类号： G06K9/468 , G06T17/10
摘要： An algorithm for representing complex three-dimensional objects in a computer for the purpose of robotic recognition of such objects comprises the generation of superquadric volume primitives, the combination of such superquadric volume primitives, the discarding of all vertices making up such volume primitives except for surface vertices, and the automatic generation of a Winged Edge graph structure from the list of surface vertices. The size of the Winged Edge graph structure is reduced by joining adjacent, coplanar faces, removing the common edge of such faces, and joining unidirectional, collinear edges resulting from any joining of adjacent, coplanar faces.
摘要翻译：用于在计算机中表示复杂三维对象以用于这种对象的机器人识别的算法包括生成超多体积原语，这种超多体积原语的组合，丢弃构成除了表面之外的这样的体元素的所有顶点顶点，以及从表面顶点列表中自动生成Winged Edge图形结构。翼形边缘图形结构的尺寸通过连接相邻的共面，减少这些面的共同边缘，以及连接由相邻共面的任何连接产生的单向共线边缘而减小。

7. 发明授权

US07249925B2 System and method for reticle protection and transport 失效
标题翻译：用于掩模保护和运输的系统和方法
公开(公告)号：US07249925B2
公开(公告)日：2007-07-31
申请号：US11282474
申请日：2005-11-21
申请人： Santiago E. del Puerto , Michael A. DeMarco , Glenn M. Friedman , Jorge S. Ivaldi , James A. McClay
发明人： Santiago E. del Puerto , Michael A. DeMarco , Glenn M. Friedman , Jorge S. Ivaldi , James A. McClay
IPC分类号： H01L21/68
CPC分类号： G03F7/70741 , B82Y10/00 , B82Y40/00 , G03F1/24 , G03F1/66 , G03F7/70808 , H01L21/67005 , H01L21/67751 , H01L21/67772 , H01L21/67778 , Y10S414/14
摘要： A substrate protection and transport system and method for transitioning a substrate from atmospheric pressure to vacuum in a lithography tool. The system includes one or more removable substrate transport cassettes that support a substrate. The cassette can include a base portion and top portion, and can include a seal. Each cassette has at least one vent and at least one filter. The system further includes a box having a base and lid. The box holds one or more cassette-substrate arrangements. A storage rack having shelves for holding the box-cassette-substrate arrangement is also provided. Further, an entry-exit module having a loadlock is provided for transitioning the cassette-substrate arrangement from atmospheric pressure to vacuum. The entry-exit module can include a shuttle and/or elevator for transporting the cassette-substrate arrangement. During transitioning, the filter(s) and vent(s) restrict particles within the loadlock from entering the cassette-substrate arrangement and reaching a surface of the substrate.
摘要翻译：一种用于在光刻工具中将基板从大气压转换成真空的衬底保护和输送系统和方法。该系统包括支撑衬底的一个或多个可移除的衬底输送盒。盒可以包括基部和顶部，并且可以包括密封。每个盒具有至少一个排气口和至少一个过滤器。该系统还包括具有底座和盖子的盒子。盒子保持一个或多个盒式衬底布置。还提供了一种具有用于保持盒 - 盒 - 衬底布置的搁架的存放架。此外，提供具有负载锁的入口模块，用于将盒式基板装置从大气压转换成真空。出入口模块可以包括用于运送盒式基板装置的梭和/或电梯。在过渡期间，过滤器和排气口限制负载锁中的颗粒进入盒 - 衬底布置并到达衬底的表面。

8. 发明授权

US07004715B2 Apparatus for transferring and loading a reticle with a robotic reticle end-effector 失效
标题翻译：用于用机器人掩模版末端执行器传送和加载掩模版的装置
公开(公告)号：US07004715B2
公开(公告)日：2006-02-28
申请号：US10040375
申请日：2002-01-09
申请人： Glenn M. Friedman , Peter Kochersperger , Joseph Laganza
发明人： Glenn M. Friedman , Peter Kochersperger , Joseph Laganza
IPC分类号： B66C1/00
CPC分类号： G03F9/7011 , G03F7/70741
摘要： An apparatus and method of transferring and loading a reticle onto a receiving station (for example, a reticle exposure stage). The reticle is first retrieved from a storage facility with an end effector having an reticle plate coupled to a mounting plate. The mounting plate connects the end effector to a robotic arm. The reticle is aligned in an out-of-plane position in an off-line alignment station. The alignment is in compliance with the alignment requirement at the receiving station. The reticle is mounted onto the reticle plate after undergoing the alignment at the off-line alignment station. The reticle is then transferred from the off-line alignment station to the receiving station while maintaining the previous alignment at the off-line alignment station. The apparatus further provides rigidity of the mounted reticle to ensure compliance with the alignment requirement at the receiving station.
摘要翻译：将掩模版传送和加载到接收站（例如，掩模版曝光阶段）上的装置和方法。首先从存储设备取出掩模版，其末端执行器具有联接到安装板的标线板。安装板将末端执行器连接到机械手臂。掩模版在离线对准站的平面外位置对齐。对准方式符合接收站的对准要求。在离线对准站经过对准后将掩模版安装在标线板上。然后将掩模版从离线对准站传送到接收站，同时保持在离线对准站处的先前对准。该装置进一步提供所安装的掩模版的刚性，以确保符合接收站处的对准要求。

9. 发明授权

US5859422A Apparatus and method for flexible gripping of objects 失效
标题翻译：用于灵活夹持物体的装置和方法
公开(公告)号：US5859422A
公开(公告)日：1999-01-12
申请号：US794367
申请日：1997-02-04
申请人： Glenn M. Friedman
发明人： Glenn M. Friedman
IPC分类号： B25J15/02 , B25J15/10 , B25J19/02 , H01J40/14
CPC分类号： B25J19/025 , B25J15/0273 , B25J15/106
摘要： An apparatus which securely grasps a wide range of three dimensional objects while relaying digital data about the surface grasped using pneumatically actuated mechanical probes for such grasping and optomechanical encoding for such relaying of data. Such optomechanical encoding employs encoder tubes with columns of patterned slots and holes to selectively transmit light through synthetic plastic fibers. A process of constructing the portion of the apparatus where the optomechanical encoding producing such data occurs which comprises continuously looping the synthetic plastic fibers necessary for light transmission, injecting an adhesive and sealant to enable pneumatic operation of the apparatus, and cutting the adhesive and sealant and synthetic plastic fibers in a circular pattern to allow the passage of the encoder tubes.
摘要翻译：一种在使用气动致动的机械探针来掌握关于所用表面的数字数据的同时可靠地掌握各种三维物体的装置，用于这种握持以及用于这种数据中继的机械编码。这种机械编码采用具有图案化槽和孔的列的编码器管，以通过合成塑料纤维选择性地透射光。一种制造装置的部分的方法，其中产生这种数据的光学机械编码包括连续循环光透射所需的合成塑料纤维，注入粘合剂和密封剂以使装置能够气动操作，以及切割粘合剂和密封剂合成塑料纤维为圆形图案，以允许编码器管通过。

10. 发明授权

US5608206A Apparatus and method for flexible gripping of objects 失效
标题翻译：用于灵活夹持物体的装置和方法
公开(公告)号：US5608206A
公开(公告)日：1997-03-04
申请号：US509239
申请日：1995-07-31
申请人： Glenn M. Friedman
发明人： Glenn M. Friedman
IPC分类号： B25J15/02 , B25J15/10 , B25J19/02 , H01J40/14
CPC分类号： B25J19/025 , B25J15/0273 , B25J15/106
摘要： An apparatus which securely grasps a wide range of three dimensional objects while relaying digital data about the surface grasped using pneumatically actuated mechanical probes for such grasping and optomechanical encoding for such relaying of data. Such optomechanical encoding employs encoder tubes with columns of patterned slots and holes to selectively transmit light through synthetic plastic fibers. A process of constructing the portion of the apparatus where the optomechanical encoding producing such data occurs which comprises continuously looping the synthetic plastic fibers necessary for light transmission, injecting an adhesive and sealant to enable pneumatic operation of the apparatus, and cutting the adhesive and sealant and synthetic plastic fibers in a circular pattern to allow the passage of the encoder tubes.
摘要翻译：一种在使用气动致动的机械探针来掌握关于所用表面的数字数据的同时可靠地掌握各种三维物体的装置，用于这种握持以及用于这种数据中继的机械编码。这种机械编码采用具有图案化槽和孔的列的编码器管，以通过合成塑料纤维选择性地透射光。一种制造装置的部分的方法，其中产生这种数据的光学机械编码包括连续循环光透射所需的合成塑料纤维，注入粘合剂和密封剂以使装置能够气动操作，以及切割粘合剂和密封剂合成塑料纤维为圆形图案，以允许编码器管通过。

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