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1. 发明申请

US20140203414A1 Method Of Modifying Surfaces 有权
标题翻译：修改曲面的方法
公开(公告)号：US20140203414A1
公开(公告)日：2014-07-24
申请号：US14237954
申请日：2012-08-15
申请人： Georg Haehner , Malgorzata Adamkiewicz , David O'Hagan
发明人： Georg Haehner , Malgorzata Adamkiewicz , David O'Hagan
IPC分类号： H01L21/02 , H01L23/00 , B05D3/10
CPC分类号： H01L21/02359 , B05D3/107 , B82Y30/00 , C23C16/30 , C23C16/45525 , H01L23/564 , H01L2924/0002 , H01L2924/00
摘要： The invention provides a method for chemically modifying a surface of a substrate, preferably a silicon substrate, including the steps of providing a substrate having at least a portion of a surface thereof coated with an organic coating composition including unsaturated moieties forming a surface coating, and introducing a vapour phase reactive intermediate species based on a Group 14 or Group 15 element from the Periodic Table of Elements to the substrate whereupon the reactive intermediate species is able to react with a number of the unsaturated moieties in the coating composition thereby chemically modifying the surface coating. Also disclosed is a surface-modified substrate obtained or obtainable by the method, and uses thereof in the fabrication of MEMS and IC devices.
摘要翻译：本发明提供了一种用于化学改性基材表面，优选硅基材的方法，包括提供一种基材，该基材的至少一部分表面涂覆有形成表面涂层的不饱和部分的有机涂层组合物，以及将基于元素周期表的第14族或第15族元素的气相反应性中间体物质引入底物，由此反应性中间体物质能够与涂料组合物中的许多不饱和部分反应，从而化学改性表面涂层。还公开了通过该方法获得或可获得的表面改性基板及其在制造MEMS和IC器件中的用途。

2. 发明申请

US20100071477A1 Flow Velocity and Pressure Measurement Using a Vibrating Cantilever Device 有权
标题翻译：使用振动悬臂装置的流速和压力测量
公开(公告)号：US20100071477A1
公开(公告)日：2010-03-25
申请号：US12527346
申请日：2008-01-31
申请人： Georg Haehner , Gennady Lubarsky
发明人： Georg Haehner , Gennady Lubarsky
IPC分类号： G01F1/20 , G01Q60/24
CPC分类号： G01Q30/14 , G01F1/20 , G01F1/32 , G01L9/0011 , G01Q40/00 , G01Q60/38
摘要： Measurement apparatus having a cantilever and a fluid flow channel, the cantilever being positioned in the channel so that it projects in a direction parallel to the direction of fluid flow. In an associated method, the cantilever is positioned in a fluid flow channel such that the cantilever extends parallel with the direction of fluid flow in the channel. Fluid is caused to flow in the channel at a known velocity. The resonant frequency of the cantilever is measured at one or more velocities of fluid flow and calculating the spring constant of the cantilever using the measured resonant frequency or frequencies. If the spring constant of the cantilever is known, the measurement of resonant frequency of the cantilever is used to determine the velocity of the fluid flow.
摘要翻译：具有悬臂和流体流动通道的测量装置，所述悬臂位于通道中，使得其在平行于流体流动方向的方向上突出。在相关联的方法中，悬臂被定位在流体流动通道中，使得悬臂与通道中的流体流动的方向平行地延伸。使流体以已知的速度在通道中流动。在一个或多个流体流速下测量悬臂的共振频率，并使用测量的谐振频率或频率计算悬臂的弹簧常数。如果悬臂的弹簧常数是已知的，则使用悬臂的谐振频率的测量来确定流体流动的速度。

3. 发明授权

US09287114B2 Method of modifying surfaces 有权
标题翻译：修饰表面的方法
公开(公告)号：US09287114B2
公开(公告)日：2016-03-15
申请号：US14237954
申请日：2012-08-15
申请人： Georg Haehner , Malgorzata Adamkiewicz , David O'Hagan
发明人： Georg Haehner , Malgorzata Adamkiewicz , David O'Hagan
IPC分类号： H01L23/18 , H01L21/02 , B82Y30/00 , C23C16/30 , C23C16/455 , B05D3/10 , H01L23/00
CPC分类号： H01L21/02359 , B05D3/107 , B82Y30/00 , C23C16/30 , C23C16/45525 , H01L23/564 , H01L2924/0002 , H01L2924/00
摘要： The invention provides a method for chemically modifying a surface of a substrate, preferably a silicon substrate, including the steps of providing a substrate having at least a portion of a surface thereof coated with an organic coating composition including unsaturated moieties forming a surface coating, and introducing a vapor phase reactive intermediate species based on a Group 14 or Group 15 element from the Periodic Table of Elements to the substrate whereupon the reactive intermediate species is able to react with a number of the unsaturated moieties in the coating composition thereby chemically modifying the surface coating. Also disclosed is a surface-modified substrate obtained or obtainable by the method, and uses thereof in the fabrication of MEMS and IC devices.
摘要翻译：本发明提供了一种用于化学改性基材表面，优选硅基材的方法，包括提供一种基材，该基材的至少一部分表面涂覆有形成表面涂层的不饱和部分的有机涂层组合物，以及将基于元素周期表的第14族或第15族元素的气相反应性中间体物质引入底物，由此反应性中间体物质能够与涂料组合物中的许多不饱和部分反应，从而化学改性表面涂层。还公开了通过该方法获得或可获得的表面改性基板及其在制造MEMS和IC器件中的用途。

4. 发明授权

US08371184B2 Flow velocity and pressure measurement using a vibrating cantilever device 有权
标题翻译：使用振动悬臂装置的流速和压力测量
公开(公告)号：US08371184B2
公开(公告)日：2013-02-12
申请号：US12527346
申请日：2008-01-31
申请人： Georg Haehner , Gennady Lubarsky
发明人： Georg Haehner , Gennady Lubarsky
IPC分类号： G01H13/00 , G01H3/04 , G01Q60/38 , G01Q70/02 , G01F9/00
CPC分类号： G01Q30/14 , G01F1/20 , G01F1/32 , G01L9/0011 , G01Q40/00 , G01Q60/38
摘要： Measurement apparatus having a cantilever and a fluid flow channel, the cantilever being positioned in the channel so that it projects in a direction parallel to the direction of fluid flow. In an associated method, the cantilever is positioned in a fluid flow channel such that the cantilever extends parallel with the direction of fluid flow in the channel. Fluid is caused to flow in the channel at a known velocity. The resonant frequency of the cantilever is measured at one or more velocities of fluid flow and calculating the spring constant of the cantilever using the measured resonant frequency or frequencies. If the spring constant of the cantilever is known, the measurement of resonant frequency of the cantilever is used to determine the velocity of the fluid flow.
摘要翻译：具有悬臂和流体流动通道的测量装置，所述悬臂位于通道中，使得其在平行于流体流动方向的方向上突出。在相关联的方法中，悬臂被定位在流体流动通道中，使得悬臂与通道中的流体流动的方向平行地延伸。使流体以已知的速度在通道中流动。在一个或多个流体流速下测量悬臂的共振频率，并使用测量的谐振频率或频率计算悬臂的弹簧常数。如果悬臂的弹簧常数是已知的，则使用悬臂的谐振频率的测量来确定流体流动的速度。

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