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1. 发明申请

US20110135915A1 Methods of Coating Substrate With Plasma Resistant Coatings and Related Coated Substrates 审中-公开
标题翻译：用等离子体涂层和相关涂层基材涂覆基材的方法
公开(公告)号：US20110135915A1
公开(公告)日：2011-06-09
申请号：US12953224
申请日：2010-11-23
申请人： Sang Ho Lee , Gary Reichl
发明人： Sang Ho Lee , Gary Reichl
IPC分类号： B32B5/00 , C23C14/30 , C23C14/28 , C23C14/06 , C23C16/22 , C23C14/34 , B05D1/36
CPC分类号： C23C14/083 , H01J2237/332 , Y10T428/265
摘要： The invention includes a method of coating a substrate with a plasma etch-resistant layer that exhibits reduced particulation comprising applying an coating layer to a substrate wherein coating layer has a thickness of about 20 microns or less and wherein the coating layer, after exposure to a fluorine based plasma for an amount of time, is substantially free of any cracks or fissures that span the cross section of the coating layer.A coated substrate prepared by the methods described. Also included in the invention are coated substrates for use as a structural element in a fluorine-based semiconductor wafer processing protocol, wherein the coating is a coating layer having a thickness of about 20 microns or less and wherein the coating layer, after exposure to a fluorine based plasma for an amount of time, is substantially free of any cracks or fissures that span the cross section of the coating layer and exhibits reduced particulation.Included are structural elements used in a fluorine-based semiconductor wafer processing protocol, wherein at least a portion of a surface of a structural element is coated with a coating layer that having a thickness of about 20 microns or less and wherein the coating layer, after exposure to a fluorine based plasma for an amount of time, is substantially free of any cracks or fissures that span the cross section of the coating layer and exhibits reduced particulation.
摘要翻译：本发明包括一种用等离子体耐蚀刻层涂覆基材的方法，该层具有减小的颗粒，包括将涂层施加到基材上，其中涂层具有约20微米或更小的厚度，并且其中所述涂层在暴露于基于氟的等离子体一段时间，基本上没有跨过涂层的横截面的任何裂纹或裂缝。通过所述方法制备的涂布基材。本发明还包括用作氟基半导体晶片处理方案中的结构元件的涂布基材，其中所述涂层是具有约20微米或更小的厚度的涂层，并且其中所述涂层在暴露于基于氟的等离子体一段时间，基本上没有任何裂缝或裂缝跨过涂层的横截面并显示减少的颗粒。包括在氟基半导体晶片处理方案中使用的结构元件，其中结构元件的表面的至少一部分涂覆有具有约20微米或更小的厚度的涂层，并且其中所述涂层在暴露于基于氟的等离子体一段时间内，基本上没有任何裂缝或裂缝跨过涂层的横截面并表现出减少的颗粒化。

2. 发明授权

US08189042B2 Vision analysis system for a process vessel 有权
标题翻译：一个加工容器的视觉分析系统
公开(公告)号：US08189042B2
公开(公告)日：2012-05-29
申请号：US11955050
申请日：2007-12-12
申请人： Michael J. Pollack , Branson J. Darnell , Steven J. Mandrachia , Gary Reichl , Richard A. DiDomizio
发明人： Michael J. Pollack , Branson J. Darnell , Steven J. Mandrachia , Gary Reichl , Richard A. DiDomizio
IPC分类号： H04N7/18
CPC分类号： G01N21/51 , G01N21/8507
摘要： A remote vision analysis system for a vessel containing a process liquid having gas bubbles or particles floating therein. A probe extends into the vessel and enables in-situ observation of the process liquid, gas bubbles or particles, and/or surfaces within the vessel. The probe has a proximal end that includes a camera for recording still or motion images of the process liquid, gas bubbles or particles, and/or surfaces within the vessel. An elongate distal end of the probe extends within an interior of the vessel and is housed within a hermetically sealed protective shroud having a lens, or window, through which images are recorded by the camera. The probe is modular and includes interchangeable parts.
摘要翻译：一种用于容纳含有浮在其中的气泡或颗粒的处理液体的容器的远程视觉分析系统。探头延伸到容器中并且能够原位观察容器内的工艺液体，气泡或颗粒，和/或表面。探针具有近端，其包括用于记录处理液体，气泡或颗粒的静止或运动图像的照相机，和/或容器内的表面。探头的细长远端在容器的内部延伸，并且容纳在具有透镜或窗口的气密密封保护罩中，通过照相机记录图像。探头是模块化的，包括可互换部件。

3. 发明授权

US08254657B2 Image recognition and analysis system and software 有权
标题翻译：图像识别和分析系统和软件
公开(公告)号：US08254657B2
公开(公告)日：2012-08-28
申请号：US11970313
申请日：2008-01-07
申请人： Michael J. Pollack , Branson J. Darnell , Steven J. Mandrachia , Gary Reichl , Richard A. DiDomizio
发明人： Michael J. Pollack , Branson J. Darnell , Steven J. Mandrachia , Gary Reichl , Richard A. DiDomizio
IPC分类号： G06K9/00
CPC分类号： G01N15/1463 , G01N15/0227 , G01N21/8507 , G01N2015/0092 , G01N2015/025 , G01N2015/1497 , G06T7/0002 , G06T2207/10016 , G06T2207/30024 , G06T2207/30108
摘要： A method of analyzing bubbles, cells, cell viability, or other particles or agglomerates in a process liquid contained in a vessel is provided. Images of bubbles, cells or other particles in the liquid are obtained in-situ with a vision probe extending through a wall of the vessel. The images are analyzed with image recognition software. The software measures at lease one of bubble, cell or particle size, mean diameter, surface area, flow rate, flow pattern, population distribution, viability, agglomerates or clumping, color change, viscosity, Sauter mean, ratio of surface area of bubbles relative to volume of bubbles, gas hold-up ratio of gas volume to volume of liquid, or interfacial area. The software distinguishes valid or viable bubbles, cells or particles that should be included in an analysis from invalid or non-viable bubbles, cells or particles that should not be included. The software can be configured to provide an analysis of the valid bubbles, cells or particles that fall within pre-set size and shape or viability parameters.
摘要翻译：提供了一种在容器中包含的工艺液体中分析气泡，细胞，细胞活力或其它颗粒或附聚物的方法。液体中的气泡，细胞或其他颗粒的图像可通过延伸穿过血管壁的视觉探针原位获得。图像用图像识别软件分析。软件采用泡沫，细胞或颗粒尺寸，平均直径，表面积，流速，流动模式，种群分布，生存力，团聚或聚集，颜色变化，粘度，Sauter平均值，气泡表面积比气泡体积，气体体积与液体体积的气体滞留比或界面面积。该软件区分有效或可行的气泡，细胞或粒子，应包括在分析中无效或不可行的气泡，不应包括的细胞或颗粒。该软件可以配置为提供落入预设大小和形状或生存参数范围内的有效气泡，细胞或颗粒的分析。

4. 发明申请

US20090018275A1 Method of Bonding Perfluoroelastomeric Materials to a Surface 审中-公开
标题翻译：将全氟弹性材料粘合到表面的方法
公开(公告)号：US20090018275A1
公开(公告)日：2009-01-15
申请号：US11970892
申请日：2008-01-08
申请人： Ronald R. Campbell , Christopher Corrado , Brian Alan Ux , Robert Anthony Rey , Gary Reichl , Carmin Quartapella
发明人： Ronald R. Campbell , Christopher Corrado , Brian Alan Ux , Robert Anthony Rey , Gary Reichl , Carmin Quartapella
IPC分类号： C08L101/04 , B32B37/12 , C08G73/00 , B05D3/00
CPC分类号： C09J127/18 , B29C35/02 , B29C65/14 , B29C65/1406 , B29C65/1412 , B29C65/4835 , B29C65/485 , B29C65/5057 , B29C65/52 , B29C65/522 , B29C65/523 , B29C65/526 , B29C65/7841 , B29C66/1142 , B29C66/5261 , B29C66/5268 , B29C66/71 , B29C66/742 , B29K2019/00 , B29K2027/12 , B29K2027/18 , B29K2305/02 , B29K2305/12 , B29K2995/0058 , B29L2031/06 , B29L2031/26 , B29L2031/7096 , C08F8/30 , C08J5/12 , C08J2315/02 , C08K5/14 , C09J127/20 , C09J171/00 , C08F14/18
摘要： The invention includes a method of bonding a perfluoroelastomer material to first surface that includes: (a) contacting a first surface with a bonding agent comprising a curable perfluoropolymer and a curing agent; (b) curing the bonding agent to form a perfluoroelastomer material that is bonded to the first surface. In the practice of such method, the bonding agent may be a solution prepared by dissolving the curable perfluoroelastomer and the curing agent in a solvent. In an embodiment of the invention, the perfluoroelastomer material formed in step (b) is a coating layer or, alternatively, the first surface is a surface of a perfluoroelastomer member and the perfluoroelastomer material formed is a perfluoroelastomer weld.
摘要翻译：本发明包括将全氟弹性体材料粘合到第一表面的方法，其包括：（a）使第一表面与包含可固化的全氟聚合物和固化剂的粘合剂接触; （b）固化粘合剂以形成结合到第一表面的全氟弹性体材料。在这种方法的实践中，粘合剂可以是通过将可固化的全氟弹性体和固化剂溶解在溶剂中制备的溶液。在本发明的一个实施方案中，步骤（b）中形成的全氟弹性体材料是涂层，或者，第一表面是全氟弹性体构件的表面，所形成的全氟弹性体材料是全氟弹性体焊接。

5. 发明申请

US20080166037A1 Image Recognition and Analysis System and Software 有权
标题翻译：图像识别与分析系统与软件
公开(公告)号：US20080166037A1
公开(公告)日：2008-07-10
申请号：US11970313
申请日：2008-01-07
申请人： Steven J. Mandrachia , Branson J. Darnell , Gary Reichl , Michael J. Pollack , Richard A. DiDomizio
发明人： Steven J. Mandrachia , Branson J. Darnell , Gary Reichl , Michael J. Pollack , Richard A. DiDomizio
IPC分类号： G06K9/00
CPC分类号： G01N15/1463 , G01N15/0227 , G01N21/8507 , G01N2015/0092 , G01N2015/025 , G01N2015/1497 , G06T7/0002 , G06T2207/10016 , G06T2207/30024 , G06T2207/30108
摘要： A method of analyzing bubbles, cells, cell viability, or other particles or agglomerates in a process liquid contained in a vessel is provided. Images of bubbles, cells or other particles in the liquid are obtained in-situ with a vision probe extending through a wall of the vessel. The images are analyzed with image recognition software. The software measures at lease one of bubble, cell or particle size, mean diameter, surface area, flow rate, flow pattern, population distribution, viability, agglomerates or clumping, color change, viscosity, Sauter mean, ratio of surface area of bubbles relative to volume of bubbles, gas hold-up ratio of gas volume to volume of liquid, or interfacial area. The software distinguishes valid or viable bubbles, cells or particles that should be included in an analysis from invalid or non-viable bubbles, cells or particles that should not be included. The software can be configured to provide an analysis of the valid bubbles, cells or particles that fall within pre-set size and shape or viability parameters.
摘要翻译：提供了一种在容器中包含的工艺液体中分析气泡，细胞，细胞活力或其它颗粒或附聚物的方法。液体中的气泡，细胞或其他颗粒的图像可通过延伸穿过血管壁的视觉探针原位获得。图像用图像识别软件分析。软件采用泡沫，细胞或颗粒尺寸，平均直径，表面积，流速，流动模式，种群分布，生存力，团聚或聚集，颜色变化，粘度，Sauter平均值，气泡表面积比气泡体积，气体体积与液体体积的气体滞留比或界面面积。该软件区分有效或可行的气泡，细胞或粒子，应包括在分析中无效或不可行的气泡，不应包括的细胞或颗粒。该软件可以配置为提供落入预设大小和形状或生存参数范围内的有效气泡，细胞或颗粒的分析。

6. 发明申请

US20080143828A1 Vision analysis system for a process vessel 有权
标题翻译：一个加工容器的视觉分析系统
公开(公告)号：US20080143828A1
公开(公告)日：2008-06-19
申请号：US11955050
申请日：2007-12-12
申请人： Steven J. Mandrachia , Branson J. Darnell , Gary Reichl , Michael J. Pollack , Richard A. DiDomizio
发明人： Steven J. Mandrachia , Branson J. Darnell , Gary Reichl , Michael J. Pollack , Richard A. DiDomizio
IPC分类号： H04N7/18
CPC分类号： G01N21/51 , G01N21/8507
摘要： A remote vision analysis system for a vessel containing a process liquid having gas bubbles or particles floating therein. A probe extends into the vessel and enables in-situ observation of the process liquid, gas bubbles or particles, and/or surfaces within the vessel. The probe has a proximal end that includes a camera for recording still or motion images of the process liquid, gas bubbles or particles, and/or surfaces within the vessel. An elongate distal end of the probe extends within an interior of the vessel and is housed within a hermetically sealed protective shroud having a lens, or window, through which images are recorded by the camera. The probe is modular and includes interchangeable parts.
摘要翻译：一种用于容纳含有浮在其中的气泡或颗粒的处理液体的容器的远程视觉分析系统。探头延伸到容器中并且能够原位观察容器内的工艺液体，气泡或颗粒，和/或表面。探针具有近端，其包括用于记录处理液体，气泡或颗粒的静止或运动图像的照相机，和/或容器内的表面。探头的细长远端在容器的内部延伸，并且容纳在具有透镜或窗口的气密密封保护罩中，通过照相机记录图像。探头是模块化的，包括可互换部件。

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