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    • 2. 发明授权
    • Enhanced imaging mode for transmission electron microscopy
    • 用于透射电子显微镜的增强成像模式
    • US5414261A
    • 1995-05-09
    • US86237
    • 1993-07-01
    • Mark H. EllismanGary G. Y. FanJeff PriceSeiichi Suzuki
    • Mark H. EllismanGary G. Y. FanJeff PriceSeiichi Suzuki
    • H01J37/26H01J37/04
    • H01J37/26
    • In the magnetic optical system of a transmission electron microscope (TEM), the increased strength of a second objective lens is used to increase the longitudinal energy dispersion by forming an image at a magnified second back-focal plane. The electric current distribution of other lenses in the microscope is reconfigured to compensate for any offsets introduced by the modified second objective lens. A plurality of deflectors are installed which enable the manipulation of the electron beam electronically between the specimen and the second back-focal plane. The magnified second back-focal plane is projected onto the selected-area aperture, allowing the use of the existing selected-area aperture as an objective aperture to achieve an energy filtering effect which improves the image contrast and resolution.
    • 在透射电子显微镜(TEM)的磁光学系统中,通过在放大的第二后焦平面上形成图像,第二物镜的强度的增加被用于增加纵向能量的分散。 重新配置显微镜中其他透镜的电流分布,以补偿由修改的第二物镜引入的任何偏移。 安装多个偏转器,其能够以电子方式在样本和第二后焦平面之间操纵电子束。 放大的第二后焦平面被投影到选择的区域光圈上,允许使用现有的选择区域光圈作为物镜孔径来实现能量过滤效果,从而提高图像对比度和分辨率。