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1. 发明授权

US06730894B2 Resonant frequency tracking system and method for use in a radio frequency (RF) power supply 有权
标题翻译：用于射频（RF）电源的谐振频率跟踪系统和方法
公开(公告)号：US06730894B2
公开(公告)日：2004-05-04
申请号：US10302981
申请日：2002-11-25
申请人： Leslie L. Thompson , Gary A. Schwenck , Daniel J. Lincoln
发明人： Leslie L. Thompson , Gary A. Schwenck , Daniel J. Lincoln
IPC分类号： H05B608
CPC分类号： H02M7/48 , H05B6/04 , H05B6/06
摘要： An RF power supply that is capable of tracking rapid changes in the resonant frequency of a load and capable of quickly responding to varying load conditions so as to deliver the desired amount of power. The present invention also provides an RF power supply capable of delivering a wide range of power over a broad frequency range to a load that is remotely located from the power supply. According to one embodiment, the RF power supply includes a direct current (DC) voltage source that provides a DC voltage within a predetermined voltage range; an amplifier, coupled to the DC voltage source, that provides an alternating voltage to a tank circuit connected to an output of the RF power supply; a frequency controller, coupled to the amplifier, to set the frequency of the alternating voltage produced by the amplifier; and a sensor, coupled to the load, to provide a signal to the frequency controller, where the frequency controller sets the frequency of the alternating voltage based on the signal received from the sensor.
摘要翻译：一种RF电源，其能够跟踪负载的谐振频率的快速变化，并且能够快速响应于变化的负载条件，以便输送期望的功率量。本发明还提供一种RF电源，其能够在宽的频率范围内向远离电源的负载提供宽范围的电力。根据一个实施例，RF电源包括提供DC电压在预定电压范围内的直流（DC）电压源; 耦合到DC电压源的放大器，其向连接到RF电源的输出端的电路提供交流电压; 耦合到放大器的频率控制器，用于设置由放大器产生的交流电压的频率; 以及耦合到负载的传感器，以向频率控制器提供信号，其中频率控制器基于从传感器接收的信号来设置交流电压的频率。

2. 发明授权

US06316756B1 Resonant frequency tracking system and method for use in a radio frequency (RF) power supply 有权
标题翻译：用于射频（RF）电源的谐振频率跟踪系统和方法
公开(公告)号：US06316756B1
公开(公告)日：2001-11-13
申请号：US09495159
申请日：2000-01-31
申请人： Leslie L. Thompson , Gary A. Schwenck , Daniel J. Lincoln
发明人： Leslie L. Thompson , Gary A. Schwenck , Daniel J. Lincoln
IPC分类号： H05B608
CPC分类号： H02M7/48 , H05B6/04 , H05B6/06
摘要： A radio frequency (RF) power system for providing RF power to a load. The RF power system comprises a tank circuit; a direct current (DC) voltage source that provides a DC voltage within a first predetermined range; an amplifier, coupled to said DC voltage source, to provide an alternating voltage to said tank circuit; a frequency controller, coupled to said amplifier, to control a frequency of said alternating voltage provided by said amplifier; and a power sensor being coupled to said tank circuit for providing a signal to said frequency controller, wherein said frequency controller controls said frequency of said alternating voltage based on said signal provided from said power sensor.
摘要翻译：用于向负载提供RF功率的射频（RF）电力系统。 RF电力系统包括一个储能电路; 将直流电压提供在第一预定范围内的直流（DC）电压源; 耦合到所述DC电压源的放大器，以向所述储能电路提供交流电压; 频率控制器，耦合到所述放大器，以控制由所述放大器提供的所述交流电压的频率; 以及功率传感器，其耦合到所述振荡电路，用于向所述频率控制器提供信号，其中所述频率控制器基于从所述功率传感器提供的所述信号来控制所述交流电压的所述频率。

3. 发明授权

US06271508B1 System and method for providing RF power to a load 有权
标题翻译：向负载提供射频功率的系统和方法
公开(公告)号：US06271508B1
公开(公告)日：2001-08-07
申请号：US09528182
申请日：2000-03-17
申请人： Leslie L. Thompson , Gary A. Schwenck , Daniel J. Lincoln
发明人： Leslie L. Thompson , Gary A. Schwenck , Daniel J. Lincoln
IPC分类号： H05B608
CPC分类号： H02M7/48 , H05B6/04 , H05B6/06
摘要： An RF power supply that is capable of tracking rapid changes in the resonant frequency of a load and capable of quickly responding to varying load conditions so as to deliver the desired amount of power. The present invention also provides an RF power supply capable of delivering a wide range of power over a broad frequency range to a load that is remotely located from the power supply. According to one embodiment, the RF power supply includes a direct current (DC) voltage source that provides a DC voltage within a predetermined. voltage range; an amplifier, coupled to the DC voltage source, that provides an alternating voltage to a tank circuit connected to an output of the RF power supply; a frequency controller, coupled to the amplifier, to set the frequency of the alternating voltage produced by the amplifier, and a sensor, coupled to the load, to provide a signal to the frequency controller, where the frequency controller sets the frequency of the alternating voltage based on the signal received from the sensor.
摘要翻译：一种RF电源，其能够跟踪负载的谐振频率的快速变化，并且能够快速响应于变化的负载条件，以便输送期望的功率量。本发明还提供一种RF电源，其能够在宽的频率范围内向远离电源的负载提供宽范围的电力。根据一个实施例，RF电源包括提供预定值内的DC电压的直流（DC）电压源。电压范围耦合到DC电压源的放大器，其向连接到RF电源的输出端的电路提供交流电压; 频率控制器，耦合到放大器，以设置由放大器产生的交流电压的频率，以及耦合到负载的传感器，以向频率控制器提供信号，其中频率控制器设置交替的频率基于从传感器接收的信号的电压。

4. 发明授权

US06521874B2 RF power supply 有权
标题翻译：射频电源
公开(公告)号：US06521874B2
公开(公告)日：2003-02-18
申请号：US09922655
申请日：2001-08-07
申请人： Leslie L. Thompson , Gary A. Schwenck , Daniel J. Lincoln
发明人： Leslie L. Thompson , Gary A. Schwenck , Daniel J. Lincoln
IPC分类号： H05B608
CPC分类号： H02M7/48 , H05B6/04 , H05B6/06
摘要： An RF power supply that is capable of tracking rapid changes in the resonant frequency of a load and capable of quickly responding to varying load conditions so as to deliver the desired amount of power. The present invention also provides an RF power supply capable of delivering a wide range of power over a broad frequency range to a load that is remotely located from the power supply. According to one embodiment, the RF power supply includes a direct current (DC) voltage source that provides a DC voltage within a predetermined voltage range; an amplifier, coupled to the DC voltage source, that provides an alternating voltage to a tank circuit connected to an output of the RF power supply; a frequency controller, coupled to the amplifier, to set the frequency of the alternating voltage produced by the amplifier; and a sensor, coupled to the load, to provide a signal to the frequency controller, where the frequency controller sets the frequency of the alternating voltage based on the signal received from the sensor.
摘要翻译：一种RF电源，其能够跟踪负载的谐振频率的快速变化，并且能够快速响应于变化的负载条件，以便输送期望的功率量。本发明还提供一种RF电源，其能够在宽的频率范围内向远离电源的负载提供宽范围的电力。根据一个实施例，RF电源包括提供DC电压在预定电压范围内的直流（DC）电压源; 耦合到DC电压源的放大器，其向连接到RF电源的输出端的电路提供交流电压; 耦合到放大器的频率控制器，用于设置由放大器产生的交流电压的频率; 以及耦合到负载的传感器，以向频率控制器提供信号，其中频率控制器基于从传感器接收的信号来设置交流电压的频率。

5. 发明授权

US06255635B1 System and method for providing RF power to a load 失效
标题翻译：向负载提供射频功率的系统和方法
公开(公告)号：US06255635B1
公开(公告)日：2001-07-03
申请号：US09113518
申请日：1998-07-10
申请人： Leslie L. Thompson , Gary A. Schwenck , Daniel J. Lincoln
发明人： Leslie L. Thompson , Gary A. Schwenck , Daniel J. Lincoln
IPC分类号： H05B608
CPC分类号： H02M7/48 , H05B6/04 , H05B6/06
摘要： An RF power supply that is capable of tracking rapid changes in the resonant frequency of a load and capable of quickly responding to varying load conditions so as to deliver the desired amount of power. The present invention also provides an RF power supply capable of delivering a wide range of power over a broad frequency range to a load that is remotely located from the power supply. According to one embodiment, the RF power supply includes a direct current (DC) voltage source that provides a DC voltage within a predetermined voltage range; an amplifier, coupled to the DC voltage source, that provides an alternating voltage to a tank circuit connected to an output of the RF power supply; a frequency controller, coupled to the amplifier, to set the frequency of the alternating voltage produced by the amplifier; and a sensor, coupled to the load, to provide a signal to the frequency controller, where the frequency controller sets the frequency of the alternating voltage based on the signal received from the sensor.
摘要翻译：一种RF电源，其能够跟踪负载的谐振频率的快速变化，并且能够快速响应于变化的负载条件，以便输送期望的功率量。本发明还提供一种RF电源，其能够在宽的频率范围内向远离电源的负载提供宽范围的电力。根据一个实施例，RF电源包括提供DC电压在预定电压范围内的直流（DC）电压源; 耦合到DC电压源的放大器，其向连接到RF电源的输出端的电路提供交流电压; 耦合到放大器的频率控制器，用于设置由放大器产生的交流电压的频率; 以及耦合到负载的传感器，以向频率控制器提供信号，其中频率控制器基于从传感器接收的信号来设置交流电压的频率。

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