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2. 发明申请

US20060237861A1 BUBBLER FOR SUBSTRATE PROCESSING 有权
标题翻译：用于衬底加工的搅拌机
公开(公告)号：US20060237861A1
公开(公告)日：2006-10-26
申请号：US11428267
申请日：2006-06-30
申请人： Michael Stamp , Frederick AmRhein , Arnold Dale , Joseph Pottebaum , Brian Ebert
发明人： Michael Stamp , Frederick AmRhein , Arnold Dale , Joseph Pottebaum , Brian Ebert
IPC分类号： B01D47/02
CPC分类号： C23C16/402 , C23C16/24 , C23C16/4482 , H01L28/84 , Y10S261/65
摘要： A vaporization chamber for a substrate processing system comprises a main body, a cover member and a transition member. The main body is made of aluminum and defines a first inner surface, which defines, at least in part, a cavity. The cover member is also made of aluminum. The cover member defines a second inner surface, which also defines, at least in part, the cavity. The cover member comprises a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extends from a first outer surface through the cover member to the second inner surface. The transition member is made of stainless steel and has a transition outer surface and a transition inner surface. The transition inner surface is aluminum cladded. The cover member comprising a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extend from a first outer surface through the cover member to second inner surface. The transition inner surface and the cover outer surface are welded together.
摘要翻译：用于基板处理系统的蒸发室包括主体，盖构件和过渡构件。主体由铝制成并且限定了至少部分地限定空腔的第一内表面。盖构件也由铝制成。盖构件限定第二内表面，其还至少部分地限定空腔。盖构件包括载气盖入口，液源盖入口，源盖出口，其从第一外表面延伸穿过盖构件到第二内表面。过渡构件由不锈钢制成，具有过渡外表面和过渡内表面。过渡内表面是铝包层。盖构件包括载气盖入口，液源盖入口，源盖出口，其从第一外表面延伸穿过盖构件到第二内表面。过渡内表面和盖外表面焊接在一起。

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