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1. 发明授权

US4496423A Gas feed for reactive ion etch system 失效
标题翻译：反应离子蚀刻系统的气体进料
公开(公告)号：US4496423A
公开(公告)日：1985-01-29
申请号：US550801
申请日：1983-11-14
申请人： Frank J. Walton
发明人： Frank J. Walton
IPC分类号： C23F4/00 , H01J37/32 , H01L21/302 , H01L21/3065 , H01L21/306 , C23F1/00
CPC分类号： H01J37/3244 , Y10S438/935
摘要： The gas feed system disclosed herein is useful in a reactive ion etching system in which a gas plasma is energized by an electrode plate through which the gas is introduced. Propagation of the plasma discharge down the gas feed path is blocked by a feed system in which the space between a pair of porous metal plugs is filled with a porous insulating material having a pore size too small to support discharge, i.e. corresponding to the mean free electron path in the gas.
摘要翻译：本文公开的气体供给系统在反应离子蚀刻系统中是有用的，其中气体等离子体被引入气体的电极板激励。通过进料系统阻止等离子体放电的传播，其中一对多孔金属塞之间的空间用孔径太小而不能排出的多孔绝缘材料填充，即对应于平均自由度气体中的电子路径。

2. 发明授权

US4088073A Process for preparing ink releasing stencil 失效
标题翻译：油墨释放模板的制备方法
公开(公告)号：US4088073A
公开(公告)日：1978-05-09
申请号：US428962
申请日：1973-12-27
申请人： Richard G. Crystal , Frank J. Walton
发明人： Richard G. Crystal , Frank J. Walton
IPC分类号： B41C1/14 , B41N1/24
CPC分类号： B41C1/14
摘要： A novel method for preparing a stencil master, a novel stencil and a method for printing therefrom are provided. The method for preparing the stencil comprises coating a suitable screen with a curable silicone containing a curing catalyst, depositing a particulate image pattern on said coated screen with a material which selectively inactivates said curing catalyst below said image pattern, curing the resultant nonimaged silicone to an elastomeric ink releasable condition and removing the particles from said particulate image pattern and the uncured silicone below said pattern to provide perforations in imagewise configuration. The method for printing comprises the additional steps of contacting the resultant screen with an image receiving member and passing ink through said perforations to thereby form an inked image on said receiving member.
摘要翻译：提供了一种用于制备模板母版，新型模版和其印刷方法的新颖方法。制备模板的方法包括用含有固化催化剂的可固化硅树脂涂覆合适的筛网，在所述涂覆的筛网上沉积颗粒图像图案，所述材料选择性地使所述固化催化剂在所述图像图案下方失活，将得到的非成像硅胶固化成弹性体油墨可释放状态，并从所述颗粒图像图案和所述图案下方的未固化的硅氧烷除去颗粒以提供成像构造的穿孔。打印方法包括使所得到的屏幕与图像接收部件接触并使油墨通过所述穿孔的附加步骤，从而在所述接收部件上形成着墨图像。

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