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1. 发明授权

US5687574A Throttle cycle cryopumping system for Group I gases 失效
标题翻译：用于I组气体的节气循环低温泵系统
公开(公告)号：US5687574A
公开(公告)日：1997-11-18
申请号：US615131
申请日：1996-03-14
申请人： Ralph C. Longsworth , Francis T. Lotz
发明人： Ralph C. Longsworth , Francis T. Lotz
IPC分类号： B01D8/00 , F04B37/08 , F25B9/00 , F25B19/02
CPC分类号： F04B37/08 , B01D8/00 , F25B9/006 , Y10S417/901
摘要： A Group I gas cryopumping system includes a compressor throttle cycle refrigerator using mixed refrigerants. Cold refrigerant flows through a cryopumping surface located in a vacuum chamber, whereon vapor freezes. The refrigerant then passes through a heat exchanger in cross flow with refrigerant from the compressor. Refrigerant flow entering and leaving the heat exchanger is in uninsulated lines at substantially room temperature. All exposed cold lines are eliminated. The throttle device and cold cryopumping surface are an integral unit that connects directly to the flow paths of the heat exchanger without intermediate lines. The compressor/aftercooler unit may be located at any convenient distance from the heat exchanger and cryopumping surface, and the heat exchanger is located immediately adjacent to the pumping surface in a separate housing outside the vacuum chamber. The heat exchanger housing may share or be isolated from the vacuum of the vacuum chamber. Selected mixed refrigerants provide a wide range of cooling capacity over narrow, selectable temperature ranges. Thus, in a selected temperature range, gases are selectively collected to the exclusion of other gases. A tray collects liquid water from the cryopump surfaces during defrost.
摘要翻译：第一组气体低温泵系统包括使用混合制冷剂的压缩机节流循环制冷机。冷制冷剂流经位于真空室内的低温泵，其中气体冻结。然后制冷剂与来自压缩机的制冷剂交叉流过热交换器。进入和离开热交换器的制冷剂流在基本室温的非绝缘管线中。所有暴露的冷线都被消除。节流装置和冷冻低温表面是直接连接到没有中间管线的热交换器的流动路径的整体单元。压缩机/后冷却器单元可以位于距离热交换器和低温泵的表面任何方便的距离处，并且热交换器位于真空室外部的单独壳体中紧邻泵送表面。热交换器壳体可以与真空室的真空共享或隔离。选择的混合制冷剂在窄的可选择的温度范围内提供宽范围的冷却能力。因此，在选定的温度范围内，选择性地收集气体以排除其它气体。在除霜期间，托盘从低温泵表面收集液态水。

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