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    • 2. 发明授权
    • Method of adjusting the threshold voltage of a transistor by a buried trapping layer
    • 通过埋置捕获层调节晶体管的阈值电压的方法
    • US08809964B2
    • 2014-08-19
    • US12865549
    • 2009-02-11
    • François AndrieuEmmanuel AugendreLaurent ClavelierMarek Kostrzewa
    • François AndrieuEmmanuel AugendreLaurent ClavelierMarek Kostrzewa
    • H01L21/336H01L29/792
    • H01L29/42348H01L21/84H01L27/1203H01L29/792
    • An electronic subassembly and associated method for the production of an electronic subassembly include a semiconductor layer bearing at least a first transistor having an adjustable threshold voltage is joined to an insulator layer and in which a first trapping zone is formed at a predetermined first depth. The first trapping zone extends at least beneath a channel of the first transistor and includes traps of greater density than the density of traps outside the first trapping zone, in such a way that the semiconductor layer and the first trapping zone are capacitively coupled. The useful information from the first transistor includes the charge transport within this transistor. A second trapping zone can be formed that extends at least beneath a channel of a second transistor that is formed by a second implantation with an energy and/or a dose and/or atoms that differ from those used to form the first trapping zone.
    • 一种用于生产电子组件的电子组件和相关方法,包括至少具有可调阈值电压的第一晶体管的半导体层被连接到绝缘体层,并且其中在预定的第一深度形成第一捕集区。 第一捕获区至少在第一晶体管的沟道下方延伸,并且包括具有比第一捕获区外的阱的密度更高密度的陷阱,使得半导体层和第一捕获区电容耦合。 来自第一晶体管的有用信息包括该晶体管内的电荷传输。 可以形成第二捕获区,其至少在通过第二注入形成的第二晶体管的沟道下方延伸,所述第二晶体管具有不同于用于形成第一捕获区的能量和/或剂量和/或原子的能量和/或原子。