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    • 7. 发明授权
    • Electrical resistance measurement apparatus and electrical resistance measurement method
    • 电阻测量装置和电阻测量方法
    • US09372215B2
    • 2016-06-21
    • US13786825
    • 2013-03-06
    • FURUKAWA CO., LTD.
    • Akihide Hamano
    • G01R27/02G01N21/3581
    • G01R27/02G01N21/3581
    • An electrical resistance measurement apparatus includes a light irradiation unit that irradiates a conductive thin film with terahertz light, a reflection light detection unit that detects reflection light from the conductive thin film, and a computer containing a storage that stores correlation between the reflectance of the terahertz light from the conductive thin film and electrical resistance of the conductive thin film. The computer further containing a processor that determines, reflectance of the terahertz light from the conductive thin film based on a result of detection performed by the reflection light detection unit, and determines the electrical resistance of the conductive thin film based on the correlation and a result of the determination of the reflectance.
    • 一种电阻测量装置,包括用太赫兹光照射导电薄膜的光照射单元,检测来自导电薄膜的反射光的反射光检测单元和包含存储器的计算机,该存储器存储太赫兹的反射率之间的相关性 导电薄膜的光和导电薄膜的电阻。 计算机还包含基于由反射光检测单元执行的检测结果确定来自导电薄膜的太赫兹光的反射率的处理器,并且基于相关性确定导电薄膜的电阻,并且结果 的反射率的确定。
    • 10. 发明申请
    • ELECTRICAL RESISTANCE MEASUREMENT APPARATUS AND ELECTRICAL RESISTANCE MEASUREMENT METHOD
    • 电阻测量装置和电阻测量方法
    • US20130249573A1
    • 2013-09-26
    • US13786825
    • 2013-03-06
    • FURUKAWA CO., LTD.
    • Akihide Hamano
    • G01R27/02
    • G01R27/02G01N21/3581
    • An electrical resistance measurement apparatus includes a light irradiation unit that irradiates a conductive thin film with terahertz light, a reflection light detection unit that detects reflection light from the conductive thin film, and a computer containing a storage that stores correlation between the reflectance of the terahertz light from the conductive thin film and electrical resistance of the conductive thin film. The computer further containing a processor that determines, reflectance of the terahertz light from the conductive thin film based on a result of detection performed by the reflection light detection unit, and determines the electrical resistance of the conductive thin film based on the correlation and a result of the determination of the reflectance.
    • 一种电阻测量装置,包括用太赫兹光照射导电薄膜的光照射单元,检测来自导电薄膜的反射光的反射光检测单元和包含存储器的计算机,该存储器存储太赫兹的反射率之间的相关性 导电薄膜的光和导电薄膜的电阻。 计算机还包含基于由反射光检测单元执行的检测结果确定来自导电薄膜的太赫兹光的反射率的处理器,并且基于相关性确定导电薄膜的电阻,并且结果 的反射率的确定。