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    • 2. 发明授权
    • DC sputtering system
    • DC溅射系统
    • US6022462A
    • 2000-02-08
    • US883361
    • 1997-06-26
    • Etsuro IkedaItaru SuzukiYuji Kawana
    • Etsuro IkedaItaru SuzukiYuji Kawana
    • C23C14/34C23C14/04C23C14/50G11B7/26G11B11/10G11B11/105
    • C23C14/50C23C14/042G11B7/26
    • A DC sputtering system improved in prevention of fusion of a substrate and electric corrosion of a pallet revolving shaft due to the flow of negative electric charges at the time of production of an optical disk. The system includes a pair of electrodes, a negative electrode and a positive electrode, wherein the negative electrode is composed of a target plate made from a target material such as Si and a backing plate on which the target plate is fixedly placed, and the positive electrode is composed of a pallet disposed opposite to the negative electrode. A substrate of an optical disk is mounted on the positive electrode side through a disk base using an inner peripheral mask and an outer peripheral mask. Each of the inner peripheral mask and the outer peripheral mask is made from or covered with an electrically insulating material such as teflon or ceramic. This prevents the flow of negative electric chargers from being concentrated at the inner peripheral mask and the outer peripheral mask, to thereby protect the substrate from being fused.
    • DC溅射系统由于在制造光盘时的负电荷的流动而改进了防止基板熔化和托盘旋转轴的电腐蚀。 该系统包括一对电极,负极和正极,其中负极由目标材料如Si制成的目标板和固定放置目标板的背板构成,正极 电极由与负极相对设置的托盘组成。 使用内周掩模和外周掩模,通过盘基座将光盘的基板安装在正极侧。 内周边罩和外周罩均由电绝缘材料制成或覆盖,如聚四氟乙烯或陶瓷。 这防止负电荷充电器的流动集中在内周掩模和外周掩模上,从而保护基板不熔化。
    • 10. 发明授权
    • Optical device and manufacturing method thereof
    • 光学元件及其制造方法
    • US6048597A
    • 2000-04-11
    • US169992
    • 1998-10-13
    • Hiroshi NakayamaEtsuro Ikeda
    • Hiroshi NakayamaEtsuro Ikeda
    • G11B11/10G11B11/105B32B3/00
    • G11B11/10582G11B11/10591Y10S428/913Y10S430/146Y10T428/21
    • An optical disc in which a desired exchange reciprocal action is displayed between two sorts of the rare earth-transition metal alloy films to realize optimum recording/reproducing characteristics, and a manufacturing method for the optical disc. To this end, an optical disc 1 includes a first rare earth-transition metal alloy film containing rare earth elements and transition elements and a second rare earth-transition metal alloy film layered on the first rare earth-transition metal alloy film. The second rare earth-transition metal alloy film has a composition different from that of the first rare earth-transition metal alloy film and contains rare earth elements and transition elements. An oxidized area defined between the first rare earth-transition metal alloy film and the second rare earth-transition metal alloy film has an oxygen content not higher than 2.5 atom % and a thickness not larger than 7 nm.
    • 一种光盘,其中在两种稀土 - 过渡金属合金膜之间显示期望的交换往复动作以实现最佳记录/再现特性,以及该光盘的制造方法。 为此,光盘1包括含有稀土元素和过渡元素的第一稀土 - 过渡金属合金膜和在第一稀土 - 过渡金属合金膜上层叠的第二稀土 - 过渡金属合金膜。 第二稀土 - 过渡金属合金膜的组成不同于第一稀土 - 过渡金属合金膜,并且含有稀土元素和过渡元素。 在第一稀土 - 过渡金属合金膜和第二稀土 - 过渡金属合金膜之间限定的氧化区域的氧含量不高于2.5原子%,厚度不大于7nm。