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1. 发明授权

US06727185B1 Dry process for post oxide etch residue removal 有权
标题翻译：用于后氧化物蚀刻残留物去除的干法
公开(公告)号：US06727185B1
公开(公告)日：2004-04-27
申请号：US09679800
申请日：2000-10-05
申请人： Patricia B. Smith , Antonio L. P. Rotondaro , David B. Aldrich , Eric C. Williams
发明人： Patricia B. Smith , Antonio L. P. Rotondaro , David B. Aldrich , Eric C. Williams
IPC分类号： H01L21302
CPC分类号： H01L21/31116 , Y10S438/906
摘要： A cleanup process that uses a dilute fluorine in oxygen chemistry in a downstream plasma tool to remove organic and inorganic polymeric residues (116).
摘要翻译：在下游等离子体工具中使用氧化学中的稀氟来去除有机和无机聚合物残余物的清除方法（116）。

2. 发明授权

US07423364B2 Sealed mover assembly 有权
标题翻译：密封移动器总成
公开(公告)号：US07423364B2
公开(公告)日：2008-09-09
申请号：US10888028
申请日：2004-07-09
申请人： Eric C Williams , David F. Arnone
发明人： Eric C Williams , David F. Arnone
IPC分类号： H01L41/09 , H02N2/04 , H02N2/12
CPC分类号： H02N2/043 , H02N2/005
摘要： A mover assembly (16) that moves or positions an object (12) includes a mover output (222), an actuator (344), and a mover housing assembly (220). The mover output (222) is connected to the object (12), and the actuator (344) causes the mover output (222) to move. The mover housing assembly (220) seals many of the other components of mover assembly (16), including the actuator (344) within a clean, nonvolatile, housing chamber (420) that isolates all contaminants from the outside working environment.
摘要翻译：移动或定位物体（12）的移动器组件（16）包括移动器输出（222），致动器（344）和移动器壳体组件（220）。移动器输出（222）连接到物体（12），致动器（344）使移动器输出（222）移动。移动器壳体组件（220）将许多移动器组件（16）的其它部件密封在包括致动器（344）在干净，不挥发的壳体室（420）内，该室将所有污染物与外部工作环境隔离。

3. 发明授权

US07323804B2 Linear output, closed loop mover assembly 有权
标题翻译：线性输出，闭环动力组件
公开(公告)号：US07323804B2
公开(公告)日：2008-01-29
申请号：US10829413
申请日：2004-04-21
申请人： Eric C. Williams , David F. Arnone , Manish Sharma
发明人： Eric C. Williams , David F. Arnone , Manish Sharma
IPC分类号： H01L41/08
CPC分类号： H02N2/0095 , B23Q1/34 , B23Q1/58 , B23Q5/50 , H02N2/101 , H02N2/126
摘要： A mover assembly (16) that moves or positions an object (12) along a first axis includes a motor (20) and a coupling assembly (22). The motor (20) includes a motor output (332) that is moved along the first axis and about the first axis. The coupling assembly (22) includes a stage (344) that couples the motor output (332) to the object (12) and a stage guide (346) that guides the motion of the stage (344) along the first axis. In one embodiment, the stage guide (346) is a linear bearing that allows for motion of the stage (344) along the first axis and inhibits motion of the stage (344) about the first axis, along a second axis and along a third axis. Additionally, the coupling assembly (22) can include a measurement system (28) that monitors the movement of the stage (344).
摘要翻译：沿着第一轴移动或定位物体（12）的动子组件（16）包括马达（20）和联接组件（22）。马达（20）包括沿第一轴线和第一轴线移动的马达输出（332）。联接组件（22）包括将马达输出（332）耦合到物体（12）的台（344）和引导台（344）沿着第一轴的运动的平台引导件（346）。在一个实施例中，平台引导件（346）是线性轴承，其允许平台（344）沿着第一轴线的运动并且沿着第二轴线并沿着第三轴线阻止台架（344）围绕第一轴线的运动轴。另外，联接组件（22）可以包括监测台（344）的运动的测量系统（28）。

4. 发明授权

US5857368A Apparatus and method for fabricating metal paths in semiconductor substrates through high pressure extrusion 失效
标题翻译：用于通过高压挤压在半导体衬底中制造金属路径的装置和方法
公开(公告)号：US5857368A
公开(公告)日：1999-01-12
申请号：US561614
申请日：1995-11-21
申请人： Howard Grunes , Stephen J. Blumenkranz , Eric C. Williams , Richard Koch Reber
发明人： Howard Grunes , Stephen J. Blumenkranz , Eric C. Williams , Richard Koch Reber
IPC分类号： H01L21/00 , B21D26/02
CPC分类号： H01L21/67126 , Y10T29/49993
摘要： A high pressure metallization apparatus provides a chamber for enclosing or enveloping a substrate in a high pressure environment, and thereby extrude a film layer into any voids in the covers holes or trenches thereon. The high pressure is maintained in a pressure chamber, which is substantially enclosed within a vacuum chamber. The apparatus includes a positioning member which relatively rigidly positions the pressure chamber plugs during high pressure operations, and also allows separation of the plugs to enable pressure chamber access. The apparatus is configured for relatively rapid access to the internal components thereof, for rapid service and cleaning turnaround. Additionally, the chamber is configured to have minimal relative movement between the structural elements thereof, to reduce particle generation in the apparatus.
摘要翻译：高压金属化装置提供用于在高压环境中包封或包封衬底的室，从而将膜层挤压到其上的覆盖孔或沟槽中的任何空隙中。高压保持在压力室中，该压力室基本上封闭在真空室内。该装置包括定位构件，该定位构件在高压操作期间相对刚性地定位压力腔塞，并且还允许分离塞以使压力室进入。该装置被配置为相对快速地访问其内部组件，以用于快速的服务和清洁周转。另外，腔室被构造成在其结构元件之间具有最小的相对运动，以减少装置中的颗粒产生。

5. 发明授权

US08060414B1 Encoding and decoding of product properties in a uniform resource locator 有权
标题翻译：在统一的资源定位器中编码和解码产品属性
公开(公告)号：US08060414B1
公开(公告)日：2011-11-15
申请号：US12787181
申请日：2010-05-25
申请人： Shane S. Lin , Shih-Ta Peng , Eric C. Williams
发明人： Shane S. Lin , Shih-Ta Peng , Eric C. Williams
IPC分类号： G06Q30/00
CPC分类号： G06Q30/06 , G06Q30/0601 , G06Q30/0621
摘要： Disclosed are various embodiments for generating bundle uniform resource locators (URL). A URL is generated that contains a parameter with a value corresponding to a product available in the electronic commerce system. At least one parameter with a value corresponding to configurable features of the product is also encoded in the URL. The URL parameters are validated to determine whether the product and configurable features are compatible.
摘要翻译：公开了用于生成捆绑统一资源定位符（URL）的各种实施例。生成包含具有与电子商务系统中可用的产品相对应的值的参数的URL。至少有一个与产品可配置功能对应的值的参数也被编码在URL中。验证URL参数以确定产品和可配置功能是否兼容。

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