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1. 发明授权

US5994675A Semiconductor processing furnace heating control system 失效
标题翻译：半导体加工炉加热控制系统
公开(公告)号：US5994675A
公开(公告)日：1999-11-30
申请号：US814721
申请日：1997-03-07
申请人： Edwin M. Bethune , Donald Olmsted
发明人： Edwin M. Bethune , Donald Olmsted
IPC分类号： H01L21/00 , B23K10/00
CPC分类号： H01L21/67103
摘要： A vertically oriented thermal processor supporting semiconductor wafers within a vertical processing chamber within a process tube about which a furnace heater is supported utilizes a model-base control target in combination with a heating control system configured to heat portions of the furnace in order to achieve a thermally uniform processing chamber environment. A furnace power controller implements a dynamic control system configured to achieve a desired uniform thermal distribution within the processing chamber during various processing cycles for semiconductor wafers. Preferably, the control system monitors thermal conditions within the chamber and compares the conditions with a desired thermal model of the furnace, and activates/deactivates one or more heater elements within the furnace in order to achieve a desired thermal condition within the processing chamber.
摘要翻译：支撑加热管内的垂直处理室内的半导体晶片的垂直取向的热处理器，其上支撑炉加热器，利用模型基础控制目标与加热控制系统结合，该加热控制系统构造成加热炉的部分，以实现热均匀处理室环境。炉功率控制器实现动态控制系统，其被配置为在半导体晶片的各种处理循环期间在处理室内实现期望的均匀热分布。优选地，控制系统监测室内的热条件，并将条件与炉的所需热模型进行比较，并且激活/去激活炉内的一个或多个加热器元件，以便在处理室内实现期望的热条件。

2. 发明授权

US06661514B1 Tube blockage monitor 有权
标题翻译：管阻塞监视器
公开(公告)号：US06661514B1
公开(公告)日：2003-12-09
申请号：US09505839
申请日：2000-02-17
申请人： Nikolai R. Tevs , Edwin M. Bethune , Rasvan N. Dragne
发明人： Nikolai R. Tevs , Edwin M. Bethune , Rasvan N. Dragne
IPC分类号： G01N2147
CPC分类号： G01F23/2921 , A01C7/105 , G01N2015/1418 , G01P13/008
摘要： A blockage monitor for detecting a blockage in flow of particles includes a sensor body for mounting on a wall of the seed duct and defining a front face flush with the duct surface carrying both an LED light source for projecting light into the interior of the duct and a phototransistor arranged to produce an output signal proportional to the intensity of reflected light received which increases as a seed passes. A separate blockage module counts the output and uses an algorithm for comparing the count with a calibration count to determine whether there is a blockage of the duct. A power voltage is supplied to each sensor using two wires. A test of the sensor includes a pulse in the power voltage so as to generate a corresponding but delayed pulse in the light from the light source.
摘要翻译：用于检测颗粒流动阻塞的堵塞监测器包括：传感器体，用于安装在种子管道的壁上，并且限定一个前表面与管道表面齐平，管道表面同时携带用于将光投射到管道内部的LED光源; 光电晶体管被布置成产生与随着种子通过而增加的反射光的强度成比例的输出信号。单独的阻塞模块对输出进行计数，并使用算法将计数与校准计数进行比较，以确定管道是否有堵塞。使用两根电线将电源电压提供给每个传感器。传感器的测试包括电源电压中的脉冲，以便在来自光源的光中产生相应但延迟的脉冲。

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