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1. 发明申请

US20060183265A1 Image sensor having improved sensitivity and method for making same 审中-公开
标题翻译：具有改进灵敏度的图像传感器及其制造方法
公开(公告)号：US20060183265A1
公开(公告)日：2006-08-17
申请号：US11244189
申请日：2005-10-05
申请人： Tae Oh , Duk Yi , June Lee
发明人： Tae Oh , Duk Yi , June Lee
IPC分类号： H01L21/00
CPC分类号： H01L27/14636 , H01L27/14627 , H01L27/14632 , H01L27/14687
摘要： An image sensor having improved sensitivity and method for making same include a substrate having an active pixel region with a peripheral circuit region surrounding the active pixel region; a plurality of photo conversion elements disposed in the active pixel region, each photodiode is configured for receiving light through a lens and an opening formed between a plurality of layers of interlayer dielectrics formed on top of each other above the substrate; and a plurality of interconnections electrically connecting to the photo conversion elements disposed within the active pixel region, wherein the distance between the lens and the photo conversion elements is shorter than the distance between the substrate and the top interlayer dielectric in the peripheral circuit region.
摘要翻译：具有改进的灵敏度的图像传感器及其制造方法包括具有有源像素区域的衬底和具有围绕有源像素区域的外围电路区域的衬底; 设置在有源像素区域中的多个光转换元件，每个光电二极管被配置为用于接收通过透镜的光和形成在衬底上方彼此顶部形成的多个层间电介质层之间的开口; 以及电连接到设置在有源像素区域内的光转换元件的多个互连，其中透镜和光转换元件之间的距离短于外围电路区域中的基板和顶层间电介质之间的距离。

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