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    • 1. 发明授权
    • Grating-assisted co-directional vertical coupler optical filter having well-suppressed sidelobe characteristics and method of fabricating the same
    • 具有良好抑制旁瓣特性的光栅辅助同向垂直耦合器滤光器及其制造方法
    • US06597838B1
    • 2003-07-22
    • US09135730
    • 1998-08-18
    • Chan Yong ParkSeung Won LeeDug Bong KimKwang Ryong OhHong Man Kim
    • Chan Yong ParkSeung Won LeeDug Bong KimKwang Ryong OhHong Man Kim
    • G02B634
    • G02B6/12002G02B6/12007G02B2006/12107G02B2006/12147
    • The present invention relates to an optical filter whose a sidelobe disturbing a characteristic of an optical filter by weighting an optical coupling efficiency between waveguides is controlled upon applying a selective area growth method in a wavelength selective variable semiconductor optical filter and method of fabricating the same. The present invention can control the thickness of growth layer selectively by controlling the width of the dielectric thin film mask whose the growth is not achieved in the selective area growth method, can control the distance between two waveguides of the wavelength selective variable semiconductor optical filter by applying the result on the distance control between two waveguides. Accordingly, there can be changed an optical coupling efficiency between two waveguides spatially. Because the sidelobe characteristics is largely improved if the distance between two waveguides is controlled temporarily to be corresponded to one period of Hamming function, there can be fabricated a semiconductor optical filter whose the characteristic is very excellent when applying the present invention.
    • 本发明涉及一种滤光器,其通过在波长选择性可变半导体光学滤波器中应用选择性区域增长方法及其制造方法来控制通过对波导之间的光耦合效率进行加权来干扰滤光器的特性的旁瓣。 本发明可以通过控制在选择区域生长方法中未实现生长的电介质薄膜掩模的宽度来选择性地控制生长层的厚度,可以通过以下方式控制波长选择性可变半导体光学滤波器的两个波导之间的距离 将结果应用于两个波导之间的距离控制。 因此,可以在空间上改变两个波导之间的光耦合效率。 因为如果临时控制两个波导之间的距离以对应于汉明功能的一个周期,则旁瓣特性被大大改善,所以可以制造当应用本发明时其特性非常好的半导体滤光器。
    • 3. 发明授权
    • Apparatus for monitoring films during MOCVD
    • 用于在MOCVD期间监测膜的装置
    • US5472505A
    • 1995-12-05
    • US359198
    • 1994-12-19
    • Bun LeeDug-Bong KimJong-Hyeob Baek
    • Bun LeeDug-Bong KimJong-Hyeob Baek
    • C23C16/52C30B25/02C23C14/00
    • C30B25/02C23C16/52Y10T117/10Y10T117/1004
    • An apparatus for monitoring a film growth is disclosed, in which, when a crystalline thin film is grown by applying an MOCVD (metalorganic chemical vapor deposition method), the variation of the thickness and composition due to certain factors can be detected with real time during the film growing process, and an in-situ adjustment is possible. As the optical detector for detecting two sets of reflected beams which are reflected from the film, a silicon detector and a germanium detector are used, the former being suitable for detecting short wavelength laser beams, and the latter being suitable for detecting long wavelength laser beams. Thus two different wavelengths are detected with real time, thereby measuring the thickness and composition of the film.
    • 公开了一种用于监测膜生长的装置,其中当通过施加MOCVD(金属有机化学气相沉积法)生长结晶薄膜时,可以实时检测由于某些因素导致的厚度和组成的变化 成膜过程和原位调整是可能的。 作为用于检测从膜反射的两组反射光束的光检测器,使用硅检测器和锗检测器,前者适用于检测短波长激光束,后者适用于检测长波长激光束 。 因此,实时检测两个不同的波长,从而测量膜的厚度和组成。
    • 5. 发明授权
    • Optical coupler and method of manufacturing the same
    • 光耦合器及其制造方法
    • US06282343B1
    • 2001-08-28
    • US09440931
    • 1999-11-16
    • Dug-bong KimJung-hwan ChoSang-yun YiTae-hyung Rhee
    • Dug-bong KimJung-hwan ChoSang-yun YiTae-hyung Rhee
    • G02B642
    • G02B6/125
    • An optical coupler and a method of manufacturing the same are provided. The optical coupler includes an input optical waveguide and N output optical waveguides, and divides an optical signal received from the input optical waveguide into N optical signals. The optical coupler further includes a plurality of Y-junction optical waveguide modules configured in m stages, for branching the received optical signal into two optical signals at each stage, and a plurality of curved optical waveguides alternately connected to the Y-junction optical waveguide modules, at least one curved optical waveguide connected between Y-junction optical waveguide modules in the m-th stage and the output optical waveguides, wherein when the guiding direction of the optical signal is set to be the longitudinal axis, and the junction between the input optical waveguide and the first-stage Y-junction optical waveguide module is set to be the starting point, the positions and sizes of the Y-junction optical waveguide modules and the curved optical waveguides are determined in order to minimize the longest path among N paths ranging from the starting point to each of the output optical waveguides. An optical coupler is manufactured using Y-junction optical waveguide modules and connection optical waveguide modules, such that various Y-junction optical waveguide structures can be designed. Also, the degree of freedom upon layout of modules is increased, so that design of the optical coupler is easy.
    • 提供一种光耦合器及其制造方法。 光耦合器包括输入光波导和N输出光波导,并将从输入光波导接收的光信号分成N个光信号。 该光耦合器还包括多个以m级配置的Y结光波导模块,用于将接收到的光信号在每一级分支成两个光信号,并且多个弯曲光波导交替地连接到Y结光波导模块 ,连接在第m级的Y结光波导模块和输出光波导之间的至少一个弯曲光波导,其中当光信号的引导方向被设置为纵向轴线时,以及输入端 光波导和第一级Y结光波导模块被设置为起点,确定Y结光波导模块和弯曲光波导的位置和大小,以使N路径中的最长路径最小化 从起始点到每个输出光波导。 使用Y结光波导模块和连接光波导模块制造光耦合器,从而可以设计各种Y结光波导结构。 此外,模块布局时的自由度增加,使得光耦合器的设计容易。