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    • 4. 发明申请
    • Electrostatic Actuator
    • 静电执行器
    • US20100163376A1
    • 2010-07-01
    • US12091555
    • 2008-03-06
    • Jun-Bo YoonHyun-Ho YangDong-Hun Choi
    • Jun-Bo YoonHyun-Ho YangDong-Hun Choi
    • H01H59/00H02N11/00H03K19/00G11C11/00
    • H02N1/006
    • The present invention relates to a micro-electromechnical system (MEMS) and, more particularly, to an electrostatic actuator, and a driving method thereof and an application device thereof.The electrostatic actuator in accordance with the present invention comprises a fixed electrode, an electric charge charging unit electrically insulated from the fixed electrode, and a moving electrode spaced apart from the fixed electrode and the electric charge charging unit.In accordance with the present invention, the electrostatic actuator with a very low driving voltage and an arbitrarily controllable driving voltage when compared with a conventional electrostatic actuator is provided.In addition, the electrostatic actuator having durability against external noise and enabling a reliable consecutive operation is provided. Further, in accordance with the present invention, non-volatile mechanical memory, a logic circuit and a switch employing the electrostatic actuator are provided,
    • 微电子技术系统(MEMS)技术领域本发明涉及微电子技术系统(MEMS),更具体地,涉及一种静电致动器及其驱动方法及其应用装置。 根据本发明的静电致动器包括固定电极,与固定电极电绝缘的充电充电单元和与固定电极和电荷充电单元间隔开的移动电极。 根据本发明,提供了与常规静电致动器相比具有非常低的驱动电压和任意可控的驱动电压的静电致动器。 此外,提供了具有耐外部噪声的耐久性并且实现可靠的连续操作的静电致动器。 此外,根据本发明,提供非易失性机械存储器,逻辑电路和采用静电致动器的开关,