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    • 5. 发明授权
    • Apparatus and method for mounting and stabilizing a hybrid focal plane
array
    • 用于安装和稳定混合焦平面阵列的装置和方法
    • US5585624A
    • 1996-12-17
    • US409230
    • 1995-03-23
    • Rolin K. AsatourianWinfred L. MorrisDonald E. CooperMichael R. James
    • Rolin K. AsatourianWinfred L. MorrisDonald E. CooperMichael R. James
    • H01L27/146H01J3/14
    • H01L27/1465
    • A hybrid focal plane array (FPA) structure including a Balanced Composite Structure (BCS) in which several layers of materials having differing thermal expansion coefficients stabilize the FPA during cryogenic cooling. An optical substrate with a layer of an optically sensitive material detects impinging radiation. The optically sensitive material is coupled to a multiplexer (MUX) substrate via interconnection bumps. The MUX is bonded to a layer of a material having a high TEC. A rigid core layer is sandwiched between the MUX and a balancing layer formed of a material having similar mechanical and geometrical characteristics to the MUX substrate. The three-layer BCS consisting of the MUX, the rigid core layer and the balancing layer is designed to have an effective TEC matching that of the optical substrate. The bumps and the optically sensitive material are thus protected from undesirable stresses generated during thermal excursions, thereby resulting in substantially improved FPA reliability.
    • 包括平衡复合结构(BCS)的混合焦平面阵列(FPA)结构,其中具有不同热膨胀系数的几层材料在低温冷却期间稳定FPA。 具有光敏材料层的光学衬底检测入射辐射。 光敏材料通过互连凸块耦合到多路复用器(MUX)衬底。 MUX结合到具有高TEC的材料层。 一个刚性芯层夹在MUX和由具有与MUX衬底相似的机械和几何特性的材料形成的平衡层之间。 由MUX,刚性芯层和平衡层组成的三层BCS被设计成具有与光学基板的TEC匹配的有效TEC。 因此,凸块和光敏材料可以防止在热偏移期间产生的不期望的应力,从而导致显着提高的FPA可靠性。