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    • 1. 发明授权
    • Arrangement and process for protecting fuses/anti-fuses
    • 保险丝/防熔丝的安排和处理
    • US07235859B2
    • 2007-06-26
    • US10957492
    • 2004-10-01
    • Axel BrintzingerOctavio TrovarelliDavid WallisWolfgang Leiberg
    • Axel BrintzingerOctavio TrovarelliDavid WallisWolfgang Leiberg
    • H01L29/00
    • H01L23/5254H01L23/5258H01L2924/0002H01L2924/00
    • An arrangement for protecting fuses/anti-fuses on chips which serve to activate redundant circuits or chip functions includes a passivation layer (e.g., hard passivation) arranged on a fully processed chip with the exception of metal contacts of a metallization level and the fuses. The chip is provided with a redistribution layer that is electrically contact-connected to the metallization level, and to a process for protecting such fuses/anti-fuses. The invention is now based on the object of ensuring sufficient protection of fuses/anti-fuses on integrated circuits. This is achieved by virtue of the fact that a dielectric (3.1, 3.2), which covers at least the region of the fuses/anti-fuses (4) and to which the redistribution layer (2) comprising the combination of materials Cu/Ni/Au is applied, is arranged on the passivation layer (5).
    • 用于保护用于激活冗余电路或芯片功能的芯片上的熔断器/防熔丝的布置包括布置在完全处理的芯片上的钝化层(例如,硬钝化),除了金属化水平的金属触点和熔丝之外。 该芯片设置有与金属化层电接触连接的再分布层,以及用于保护这种保险丝/防熔丝的工艺。 本发明的目的在于确保集成电路上的保险丝/抗熔断器的充分保护。 这通过以下事实来实现:电介质(3.1,3.2),其至少覆盖保险丝/抗熔丝(4)的区域,再分布层(2)包括材料Cu / Ni的组合 / Au被布置在钝化层(5)上。