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    • 1. 发明授权
    • Optical scanner with improved scan time
    • 光学扫描仪具有改进的扫描时间
    • US07830575B2
    • 2010-11-09
    • US11784798
    • 2007-04-10
    • John A. MoonDavid R. Fournier
    • John A. MoonDavid R. Fournier
    • G02B26/08
    • G02B26/0816G02B26/0891G02B26/108
    • A method and apparatus is provided for scanning an object, featuring scanning an incident beam in a substantially curved scan pattern; and moving an object at a predetermined rate along an axis substantially orthogonal to a plane of the curved scan pattern so that a two dimensional image can be formed by successive passes of a circularly scanned spot. In particular, a laser beam scans around an objective lens at a fixed radius RL with a fixed input angle θd. When scanned in this manner, the laser beam before the objective lens forms a “cone” of directions (so herein it is referred to as a “conical scan”). Scanning in this fashion produces the curved scan pattern at the object (substrate). By moving the object (substrate) at the predetermined rate along the axis orthogonal to the plane of the curved scan pattern, the two dimensional image can be formed by successive passes of the circularly scanned spot.
    • 提供了一种用于扫描物体的方法和装置,其特征在于以基本上弯曲的扫描图案扫描入射光束; 并且沿着与弯曲扫描图案的平面基本正交的轴以预定速率移动物体,使得可以通过循环扫描点的连续通过形成二维图像。 特别地,激光束以固定的输入角度和角度在固定半径RL处围绕物镜扫描; d。 当以这种方式扫描时,物镜之前的激光束形成方向的“锥形”(因此在本文中被称为“圆锥形扫描”)。 以这种方式扫描在物体(衬底)处产生弯曲的扫描图案。 通过沿着与弯曲扫描图案的平面正交的轴以预定速率移动物体(基板),可以通过循环扫描光点的连续通过形成二维图像。
    • 3. 发明授权
    • Method for reducing skew in a real-time centroid calculation
    • 减少实时重心计算中的偏差的方法
    • US06804693B2
    • 2004-10-12
    • US09929423
    • 2001-08-14
    • David G. BellemoreDavid R. FournierMichael A. Davis
    • David G. BellemoreDavid R. FournierMichael A. Davis
    • G06F700
    • G01R19/04G01L1/246G01R19/2509
    • A method and corresponding apparatus for determining the centroid (Vc) of a waveform signal being sampled at a set of parameter values (Vi, i=1, . . . , n) yielding a corresponding set of sampled amplitudes (Ai, i=1, . . . , n), each parameter value and corresponding amplitude forming a sampled point (Vi, Ai), the method including the steps of: selecting an amplitude at which to create an interpolated point; interpolating a first parameter value corresponding to the amplitude selected in the step of selecting an amplitude; and performing a centroid calculation using only the sampled points with an amplitude greater than a predetermined threshold. The waveform is sometimes sampled in the presence of background noise, and the method sometimes also includes: estimating the background (Bi) for each value in the set of parameter values at which sampling is performed; and reducing the amplitude (Ai) of each sampled amplitude by the background (Bi) so estimated.
    • 一种用于确定在一组参数值(Vi,i = 1,...,n)上采样的波形信号的质心(Vc)的方法和相应装置,产生一组相应的采样幅度(Ai,i = 1 ,...,n),每个参数值和对应的幅度形成采样点(Vi,Ai),所述方法包括以下步骤:选择创建内插点的幅度; 内插与在选择幅度的步骤中选择的幅度对应的第一参数值; 以及仅使用振幅大于预定阈值的采样点进行质心计算。 有时在有背景噪声的情况下采样波形,并且该方法有时还包括:对进行采样的参数值集合中的每个值估计背景(Bi); 并且将每个采样振幅的振幅(Ai)减小所估计的背景(Bi)。
    • 4. 发明授权
    • Method and apparatus for generating an optical beam for use in an
imaging system
    • 用于生成用于成像系统的光束的方法和装置
    • US5640473A
    • 1997-06-17
    • US677343
    • 1996-07-02
    • Joseph A. WheelerDavid R. FournierRonald J. Straayer
    • Joseph A. WheelerDavid R. FournierRonald J. Straayer
    • B41J2/44B41J2/45B41J2/455G02B6/42G03F7/20H04N1/113G02B6/26
    • G03F7/70008G02B6/4203G03F7/704
    • An optical beam generator system for use in an imaging system that forms an image in a substrate comprises a beam generator, a mode filter and a state selector. The optical beam has a first power level above an exposure level that exposes the image in the substrate and a second power level below the exposure level which does not expose the substrate. The beam generator generates a near single mode coherent optical beam in response to received command signals corresponding to an "on" state and generates a multimode incoherent optical beam in response to received command signals corresponding to an "off" state. The filter is optically coupled to the beam generator and attenuates an optical component of the received optical beam which is not single mode to a magnitude below the exposure level. The state selector generates the "on" and "off" command signals corresponding to the "on" and "off" states such that the filter outputs the coherent optical beam with minimal attenuation during the "on" state and with maximum attenuation during the "off" state.
    • 用于在衬底中形成图像的成像系统中的光束发生器系统包括光束发生器,模式滤波器和状态选择器。 光束具有高于暴露于衬底中的图像的曝光水平的第一功率水平和低于不暴露衬底的曝光水平的第二功率水平。 波束发生器响应于对应于“开”状态的接收到的命令信号而产生近单模相干光束,并响应于对应于“关”状态的接收到的命令信号而产生多模非相干光束。 滤波器光耦合到光束发生器,并且将不是单模式的接收光束的光学部件衰减到低于曝光电平的幅度。 状态选择器产生对应于“开”和“关”状态的“开”和“关”命令信号,使得滤波器在“接通”状态下输出具有最小衰减的相干光束,并且在“ 关闭“状态。
    • 7. 发明申请
    • Optical scanner with improved scan time
    • 光学扫描仪,扫描时间更长
    • US20070236789A1
    • 2007-10-11
    • US11784798
    • 2007-04-10
    • John A. MoonDavid R. Fournier
    • John A. MoonDavid R. Fournier
    • G02B21/26
    • G02B26/0816G02B26/0891G02B26/108
    • A method and apparatus is provided for scanning an object, featuring scanning an incident beam in a substantially curved scan pattern; and moving an object at a predetermined rate along an axis substantially orthogonal to a plane of the curved scan pattern so that a two dimensional image can be formed by successive passes of a circularly scanned spot. In particular, a laser beam scans around an objective lens at a fixed radius RL with a fixed input angle θd. When scanned in this manner, the laser beam before the objective lens forms a “cone” of directions (so herein it is referred to as a “conical scan”). Scanning in this fashion produces the curved scan pattern at the object (substrate). By moving the object (substrate) at the predetermined rate along the axis orthogonal to the plane of the curved scan pattern, the two dimensional image can be formed by successive passes of the circularly scanned spot.
    • 提供了一种用于扫描物体的方法和装置,其特征在于以基本上弯曲的扫描图案扫描入射光束; 并且沿着与弯曲扫描图案的平面基本正交的轴以预定速率移动物体,使得可以通过循环扫描点的连续通过形成二维图像。 特别地,激光束以具有固定的输入角度θD的固定半径R L1围绕物镜扫描。 当以这种方式扫描时,物镜之前的激光束形成方向的“锥形”(因此在本文中被称为“锥形扫描”)。 以这种方式扫描在物体(衬底)处产生弯曲的扫描图案。 通过沿着与弯曲扫描图案的平面正交的轴以预定速率移动物体(基板),可以通过循环扫描光点的连续通过形成二维图像。
    • 9. 发明授权
    • Fiber bragg grating reference sensor for precise reference temperature measurement
    • 光纤布拉格光栅参考传感器,用于精确的参考温度测量
    • US06462329B1
    • 2002-10-08
    • US09448367
    • 1999-11-23
    • Michael A. DavisDavid R. FournierRichard T. Jones
    • Michael A. DavisDavid R. FournierRichard T. Jones
    • G01J104
    • G01K1/20G01K11/32
    • A fiber Bragg grating reference module provides a precise temperature reference for a temperature probe, including a thermistor, located in close proximity thereto, and includes an optical fiber having a fiber Bragg grating therein, a glass element and a reference housing. The fiber Bragg grating has two ends and with a coefficient of thermal expansion. The glass element anchors the two ends of the fiber Bragg grating, and has a substantially similar coefficient of thermal expansion as the coefficient of thermal expansion of the fiber Bragg grating to ensure that the glass element does not substantially induce strain on the fiber Bragg grating as the ambient temperature changes. The reference housing has a cavity and also has a means for receiving and affixing one end of the fiber Bragg grating and for suspending the fiber Bragg grating in the cavity leaving the other end of the fiber Bragg grating free to move as the ambient temperature changes without inducing strain in the fiber Bragg grating. The glass element includes a glass tube collapsed over the entire length of the fiber Bragg grating. Alternatively, the glass element includes a glass tube locally collapsed at the two ends of the fiber Bragg grating over a part of length of the fiber Bragg grating.
    • 光纤布拉格光栅参考模块为温度探头提供精确的温度基准,包括位于其附近的热敏电阻,并包括其中具有光纤布拉格光栅的光纤,玻璃元件和参考外壳。 光纤布拉格光栅具有两端和热膨胀系数。 玻璃元件锚固光纤布拉格光栅的两端,并且具有与光纤布拉格光栅的热膨胀系数基本相似的热膨胀系数,以确保玻璃元件基本上不会在光纤布拉格光栅上引起应变 环境温度变化。 参考壳体具有空腔并且还具有用于接收和固定光纤布拉格光栅的一端并用于将光纤布拉格光栅悬挂在腔中的装置,离开光纤布拉格光栅的另一端随着环境温度的变化而自由移动,而没有 在光纤布拉格光栅中诱发应变。 玻璃元件包括在光纤布拉格光栅的整个长度上折叠的玻璃管。 或者,玻璃元件包括在纤维布拉格光栅的长度的一部分上在纤维布拉格光栅的两端局部塌缩的玻璃管。