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    • 9. 发明授权
    • Apparatus and methods for verifying the location of areas of interest within a sample in an imaging system
    • 用于验证成像系统中样品内感兴趣区域的位置的装置和方法
    • US07006674B1
    • 2006-02-28
    • US09430198
    • 1999-10-29
    • David J. ZahniserTheodore S. Geiselman
    • David J. ZahniserTheodore S. Geiselman
    • G06K9/00
    • G06K9/00134
    • An apparatus and method for verifying the location of an area of interest within a sample are disclosed. An imaging system includes an optical system and a stage movable relative to the optical system. A computer server is in communication with the imaging system and with a review station. The imaging system is capable of spatially locating a datum mark on the sample and determining a spatial offset value of the mark relative to a nominal position thereof. The coordinate systems of a respective one of the imaging system and the review station can be standardized. The method includes locating a datum mark on the sample, and identifying an area of interest within the sample. The method further includes determining the location of the area of interest relative to the mark. The method further includes locating again the datum, and checking that a dimensional error in locating the datum mark is less than a tolerance value to verify location of the area of interest.
    • 公开了一种用于验证样本内的感兴趣区域的位置的装置和方法。 成像系统包括光学系统和相对于光学系统可移动的台。 计算机服务器与成像系统和检查站通信。 成像系统能够在样本上空间定位基准标记,并且确定标记相对于标称位置的空间偏移值。 可以对成像系统和检查站中的相应一个的坐标系进行标准化。 该方法包括在样本上定位基准标记,以及识别样品内感兴趣的区域。 该方法还包括确定感兴趣区域相对于该标记的位置。 该方法还包括再次定位基准,以及检查定位基准标记的尺寸误差是否小于公差值以验证感兴趣区域的位置。