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1. 发明申请

US20060228873A1 Electrostatic nanolithography probe actuation device and method 失效
标题翻译：静电纳米光刻探头致动装置及方法
公开(公告)号：US20060228873A1
公开(公告)日：2006-10-12
申请号：US11377629
申请日：2006-03-16
申请人： Chang Liu , David Bullen
发明人： Chang Liu , David Bullen
IPC分类号： G12B21/02
CPC分类号： G01Q70/06 , G01Q70/16 , G01Q80/00 , G03F7/0002
摘要： Method and apparatus for selectively actuating a cantilevered probe for applying a compound to a substrate in nanolithography. A probe having a probe electrode and a substrate having a counter electrode are provided. Voltage applied to the probe electrode and/or counter electrode provides electrostatic attraction between them, moving a probe tip into sufficient proximity to the substrate to apply the patterning compound. Alternatively, a flexible cantilevered probe anchored to a holder includes a layer of conductive material forming a probe electrode. A counter electrode on the holder faces the probe electrode. The holder and probe are positioned so that a probe tip applies the compound to the substrate. The probe is disposed between the substrate and the counter electrode. An electrostatic attractive force generated between the probe electrode and the counter electrode flexes the probe and lifts the tip away from the substrate to suspend writing.
摘要翻译：用于在纳米光刻中选择性地致动用于将化合物施加到基底的悬臂探针的方法和装置。提供具有探针电极和具有对电极的基板的探针。施加到探针电极和/或对电极的电压在它们之间提供静电吸引，将探针尖端移动到足够接近衬底以施加图案化化合物。或者，固定到保持器的柔性悬臂式探针包括形成探针电极的导电材料层。保持器上的对电极面向探针电极。定位器和探针被定位成使得探针尖端将化合物施加到基底上。探针设置在基板和对置电极之间。在探针电极和对置电极之间产生的静电吸引力使探针弯曲并将尖端远离衬底提升以暂停写入。

2. 发明授权

US07081624B2 Scanning probe microscopy probes and methods 失效
标题翻译：扫描探针显微镜探针和方法
公开(公告)号：US07081624B2
公开(公告)日：2006-07-25
申请号：US10670585
申请日：2003-09-25
申请人： Chang Liu , Jun Zou , Xuefeng Wang , David Bullen
发明人： Chang Liu , Jun Zou , Xuefeng Wang , David Bullen
IPC分类号： G01N23/00 , B05D5/00 , B29C59/00 , B29C33/76
CPC分类号： G01Q70/16 , G01Q70/06 , G01Q80/00 , G03F7/0002 , Y10S977/857 , Y10S977/86 , Y10S977/875 , Y10S977/877
摘要： A method for fabricating scanning probe microscopy (SPM) probes is disclosed. The probes are fabricated by forming a structural layer on a substrate, wherein the substrate forms a cavity. A sacrificial layer is located between the substrate and the structural layer. Upon forming the structural layer, the sacrificial layer is selectively removed, and the probe is then released from the substrate. The substrate may then later be reused to form additional probes. Additionally, a contact printing method using a scanning probe microscopy probe is also disclosed.
摘要翻译：公开了一种制造扫描探针显微镜（SPM）探针的方法。通过在衬底上形成结构层来制造探针，其中衬底形成空腔。牺牲层位于衬底和结构层之间。在形成结构层时，选择性地去除牺牲层，然后从衬底释放探针。然后可以再次使用底物以形成另外的探针。此外，还公开了使用扫描探针显微镜探针的接触印刷方法。

3. 发明授权

US07737045B2 Microfabricated micro fluid channels 失效
标题翻译：微型微流体通道
公开(公告)号：US07737045B2
公开(公告)日：2010-06-15
申请号：US11682687
申请日：2007-03-06
申请人： Chang Liu , Kee Ryu , David Bullen
发明人： Chang Liu , Kee Ryu , David Bullen
IPC分类号： H01L21/302
CPC分类号： B01L3/0241 , B01J2219/00369 , B01L2200/12 , B01L2300/0819 , B01L2300/0838 , B01L2300/0887 , B01L2400/0406 , B01L2400/0487 , C40B60/14 , Y10T137/0318
摘要： A fluid delivery system including a first substrate having a micro-channel and a well both formed through the first substrate. The fluid delivery system also includes a second substrate and a delivery channel. The second substrate is on the first substrate and the delivery channel is formed between the first and second substrates. The delivery channel provides fluid communication between the micro-channel and the well.
摘要翻译：一种流体输送系统，包括具有微通道的第一基底和通过第一基底形成的孔。流体输送系统还包括第二基底和递送通道。第二基板在第一基板上，并且输送通道形成在第一和第二基板之间。输送通道提供微通道和井之间的流体连通。

4. 发明申请

US20060082379A1 Parallel, individually addressable probes for nanolithography 失效
公开(公告)号：US20060082379A1
公开(公告)日：2006-04-20
申请号：US11073938
申请日：2005-03-07
申请人： Chang Liu , Ming Zhang , David Bullen
发明人： Chang Liu , Ming Zhang , David Bullen
IPC分类号： G01R31/02
CPC分类号： G01R1/073 , G01N2035/1037 , G01Q80/00 , G03F7/0002 , Y10S977/857 , Y10S977/874
摘要： A microfabricated probe array for nanolithography and process for designing and fabricating the probe array. The probe array consists of individual probes that can be moved independently using thermal bimetallic actuation or electrostatic actuation methods. The probe array can be used to produce traces of diffusively transferred chemicals on the substrate with sub-1 micrometer resolution, and can function as an arrayed scanning probe microscope for subsequent reading and variation of transferred patterns.

5. 发明授权

US07351303B2 Microfluidic systems and components 失效
标题翻译：微流体系统和部件
公开(公告)号：US07351303B2
公开(公告)日：2008-04-01
申请号：US10683473
申请日：2003-10-09
申请人： Chang Liu , Kashan Shaikh , Kee Ryu , Edgar Goluch , Zhifang Fan , David Bullen
发明人： Chang Liu , Kashan Shaikh , Kee Ryu , Edgar Goluch , Zhifang Fan , David Bullen
IPC分类号： B29C65/54 , B32B37/10 , B32B37/16 , B32B7/04 , G01N1/20 , B29C65/56 , B01F5/06 , G01N1/16
CPC分类号： B01L3/502738 , B01F7/00291 , B01F13/0059 , B01F13/0827 , B01F2215/0037 , B01L3/502707 , B01L2200/027 , B01L2200/10 , B01L2200/12 , B01L2300/0645 , B01L2300/0874 , B01L2300/0887 , B01L2300/123 , B01L2400/0418 , B01L2400/0475 , B01L2400/0481 , F16K99/0001 , F16K99/0015 , F16K99/0036 , F16K99/0046 , F16K99/0051 , F16K99/0055 , F16K2099/0074 , F16K2099/0076 , F16K2099/008 , F16K2099/0084 , Y10T156/1089 , Y10T436/2575
摘要： Microfluidic systems and components. A microfluidic system includes one or more functional units or microfluidic chips, configured to perform constituent steps in a process and interconnected to form the system. A multi-layer microfluidic system includes a separate dedicated fluid layer and dedicated electromechanical layer connected via through-holes. Electromechanical components are formed on the electromechanical layer.
摘要翻译：微流体系统和部件。微流体系统包括一个或多个功能单元或微流体芯片，其被配置为在过程中执行组合步骤并且互连以形成系统。多层微流体系统包括单独的专用流体层和通过通孔连接的专用机电层。机电部件形成在机电层上。

6. 发明申请

US20080017306A1 MICROFLUIDIC SYSTEMS AND COMPONENTS 失效
标题翻译：微流体系统和组件
公开(公告)号：US20080017306A1
公开(公告)日：2008-01-24
申请号：US10683473
申请日：2003-10-09
申请人： Chang Liu , Kashan Shaikh , Kee Ryu , Edgar Goluch , Zhifang Fan , David Bullen
发明人： Chang Liu , Kashan Shaikh , Kee Ryu , Edgar Goluch , Zhifang Fan , David Bullen
IPC分类号： B29C65/54
CPC分类号： B01L3/502738 , B01F7/00291 , B01F13/0059 , B01F13/0827 , B01F2215/0037 , B01L3/502707 , B01L2200/027 , B01L2200/10 , B01L2200/12 , B01L2300/0645 , B01L2300/0874 , B01L2300/0887 , B01L2300/123 , B01L2400/0418 , B01L2400/0475 , B01L2400/0481 , F16K99/0001 , F16K99/0015 , F16K99/0036 , F16K99/0046 , F16K99/0051 , F16K99/0055 , F16K2099/0074 , F16K2099/0076 , F16K2099/008 , F16K2099/0084 , Y10T156/1089 , Y10T436/2575
摘要： Microfluidic systems and components. A microfluidic system includes one or more functional units or microfluidic chips, configured to perform constituent steps in a process and interconnected to form the system. A multi-layer microfluidic system includes a separate dedicated fluid layer and dedicated electromechanical layer connected via through-holes. Electromechanical components are formed on the electromechanical layer.
摘要翻译：微流体系统和部件。微流体系统包括一个或多个功能单元或微流体芯片，其被配置为在过程中执行组合步骤并且互连以形成系统。多层微流体系统包括单独的专用流体层和通过通孔连接的专用机电层。机电部件形成在机电层上。

7. 发明授权

US07217396B2 Microfabricated micro fluid channels 有权
标题翻译：微型微流体通道
公开(公告)号：US07217396B2
公开(公告)日：2007-05-15
申请号：US10429333
申请日：2003-05-05
申请人： Chang Liu , Kee Ryu , David Bullen
发明人： Chang Liu , Kee Ryu , David Bullen
IPC分类号： B01L3/02
CPC分类号： B01L3/0241 , B01J2219/00369 , B01L2200/12 , B01L2300/0819 , B01L2300/0838 , B01L2300/0887 , B01L2400/0406 , B01L2400/0487 , C40B60/14 , Y10T137/0318
摘要： A fluid delivery system including a first substrate having a micro-channel and a well both formed through the first substrate. The fluid delivery system also includes a second substrate and a delivery channel. The second substrate is on the first substrate and the delivery channel is formed between the first and second substrates. The delivery channel provides fluid communication between the micro-channel and the well.
摘要翻译：一种流体输送系统，包括具有微通道的第一基底和通过第一基底形成的孔。流体输送系统还包括第二基底和递送通道。第二基板在第一基板上，并且输送通道形成在第一和第二基板之间。输送通道提供微通道和井之间的流体连通。

8. 发明申请

US20070163647A1 MICROFABRICATED MICRO FLUID CHANNELS 失效
标题翻译：微流化微流体通道
公开(公告)号：US20070163647A1
公开(公告)日：2007-07-19
申请号：US11682687
申请日：2007-03-06
申请人： Chang Liu , Kee Ryu , David Bullen
发明人： Chang Liu , Kee Ryu , David Bullen
IPC分类号： F17D1/00 , E03B1/00 , F17D3/00
CPC分类号： B01L3/0241 , B01J2219/00369 , B01L2200/12 , B01L2300/0819 , B01L2300/0838 , B01L2300/0887 , B01L2400/0406 , B01L2400/0487 , C40B60/14 , Y10T137/0318
摘要： A fluid delivery system including a first substrate having a micro-channel and a well both formed through the first substrate. The fluid delivery system also includes a second substrate and a delivery channel. The second substrate is on the first substrate and the delivery channel is formed between the first and second substrates. The delivery channel provides fluid communication between the micro-channel and the well.
摘要翻译：一种流体输送系统，包括具有微通道的第一基底和通过第一基底形成的孔。流体输送系统还包括第二基底和递送通道。第二基板在第一基板上，并且输送通道形成在第一和第二基板之间。输送通道提供微通道和井之间的流体连通。

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