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1. 发明授权

US10094849B2 Rough road determination device 有权
公开(公告)号：US10094849B2
公开(公告)日：2018-10-09
申请号：US14381704
申请日：2012-03-28
申请人： Ryo Hasegawa , Yukitoshi Aoyama , Junichi Murase , Daisuke Hayashi
发明人： Ryo Hasegawa , Yukitoshi Aoyama , Junichi Murase , Daisuke Hayashi
IPC分类号： F02D41/14 , G01P3/481 , G01M15/06
摘要： A rough road determination device (100) is mounted on a vehicle (1) that is equipped with an internal combustion engine (10) having a crank angle sensor (31). This rough road determination device is equipped with determination means (20) for determining whether or not a road on which the vehicle travels is a rough road, by comparing a first amplitude fluctuation amount as an amplitude fluctuation amount of one pulse of an output of the crank angle sensor, which is determined in advance on the basis of a rotational speed of the internal combustion engine, with a second amplitude fluctuation amount as an amplitude fluctuation amount of one pulse that is actually output from the crank angle sensor.

2. 发明授权

US09550194B2 Gas shower structure and substrate processing apparatus 有权
标题翻译：气体淋浴结构和基材加工设备
公开(公告)号：US09550194B2
公开(公告)日：2017-01-24
申请号：US13020104
申请日：2011-02-03
申请人： Daisuke Hayashi , Koichi Murakami
发明人： Daisuke Hayashi , Koichi Murakami
IPC分类号： C23C16/455 , B05B1/18 , C23C16/00 , C23F1/08
CPC分类号： B05B1/18 , C23C16/00 , C23C16/455 , C23F1/08
摘要： Screws 4 are inserted from a bottom surface of a ceiling plate 32 and screwed to a base plate 31, and the ceiling plate 32 and the base plate 31 are press-connected to each other by an elastic restoring force of an elastic member 51 interposed between a head of the screw 4 and the ceiling plate 32. A gap is formed between the head and the ceiling plate 32. Further, a periphery of the head is covered with a cover via a ring-shaped elastic member 52. In another embodiment, a periphery of a base plate 31 is protruded from a periphery of a ceiling plate 32, and the protruded portion of the base plate 31 and a ring-shaped clamp positioned at an outer side of the ceiling plate 32 are joined by screws. Here, an elastic member is interposed between the clamp and the ceiling plate 32.
摘要翻译：螺钉4从顶板32的底面插入并拧到基板31上，顶板32和基板31通过弹性件51的弹性回复力彼此压接，螺钉4的头部和顶板32.在头部和顶板32之间形成有间隙。此外，头部的周围通过环形弹性构件52被盖覆盖。在另一个实施例中，基板31的周边从顶板32的周边突出，并且基板31的突出部分和位于顶板32的外侧的环形夹具通过螺钉接合。这里，弹性构件插入在夹具和顶板32之间。

3. 发明授权

US09494154B2 Refrigerator 有权
标题翻译：冰箱
公开(公告)号：US09494154B2
公开(公告)日：2016-11-15
申请号：US13635386
申请日：2011-03-15
申请人： Ryo Fujisawa , Masatake Toshima , Toshikatsu Kanemura , Yoshihiro Nakayama , Koichiro Iizuka , Satoshi Ide , Kunihiko Suto , Kazutaka Kurashige , Ichirou Sakuraba , Daisuke Hayashi , Keiji Sugano , Shinji Shato , Hans Madsboll , Klaus Damgaard Kristensen
发明人： Ryo Fujisawa , Masatake Toshima , Toshikatsu Kanemura , Yoshihiro Nakayama , Koichiro Iizuka , Satoshi Ide , Kunihiko Suto , Kazutaka Kurashige , Ichirou Sakuraba , Daisuke Hayashi , Keiji Sugano , Shinji Shato , Hans Madsboll , Klaus Damgaard Kristensen
IPC分类号： F04B39/02 , F25B31/02 , F04C18/16 , F04C23/00 , F04C28/28 , F04C29/02 , F04C29/04 , F25B9/00 , F25B31/00 , F04C28/02 , F04C28/06 , F25B25/00
CPC分类号： F04C18/16 , F04C23/001 , F04C28/02 , F04C28/06 , F04C28/28 , F04C29/028 , F04C29/04 , F25B9/002 , F25B25/005 , F25B31/004 , F25B2339/047 , F25B2500/06 , F25B2700/04
摘要： The refrigerator includes: a cooling-water line having a cooling-water pump to thereby send water for cooling a refrigerant inside of a condenser; a lubricating-water supply line connecting the part downstream from the cooling-water pump on the cooling-water line and a compressor 4 and supplying water flowing through the cooling-water line as a lubricant to the compressor 4; and a backup portion supplying water to the lubricating-water supply line instead of supplying water from the cooling-water line when the cooling-water pump is not driven.
摘要翻译：冰箱包括：具有冷却水泵的冷却水管线，从而发送用于冷却冷凝器内的制冷剂的水; 将冷却水管路上的冷却水泵下游的部分与压缩机4连接并将作为润滑剂流过冷却水管路的水供给到压缩机4的润滑水供给管路; 以及备用部，其在冷却水泵未被驱动时，向冷冻水管线供水，而不是向冷却水管路供水。

4. 发明授权

US09202675B2 Plasma processing apparatus and electrode for same 有权
标题翻译：等离子体处理装置和电极相同
公开(公告)号：US09202675B2
公开(公告)日：2015-12-01
申请号：US12718627
申请日：2010-03-05
申请人： Shinji Himori , Daisuke Hayashi
发明人： Shinji Himori , Daisuke Hayashi
IPC分类号： C23F1/08 , C23C16/50 , H01J37/32
CPC分类号： H01J37/3255 , H01J37/32082 , H01J37/32091 , H01J37/32174 , H01J37/32183 , H01J37/32577
摘要： A plasma processing apparatus includes a processing chamber in which a target object is processed by a plasma, a first and a second electrode that are provided in the processing chamber to face each other and have a processing space therebetween, and a high frequency power source that is connected to at least one of the first and the second electrode to supply a high frequency power to the processing chamber. And at least one of the first and the second electrode includes a base formed of a plate-shaped dielectric material and a resistor formed of a metal and provided between the base and the plasma.
摘要翻译：等离子体处理装置包括处理室，其中目标物体由等离子体处理，第一和第二电极设置在处理室中以彼此面对并具有其间的处理空间;以及高频电源，连接到第一和第二电极中的至少一个，以向处理室提供高频电力。并且第一和第二电极中的至少一个包括由板状电介质材料形成的基底和由金属形成并设置在基底和等离子体之间的电阻器。

5. 发明授权

US08968513B2 Plasma processing apparatus 有权
标题翻译：等离子体处理装置
公开(公告)号：US08968513B2
公开(公告)日：2015-03-03
申请号：US13046925
申请日：2011-03-14
申请人： Daisuke Hayashi
发明人： Daisuke Hayashi
IPC分类号： C23C16/00 , C23F1/00 , H01L21/306 , H01J7/24 , H05B31/26 , H01J37/32
CPC分类号： H01J37/32541 , H01J37/32091 , H01J37/3255 , H01J37/32568
摘要： An intensity distribution of an electric field of a high frequency power used for generating plasma is controlled by using an electrode made of a homogeneous material and a moving body. There is provided a plasma processing apparatus for introducing a processing gas into an evacuable processing chamber 100 and generating plasma by a high frequency power and performing a plasma process on a wafer W by the plasma. The plasma processing apparatus includes a dielectric base 105a having a multiple number of fine holes A; a varying member 200 as the moving body provided with a multiple number of rod-shaped members B capable of being inserted into and separated from the fine holes A; and a driving mechanism 215 configured to drive the varying member 200 to allow the rod-shaped members B to be inserted into and separated from the fine holes A.
摘要翻译：通过使用均质材料和移动体制成的电极来控制用于产生等离子体的高频功率电场的强度分布。提供了一种用于将处理气体引入可抽空处理室100中并通过高频功率产生等离子体并且通过等离子体对晶片W执行等离子体处理的等离子体处理装置。等离子体处理装置包括具有多个细孔A的电介质基底105a; 作为移动体的变化构件200设置有能够插入到细孔A中并与其分离的多个杆状构件B; 以及驱动机构215，其构造成驱动可变构件200以允许杆状构件B插入并从细孔A中分离。

6. 发明申请

US20150025836A1 ROUGH ROAD DETERMINATION DEVICE 审中-公开
标题翻译：粗糙的道路测量设备
公开(公告)号：US20150025836A1
公开(公告)日：2015-01-22
申请号：US14381704
申请日：2012-03-28
申请人： Ryo Hasegawa , Yukitoshi Aoyama , Junichi Murase , Daisuke Hayashi
发明人： Ryo Hasegawa , Yukitoshi Aoyama , Junichi Murase , Daisuke Hayashi
IPC分类号： G01P3/481 , G01M15/06
CPC分类号： G01P3/481 , F02D41/1498 , F02D2200/702 , G01M15/06
摘要： A rough road determination device (100) is mounted on a vehicle (1) that is equipped with an internal combustion engine (10) having a crank angle sensor (31). This rough road determination device is equipped with determination means (20) for determining whether or not a road on which the vehicle travels is a rough road, by comparing a first amplitude fluctuation amount as an amplitude fluctuation amount of one pulse of an output of the crank angle sensor, which is determined in advance on the basis of a rotational speed of the internal combustion engine, with a second amplitude fluctuation amount as an amplitude fluctuation amount of one pulse that is actually output from the crank angle sensor.
摘要翻译：在配备有具有曲柄角传感器（31）的内燃机（10）的车辆（1）上安装有粗糙道路确定装置（100）。这种粗糙道路确定装置配备有用于判定车辆行驶的道路是否是粗路的判定装置（20），通过将第一幅度变动量作为第一幅度变动量，作为曲柄角传感器，其基于内燃机的转速预先确定，第二振幅波动量作为实际从曲轴转角传感器输出的一个脉冲的振幅波动量。

7. 发明授权

US08621882B2 Compressor and refrigerating machine 有权
标题翻译：压缩机及制冷机
公开(公告)号：US08621882B2
公开(公告)日：2014-01-07
申请号：US12737529
申请日：2009-07-23
申请人： Koichiro Iizuka , Satoshi Ide , Toshikatsu Kanemura , Yoshihiro Nakayama , Masatake Toshima , Kazuto Okada , Kunihiko Suto , Kazutaka Kurashige , Ichirou Sakuraba , Daisuke Hayashi , Masaki Ikeuchi , Shinji Shato , Lars Bay Moller , Finn Jensen , Ziad Al-Janabi , Svend Rasmussen , Hans Madsboll , Christian Svarregaard-Jensen
发明人： Koichiro Iizuka , Satoshi Ide , Toshikatsu Kanemura , Yoshihiro Nakayama , Masatake Toshima , Kazuto Okada , Kunihiko Suto , Kazutaka Kurashige , Ichirou Sakuraba , Daisuke Hayashi , Masaki Ikeuchi , Shinji Shato , Lars Bay Moller , Finn Jensen , Ziad Al-Janabi , Svend Rasmussen , Hans Madsboll , Christian Svarregaard-Jensen
IPC分类号： F28D5/00
CPC分类号： F04D29/057 , F04D25/06 , F04D29/063 , F16C33/109 , F16C2362/52 , F25B1/047 , F25B9/002 , F25B31/002 , F25B2339/047
摘要： A compressor and a refrigerating machine which enable an easy disposal of a lubricant, are friendly to the natural environment, and have simple configurations, are provided.The compressor which is used in a refrigerating machine including an evaporator and a condenser and adapted for compressing refrigerant gas evaporated in the evaporator to convey the compressed refrigerant gas to the condenser, includes: a motor; a housing having a compression chamber inside; a rotary member which has a rotating shaft and is rotated by a driving force of the motor so as to compress water vapor serving as the refrigerant gas in the compression chamber; a bearing for supporting the rotating shaft of the rotary member in the housing; and a lubricant supplier for supplying water serving as a lubricant to the bearing.
摘要翻译：能够容易地处理润滑剂的压缩机和制冷机对于自然环境友好，具有简单的结构。一种用于包括蒸发器和冷凝器并适于压缩在蒸发器中蒸发的制冷剂气体以将压缩的制冷剂气体输送到冷凝器的压缩机的压缩机包括：电动机; 在内部具有压缩室的壳体; 旋转体，其具有旋转轴，并通过所述电动机的驱动力旋转，以压缩在所述压缩室中作为所述制冷剂气体的水蒸汽; 用于支撑旋转构件的旋转轴的壳体中的轴承; 以及用于向轴承供给用作润滑剂的水的润滑剂供应器。

8. 发明授权

US08333086B2 Condenser and cooling device 有权
标题翻译：冷凝器和冷却装置
公开(公告)号：US08333086B2
公开(公告)日：2012-12-18
申请号：US12734753
申请日：2008-11-20
申请人： Ryo Fujisawa , Kazuto Okada , Masatake Toshima , Yoshihiro Nakayama , Koichiro Iizuka , Satoshi Ide , Kunihiko Suto , Kazutaka Kurashige , Ichirou Sakuraba , Daisuke Hayashi , Shinji Shato , Masaki Ikeuchi , Hans Madsboll , Christian Svarregaard-Jensen
发明人： Ryo Fujisawa , Kazuto Okada , Masatake Toshima , Yoshihiro Nakayama , Koichiro Iizuka , Satoshi Ide , Kunihiko Suto , Kazutaka Kurashige , Ichirou Sakuraba , Daisuke Hayashi , Shinji Shato , Masaki Ikeuchi , Hans Madsboll , Christian Svarregaard-Jensen
IPC分类号： F28D5/00
CPC分类号： F28B3/00 , F25B39/04 , F25B2339/047 , F28B9/06 , F28B9/10
摘要： In the condenser provided with two of the degassing chambers separated by a cooling fluid, communication between the degassing chambers is prevented even if a pressure difference is increased between the degassing chambers. The condenser has the housing having the vapor inflow port connectable to the discharge portion of the compressor, the first degassing chamber, in the housing, communicating with the vapor inflow port, and the second degassing chamber, in the housing, arranged above the first degassing chamber across the partition portion, and the passing portion for permitting a cooling fluid to flow from the second degassing chamber to the first degassing chamber, wherein the first degassing chamber is separated from the second degassing chamber by the cooling fluid in the passing portion, and the passing portion has a pressure head space for containing a specified volume of cooling fluid so as to absorb a variation in a pressure difference between the first degassing chamber and the second degassing chamber.
摘要翻译：在冷凝器中设置有由冷却流体隔开的两个脱气室，即使脱气室之间的压力差增加也可防止脱气室之间的连通。冷凝器具有壳体，其具有可连接到压缩机的排放部分的蒸气流入端口，壳体中的第一脱气室，与蒸汽流入口连通，并且壳体中的第二脱气室布置在第一脱气之上并且通过部分用于允许冷却流体从第二脱气室流向第一脱气室，其中第一脱气室通过通过部分中的冷却流体与第二脱气室分离，以及通过部分具有用于容纳特定体积的冷却流体的压力头空间，以便吸收第一脱气室和第二脱气室之间的压力差的变化。

9. 发明授权

US08283606B2 Substrate processing apparatus and substrate stage used therein 有权
标题翻译：基板处理装置及基板台
公开(公告)号：US08283606B2
公开(公告)日：2012-10-09
申请号：US12186103
申请日：2008-08-05
申请人： Daisuke Hayashi
发明人： Daisuke Hayashi
IPC分类号： H05B3/06 , H05B3/36 , H05B3/68 , F27B5/06 , F27B5/14 , H01L21/02 , H01L21/67 , H01L21/683
CPC分类号： H01L21/68785 , H01L21/67109
摘要： A substrate stage includes a stage upon which a wafer is placed, a heater element installed within the stage, an upright support that ranges upright from a bottom of a processing chamber and includes a tubular member that includes a small tube portion, a large tube portion and a middle portion attached to and joins the small tube portion and the large tube portion to one another, an outer heat shield plate disposed so as to surround the outer side of the small tube portion and an inner heat shield plate. The outer heat shield plate and the inner heat shield plate are disposed so that an inner edge of the outer heat shield plate and an outer edge of the inner heat shield plate overlap along the entire circumference.
摘要翻译：衬底台包括放置晶片的台，安装在平台内的加热器元件，从处理室的底部直立的直立支撑件，并且包括管状构件，该管状构件包括小管部分，大管部分以及将小管部和大管部彼此附接并接合的中间部分，设置成围绕小管部分的外侧设置的外部热屏蔽板和内部热屏蔽板。外部隔热板和内部隔热板被设置为使得外部隔热板的内边缘和内部隔热板的外边缘沿着整个圆周重叠。

10. 发明申请

US20120178263A1 SUBSTRATE PROCESSING APPARATUS 审中-公开
标题翻译：基板加工设备
公开(公告)号：US20120178263A1
公开(公告)日：2012-07-12
申请号：US13423722
申请日：2012-03-19
申请人： Shigeki TOZAWA , Yusuke Muraki , Tadashi Ilno , Daisuke Hayashi
发明人： Shigeki TOZAWA , Yusuke Muraki , Tadashi Ilno , Daisuke Hayashi
IPC分类号： H01L21/31
CPC分类号： H01L21/02057 , H01L21/6719 , H01L21/67207 , H01L21/823807 , H01L21/823814 , H01L29/165 , H01L29/66636 , H01L29/7848
摘要： [Problem] To provide a substrate processing apparatus capable of preventing adherence of hydrogen fluoride to an inner surface the like of a chamber.[Means for Solving] An apparatus housing and processing a substrate W in a chamber includes a hydrogen fluoride gas supply path 61 for supplying a hydrogen fluoride gas into a chamber 40, wherein a part or whole of an inner surface of the chamber 40 is formed of Al or Al alloy which has not been subjected to surface oxidation treatment. The chamber 40 includes a lid 52 closing an upper opening of a chamber main body 51, and at least an inner surface of the lid 52 is formed of the Al or Al alloy which has not been subjected to alumite treatment.
摘要翻译： [问题]提供一种能够防止氟化氢与室的内表面粘附的基板处理装置。 [解决手段]在室内容纳和处理基板W的装置包括用于将氟化氢气体供应到室40中的氟化氢气体供给路径61，其中形成室40的内表面的一部分或全部的未经表面氧化处理的Al或Al合金。室40包括封闭室主体51的上开口的盖52，并且盖52的至少内表面由未进行防氧化处理的Al或Al合金形成。

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