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    • 3. 发明授权
    • Apparatus for measuring fluorescence lifetime
    • 用于测量荧光寿命的装置
    • US08314405B2
    • 2012-11-20
    • US12252313
    • 2008-10-15
    • Dug Young KimSucbei MoonDongsoo Lee
    • Dug Young KimSucbei MoonDongsoo Lee
    • G01T1/10G01N21/61
    • G01N21/6408
    • Disclosed is an apparatus for measuring a fluorescence lifetime. The apparatus for measuring the fluorescence lifetime comprises an excitation light generator that generates excitation light to be irradiated on a sample including fluorescence molecules; a fluorescence photon collecting unit that collects a plurality of fluorescence photons generated by irradiating the excitation light on the sample; a light sensor that converts the collected fluorescence photons into a fluorescence electrical signal; and a fluorescence lifetime signal processor that determines the fluorescence lifetime by calculating the average time of the fluorescence electrical signal with respect to a predetermined apparatus delay time. According to the above configuration, the present invention can accurately and precisely measure a fluorescence lifetime in a short measurement time by easy calculation.
    • 公开了一种用于测量荧光寿命的装置。 用于测量荧光寿命的装置包括激发光发生器,其产生要照射在包含荧光分子的样品上的激发光; 荧光光子收集单元,其收集通过将样品上的激发光照射而产生的多个荧光光子; 将所收集的荧光光子转换成荧光电信号的光传感器; 以及荧光寿命信号处理器,其通过相对于预定的设备延迟时间计算荧光电信号的平均时间来确定荧光寿命。 根据上述结构,本发明能够通过容易的计算在短的测定时间内精确而准确地测定荧光寿命。
    • 6. 发明申请
    • INDUCTIVELY COUPLED PLASMA SOURCE FOR PLASMA PROCESSING
    • 用于等离子体处理的电感耦合等离子体源
    • US20120152901A1
    • 2012-06-21
    • US13325455
    • 2011-12-14
    • Vladimir NagornyDongsoo LeeAndreas Kadavanich
    • Vladimir NagornyDongsoo LeeAndreas Kadavanich
    • C23F1/08C23F1/00
    • H01J37/3211H01J37/321H01J37/32119H01J37/32449H01J37/32651H01J37/32669H01J37/32715H01J2237/334
    • Plasma processing apparatus and methods are disclosed. Embodiments of the present disclosure include a processing chamber having an interior space operable to receive a process gas, a substrate holder in the interior of the processing chamber operable to hold a substrate, and at least one dielectric window. A metal shield is disposed adjacent the dielectric window. The metal shield can have a peripheral portion and a central portion. The processing apparatus includes a primary inductive element disposed external to the processing chamber adjacent the peripheral portion of the metal shield. The processing apparatus can further include a secondary inductive element disposed between the central portion of the metal shield and the dielectric window. The primary and secondary inductive elements can perform different functions, can have different structural configurations, and can be operated at different frequencies.
    • 公开了等离子体处理装置和方法。 本公开的实施例包括具有可操作以接收处理气体的内部空间的处理室,可操作以保持衬底的处理室内部的衬底保持器和至少一个电介质窗口。 金属屏蔽层邻近电介质窗设置。 金属屏蔽件可以具有周边部分和中心部分。 该处理设备包括一个主电感元件,其设置在与金属屏蔽的周边部分相邻的处理室的外部。 处理装置还可以包括设置在金属屏蔽件的中心部分和电介质窗口之间的次级电感元件。 初级和次级电感元件可以执行不同的功能,可以具有不同的结构配置,并且可以在不同的频率下工作。