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1. 发明授权

US08482833B2 Micromechanical element mobile along at least one axis of rotation 失效
标题翻译：至少一个旋转轴可移动微机械元件
公开(公告)号：US08482833B2
公开(公告)日：2013-07-09
申请号：US13311126
申请日：2011-12-05
申请人： Cornel Marxer , Peter Herbst
发明人： Cornel Marxer , Peter Herbst
IPC分类号： G02B26/08
CPC分类号： B81B3/0051 , B81B2201/042 , B81B2203/0181 , G02B26/0841
摘要： The invention concerns a micromechanical element including a frame, a moving part rotating inside said frame, about an axis, two torsion beams connecting the moving part to said frame , aligned along the axis and provided with a portion of reinforced width, and stop members arranged on both sides of the reinforced portions, so as to limit the lateral movement of the moving part . According to the invention, the portions of reinforced width are integral with the frame , and the stop members are integral with the moving part.
摘要翻译：本发明涉及一种微机械元件，其包括框架，在所述框架内围绕轴线旋转的移动部件，将所述移动部件连接到所述框架的两个扭力梁，沿着所述轴线对齐并且设置有一部分加强的宽度，在加强部分的两侧，以限制运动部件的横向移动。根据本发明，加强宽度的部分与框架成一体，并且止动构件与移动部件成一体。

2. 发明授权

US07388459B2 MEMs switching circuit and method for an implantable medical device 有权
标题翻译：用于可植入医疗装置的MEMs切换电路和方法
公开(公告)号：US07388459B2
公开(公告)日：2008-06-17
申请号：US10973117
申请日：2004-10-26
申请人： Rogier Receveur , Cornel Marxer
发明人： Rogier Receveur , Cornel Marxer
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , A61N1/37 , A61N1/3912 , H01H2001/0042
摘要： A bistable MEMS switch for use in selectively opening or closing electrical circuits included in an implantable medical device system is provided. The switch includes a central movable beam having a movable contact; a suspension system for supporting the movable beam and generating a contact force; an actuator for displacing the beam upon application of an activation signal, and a fixed contact for interfacing the movable contact when the switch is in a closed state. The switch is fabricated from a Si/SiO2/Si wafer using photolithography, DRIE and sacrificial oxide etching followed by metalization of electrical contact points with a wear-resistant metal or alloy. An actuation layer may be fabricated from the silicon substrate layer of the wafer and the signal layer may be fabricated from the top silicon layer. The actuation layer and signal layer are thereby electrically decoupled and mechanically coupled by the intervening SiO2 layer.
摘要翻译：提供了一种用于选择性地打开或关闭包括在可植入医疗装置系统中的电路的双稳态MEMS开关。开关包括具有可移动触点的中心可动梁; 用于支撑可移动梁并产生接触力的悬架系统; 用于在施加激活信号时移动所述光束的致动器，以及用于当所述开关处于闭合状态时将所述可动触头对接的固定触点。使用光刻，DRIE和牺牲氧化物蚀刻由Si / SiO 2 / Si / Si晶片制造开关，然后用耐磨金属或合金金属化电接触点。可以从晶片的硅衬底层制造致动层，并且可以从顶部硅层制造信号层。因此，致动层和信号层通过介入的SiO 2层进行电去耦和机械耦合。

3. 发明申请

US20110072646A1 WAFER LEVEL HERMETICALLY SEALED MEMS DEVICE 审中-公开
标题翻译： WAFER LEVEL HERMETICALY SEALED MEMS DEVICE
公开(公告)号：US20110072646A1
公开(公告)日：2011-03-31
申请号：US12907615
申请日：2010-10-19
申请人： Rogier Receveur , Cornel Marxer
发明人： Rogier Receveur , Cornel Marxer
IPC分类号： H01H11/00
CPC分类号： B81C1/0023 , B81B7/007 , B81C2203/0109 , Y10T29/49105
摘要： A hermetically sealed microelectromechanical system (MEMS) package includes a MEMS switch having a movable portion and a stationary portion with an electrical contact thereon. A glass lid is anodically bonded to the MEMS switch to form a sealed cavity over the movable portion of the MEMS switch. The glass lid includes a contact aperture to allow access to the electrical contact on the stationary portion of the MEMS switch. A family of body-implantable hermetically-sealed MEMS packages are provided according to certain aspects and embodiments of the present invention.
摘要翻译：密封的微机电系统（MEMS）封装包括具有可移动部分的MEMS开关和在其上具有电接触的固定部分。玻璃盖阳极结合到MEMS开关，以在MEMS开关的可移动部分上形成密封空腔。玻璃盖包括接触孔，以允许接近MEMS开关的固定部分上的电接触。根据本发明的某些方面和实施例提供了一系列可植入人体的气密密封的MEMS封装。

4. 发明申请

US20060192272A1 Wafer level hermetically sealed MEMS device 有权
标题翻译：晶圆级气密密封的MEMS器件
公开(公告)号：US20060192272A1
公开(公告)日：2006-08-31
申请号：US11066820
申请日：2005-02-25
申请人： Rogier Receveur , Cornel Marxer
发明人： Rogier Receveur , Cornel Marxer
IPC分类号： H01L23/58
CPC分类号： B81C1/0023 , B81B7/007 , B81C2203/0109 , Y10T29/49105
摘要： A hermetically sealed microelectromechanical system (MEMS) package includes a MEMS switch having a movable portion and a stationary portion with an electrical contact thereon. A glass lid is anodically bonded to the MEMS switch to form a sealed cavity over the movable portion of the MEMS switch. The glass lid includes a contact aperture to allow access to the electrical contact on the stationary portion of the MEMS switch. A family of body-implantable hermetically-sealed MEMS packages are provided according to certain aspects and embodiments of the present invention.
摘要翻译：密封的微机电系统（MEMS）封装包括具有可移动部分的MEMS开关和在其上具有电接触的固定部分。玻璃盖阳极结合到MEMS开关，以在MEMS开关的可移动部分上形成密封空腔。玻璃盖包括接触孔，以允许接近MEMS开关的固定部分上的电接触。根据本发明的某些方面和实施例提供了一系列可植入人体的气密密封的MEMS封装。

5. 发明申请

US20050115811A1 MEMs switching circuit and method for an implantable medical device 有权
标题翻译：用于可植入医疗装置的MEMs切换电路和方法
公开(公告)号：US20050115811A1
公开(公告)日：2005-06-02
申请号：US10973117
申请日：2004-10-26
申请人： Rogier Receveur , Cornel Marxer
发明人： Rogier Receveur , Cornel Marxer
IPC分类号： A61N1/00 , A61N1/37 , A61N1/39 , H01H59/00
CPC分类号： H01H59/0009 , A61N1/37 , A61N1/3912 , H01H2001/0042
摘要： A bistable MEMS switch for use in selectively opening or closing electrical circuits included in an implantable medical device system is provided. The switch includes a central movable beam having a movable contact; a suspension system for supporting the movable beam and generating a contact force; an actuator for displacing the beam upon application of an activation signal, and a fixed contact for interfacing the movable contact when the switch is in a closed state. The switch is fabricated from a Si/SiO2/Si wafer using photolithography, DRIE and sacrificial oxide etching followed by metalization of electrical contact points with a wear-resistant metal or alloy. An actuation layer may be fabricated from the silicon substrate layer of the wafer and the signal layer may be fabricated from the top silicon layer. The actuation layer and signal layer are thereby electrically decoupled and mechanically coupled by the intervening SiO2 layer.
摘要翻译：提供了一种用于选择性地打开或关闭包括在可植入医疗装置系统中的电路的双稳态MEMS开关。开关包括具有可移动触点的中心可动梁; 用于支撑可移动梁并产生接触力的悬架系统; 用于在施加激活信号时移动所述光束的致动器，以及用于当所述开关处于闭合状态时将所述可动触头对接的固定触点。使用光刻，DRIE和牺牲氧化物蚀刻由Si / SiO 2 / Si / Si晶片制造开关，随后用耐磨金属或合金金属化电接触点。可以从晶片的硅衬底层制造致动层，并且可以从顶部硅层制造信号层。因此，致动层和信号层通过介入的SiO 2层进行电去耦和机械耦合。

6. 发明申请

US20110013870A1 COUPLING DEVICE FOR OPTICAL FIBRES 审中-公开
标题翻译：光纤耦合器件
公开(公告)号：US20110013870A1
公开(公告)日：2011-01-20
申请号：US12836384
申请日：2010-07-14
申请人： Cornel Marxer , Peter Herbst
发明人： Cornel Marxer , Peter Herbst
IPC分类号： G02B6/38 , B32B38/00
CPC分类号： G02B6/3672 , G02B6/32 , G02B6/3644 , G02B6/3692 , Y10T156/10
摘要： A coupling device (1, 2) for optical fibres (19) comprises a first sheet (11) equipped with a plurality of through-holes (13), of which a portion 13a, at least, has a diameter adjusted to the diameter of said optical fibres (19), and a second sheet (12) joined to said first sheet (11) by a face. Said device (1, 2) also comprises a third sheet (15), joined to said first sheet (11), and equipped with a plurality of through-holes (16), of which a portion (16a), at least, has a diameter adjusted to the diameter of said optical fibres (19), aligned relative to the holes (13) of said first sheet (11), so as to form recesses (18, 25) with which said optical fibres (19) are engaged.
摘要翻译：用于光纤（19）的耦合装置（1,2）包括配备有多个通孔（13）的第一片（11），其中至少部分13a的直径被调整到所述光纤（19）和通过面接合到所述第一片（11）的第二片（12）。所述装置（1,2）还包括连接到所述第一片（11）的第三片（15），并且装有多个通孔（16），其中至少具有相对于所述第一片（11）的孔（13）对准的与所述光纤（19）的直径相对应的直径的直径，以形成所述光纤（19）与其接合的凹槽（18,25）。

7. 发明申请

US20090059344A1 MICROMIRROR DEVICE 审中-公开
标题翻译： MICROMIRROR设备
公开(公告)号：US20090059344A1
公开(公告)日：2009-03-05
申请号：US12181934
申请日：2008-07-29
申请人： Cornel MARXER , Peter Herbst , Michael Zickar , Wilfried Noell
发明人： Cornel MARXER , Peter Herbst , Michael Zickar , Wilfried Noell
IPC分类号： G02B26/00
CPC分类号： G02B26/0841
摘要： A micromirror device (21) comprises an electrostatically actuable micromirror (25) and also a frame (27) and a base (9). The micromirror (25) is cardanically suspended in the base (9) via the frame (27) in that it is connected to the frame (27) via two articulated joints and the frame (27) is connected to the base (9) via two further articulated joints. In this way, the micromirror (25) can be actuated by application of an electrical voltage to correspondingly positioned electrodes, that is to say that one or both of the rotation axes defined by the two pairs of articulated joints are pivoted. The micromirror is then suspended in such a way that the two articulated joints defining one of the two rotation axes each comprise a torsion spring and the other two articulated joints defining the other of the two rotation axes each comprise a bending spring.
摘要翻译：微反射镜装置（21）包括静电致动微镜（25）以及框架（27）和基座（9）。微镜（25）通过框架（27）主要悬挂在基座（9）中，因为它通过两个铰接接头连接到框架（27），并且框架（27）经由两个铰接接头。以这种方式，可以通过将电压施加到相应定位的电极来致动微镜（25），也就是说由两对铰接接头所限定的一个或两个旋转轴线枢转。然后以这样一种方式悬挂微镜，使得限定两个旋转轴中的一个的两个关节接头各自包括扭转弹簧，并且限定两个旋转轴中的另一个的另一个铰接接头各自包括弯曲弹簧。

8. 发明授权

US06315462B1 Fiber optic circuit switch and a process for its production 有权
标题翻译：光纤电路开关及其生产过程
公开(公告)号：US06315462B1
公开(公告)日：2001-11-13
申请号：US09269026
申请日：1999-05-17
申请人： Olivier Anthamatten , Cornel Marxer
发明人： Olivier Anthamatten , Cornel Marxer
IPC分类号： G02B636
CPC分类号： G02B6/3518 , G02B6/3546 , G02B6/357 , G02B6/3584 , G02B6/3656 , G02B6/3692
摘要： A fiber Optic circuit switch comprises elements constructed entirely from a coating layer on a substrate. A procedure for production of the fiber optic circuit switch is disclosed.
摘要翻译：光纤电路开关包括完全由衬底上的涂层构成的元件。公开了一种用于生产光纤电路开关的步骤。

9. 发明授权

US07816745B2 Wafer level hermetically sealed MEMS device 有权
标题翻译：晶圆级气密密封的MEMS器件
公开(公告)号：US07816745B2
公开(公告)日：2010-10-19
申请号：US11066820
申请日：2005-02-25
申请人： Rogier Receveur , Cornel Marxer
发明人： Rogier Receveur , Cornel Marxer
IPC分类号： H01L23/10
CPC分类号： B81C1/0023 , B81B7/007 , B81C2203/0109 , Y10T29/49105
摘要： A hermetically sealed microelectromechanical system (MEMS) package includes a MEMS switch having a movable portion and a stationary portion with an electrical contact thereon. A glass lid is anodically bonded to the MEMS switch to form a sealed cavity over the movable portion of the MEMS switch. The glass lid includes a contact aperture to allow access to the electrical contact on the stationary portion of the MEMS switch. A family of body-implantable hermetically-sealed MEMS packages are provided according to certain aspects and embodiments of the present invention.
摘要翻译：密封的微机电系统（MEMS）封装包括具有可移动部分的MEMS开关和在其上具有电接触的固定部分。玻璃盖阳极结合到MEMS开关，以在MEMS开关的可移动部分上形成密封空腔。玻璃盖包括接触孔，以允许接近MEMS开关的固定部分上的电接触。根据本发明的某些方面和实施例提供了一系列可植入人体的气密密封的MEMS封装。

10. 发明申请

US20120140303A1 MICROMECHANICAL ELEMENT MOBILE ALONG AT LEAST ONE AXIS OF ROTATION 失效
标题翻译：微电子元件移动至少一个旋转轴
公开(公告)号：US20120140303A1
公开(公告)日：2012-06-07
申请号：US13311126
申请日：2011-12-05
申请人： Cornel Marxer , Peter Herbst
发明人： Cornel Marxer , Peter Herbst
IPC分类号： G02B26/08
CPC分类号： B81B3/0051 , B81B2201/042 , B81B2203/0181 , G02B26/0841
摘要： The invention concerns a micromechanical element (1) including a frame (10), a moving part (12) rotating inside said frame (10), about an axis AA, two torsion beams (14) connecting the moving part (12) to said frame (10), aligned along the axis AA and provided with a portion (15) of reinforced width, and stop members (16) arranged on both sides of the reinforced portions (15), so as to limit the lateral movement of the moving part (12). According to the invention, the portions (15) of reinforced width are integral with the frame (10), and the stop members (16) are integral with the moving part (12).
摘要翻译：本发明涉及一种微机械元件（1），包括框架（10），围绕轴线AA在所述框架（10）内旋转的移动部件（12），将所述运动部件（12）连接到所述框架（10）沿轴线AA排列并且设置有加强宽度的部分（15）和布置在加强部分（15）的两侧上的止动构件（16），以限制移动的横向运动第（12）部分。根据本发明，加强宽度的部分（15）与框架（10）成一体，并且止动构件（16）与移动部件（12）成一体。

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