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1. 发明授权

US06998217B2 Critical dimension edge placement and slope enhancement with central pixel dose addition and modulated inner pixels 有权
标题翻译：关键尺寸边缘放置和中心像素剂量加法和调制内像素的斜率增强
公开(公告)号：US06998217B2
公开(公告)日：2006-02-14
申请号：US10326953
申请日：2003-01-06
申请人： Jerry Martyniuk , H. Christopher Hamaker , Matthew J. Jolley , Peter Pirogovsky , Asher Klatchko , Richard E. Crandall
发明人： Jerry Martyniuk , H. Christopher Hamaker , Matthew J. Jolley , Peter Pirogovsky , Asher Klatchko , Richard E. Crandall
IPC分类号： G03C5/00
CPC分类号： G03F1/78
摘要： Systems and methods for gray scale lithography for defining edges such as on microelectronic device patterns during integrated circuit fabrication are disclosed. Methods for critical dimension edge placement and slope enhancement utilize central pixel dose addition or modulated inner pixels. A method for gray scale lithography for defining edges of features generally comprises identifying a center pixel of a feature, exposing the general width of the feature including the identified center pixel with full doses, and enhancing the identified center pixel by exposing the identified center pixel with additional dose to accurately place the edge of the feature, whereby the edge of the feature is defined and moved by exposing the center pixel with the additional dose. Another method for gray scale lithography generally comprises identifying a proximal interior pixel immediately interior to an unbiased edge of the feature, exposing the general width of the feature full dosages, and exposing the proximal interior pixel with a dosage of elevated intensity selected from a set of gray levels, the elevated intensities being above the full dosage, the set of gray levels biases the edge of the feature and facilitates in further moving the edge of the feature in fractional increments of a pixel depending upon the gray level selected.
摘要翻译：公开了用于在集成电路制造期间用于限定边缘（例如微电子器件图案）上的灰度光刻的系统和方法。关键尺寸边缘放置和斜率增强的方法利用中心像素剂量加法或调制内像素。用于定义特征边缘的灰度光刻的方法通常包括识别特征的中心像素，以全剂量暴露包括所识别的中心像素的特征的一般宽度，以及通过将所识别的中心像素曝光于所识别的中心像素，附加剂量以精确地放置特征的边缘，由此通过用附加剂量暴露中心像素来限定和移动特征的边缘。用于灰度光刻的另一种方法通常包括：在特征的非偏向边缘内部识别近端内部像素，暴露特征全部剂量的总体宽度，以及从一组灰度级，提高的强度高于全剂量，灰度级集合偏置特征的边缘，并且有助于根据所选择的灰度级进一步移动像素的分数增量中的特征边缘。

2. 发明授权

US06819450B1 Enhanced edge resolution and critical dimension linearity in lithography 失效
标题翻译：光刻中增强的边缘分辨率和临界尺寸线性度
公开(公告)号：US06819450B1
公开(公告)日：2004-11-16
申请号：US09538848
申请日：2000-03-28
申请人： Matthew J. Jolley , Jerry Martyniuk , H. Christopher Hamaker
发明人： Matthew J. Jolley , Jerry Martyniuk , H. Christopher Hamaker
IPC分类号： G06K1500
CPC分类号： G03F7/70283 , G03F7/70383
摘要： A semiconductor fabrication gray level photolithography strategy, in which the energy beam intensities corresponding to each gray level are selected from a set of non-linear, non-monotonic intensities. Rasterized geometric shape edges are defined by associating one or more intermediate gray levels with pixels in at least one row of pixels. The geometric shape is printed or imaged on an energy sensitive layer by modulating an energy beam to the intensity corresponding to the associated gray level, and directing the modulated beam to the pixel location on the layer. The intensities corresponding to the gray levels are selected so as to optimize critical dimension (CD) characteristics and other printing features.
摘要翻译：半导体制造灰度光刻策略，其中对应于每个灰度级的能量束强度从一组非线性非单调强度中选择。通过将一个或多个中间灰度级别与至少一行像素中的像素相关联来定义光栅化几何形状边缘。通过将能量束调制到与相关联的灰度级相对应的强度，并将调制的光束引导到层上的像素位置，将几何形状印刷或成像在能量敏感层上。选择对应于灰度级的强度，以便优化临界尺寸（CD）特性和其他印刷特征。

3. 发明授权

US06731320B1 Laser pattern generator 失效
标题翻译：激光图案发生器
公开(公告)号：US06731320B1
公开(公告)日：2004-05-04
申请号：US09273115
申请日：1999-03-19
申请人： Paul C. Allen , Michael J. Bohan , Morris H. Green , Henry Christopher Hamaker
发明人： Paul C. Allen , Michael J. Bohan , Morris H. Green , Henry Christopher Hamaker
IPC分类号： B41J1514
CPC分类号： G03F7/704
摘要： A scanning system uses a multi-beam brush having a widely separated beams, a modulator that controls intensity of pixels in scan beams, an optical system that minimizes scan line bow at the expense of non-uniform scanning beam velocity, and a timing generator that generates a pixel clock signal having a variable period that compensates for the non-uniformity of pixel velocity. The wide separation of scan beams permits the modulator to turn beams on or off with a direction of brightening or darkening in the cross-section of the beams being opposite to the scanning direction. A novel arrangement of the beams in the brush permits a uniform indexing step size to uniformly expose an image region. In one embodiment, the timing generator includes: a source of pixel period values; a select circuit to select pixel period values for pixels, and a counter that loads a first value from the pixel period value selected for a pixel, counts for a period of time indicated by the first value, and asserts a signal marking an end of the period. An additional delay after the signal from the counter can be shorter than the period of a clock signal to the counter but also controlled by the pixel period value.
摘要翻译：扫描系统使用具有广泛分离的光束的多光束电刷，控制扫描光束中的像素强度的调制器，以牺牲不均匀扫描光束速度最小化扫描线弓的光学系统，以及定时发生器，产生具有补偿像素速度的不均匀性的可变周期的像素时钟信号。扫描光束的宽分离允许调制器在与扫描方向相反的横截面中的亮度或变暗方向打开或关闭光束。刷子中的光束的新颖布置允许均匀的分度步长以均匀地曝光图像区域。在一个实施例中，定时发生器包括：像素周期值的源; 选择用于像素的像素周期值的选择电路，以及从为像素选择的像素周期值加载第一值的计数器，计数由第一值指示的时间段，并且断言标记期。来自计数器的信号之后的附加延迟可以比针对计数器的时钟信号的周期短，而且还受到像素周期值的控制。

4. 发明授权

US07067227B2 Sensitized chemically amplified photoresist for use in photomask fabrication and semiconductor processing 失效
公开(公告)号：US07067227B2
公开(公告)日：2006-06-27
申请号：US10155523
申请日：2002-05-23
申请人： Melvin W. Montgomery , Christopher Hamaker
发明人： Melvin W. Montgomery , Christopher Hamaker
IPC分类号： G03F7/00
CPC分类号： G03F7/0392
摘要： The disclosure pertains to a photoresist composition and a method of using the photoresist in the fabrication of reticles or features on a semiconductor substrate. The photoresist composition and the method are designed to reduce the variation in critical dimension of features across a surface of a substrate, where the variation in critical dimension is a result of localized resist loading. The photoresist composition is useful when the imaging system is G-line, H-line, or I-line, and the photoresist composition includes a sensitizer which works in combination with a DUV photoresist including a PAC, to sensitize the photoresist to the G-line, H-line and I-line imaging.

5. 发明授权

US06897888B2 Scanning brush and method of use 失效
标题翻译：扫描刷和使用方法
公开(公告)号：US06897888B2
公开(公告)日：2005-05-24
申请号：US10787569
申请日：2004-02-25
申请人： Paul C. Allen , Michael J. Bohan , Morris H. Green , Henry Christopher Hamaker
发明人： Paul C. Allen , Michael J. Bohan , Morris H. Green , Henry Christopher Hamaker
IPC分类号： B41J2/44 , G02B26/10 , G02F1/33 , G03F7/20 , H01L21/027 , H04N1/113 , B41J15/14 , G02B26/08
CPC分类号： G03F7/704
摘要： A scanning system uses a multi-beam brush having a widely separated beams, a modulator that controls intensity of pixels in scan beams, an optical system that minimizes scan line bow at the expense of non-uniform scanning beam velocity, and a timing generator that generates a pixel clock signal having a variable period that compensates for the non-uniformity of pixel velocity. The wide separation of scan beams permits the modulator to turn beams on or off with a direction of brightening or darkening in the cross-section of the beams being opposite to the scanning direction. A novel arrangement of the beams in the brush permits a uniform indexing step size to uniformly expose an image region. In one embodiment, the timing generator includes: a source of pixel period values; a select circuit to select pixel period values for pixels, and a counter that loads a first value from the pixel period value selected for a pixel, counts for a period of time indicated by the first value, and asserts a signal marking an end of the period. An additional delay after the signal from the counter can be shorter than the period of a clock signal to the counter but also controlled by the pixel period value.
摘要翻译：扫描系统使用具有广泛分离的光束的多光束电刷，控制扫描光束中的像素强度的调制器，以牺牲不均匀扫描光束速度最小化扫描线弓的光学系统，以及定时发生器，产生具有补偿像素速度的不均匀性的可变周期的像素时钟信号。扫描光束的宽分离允许调制器在与扫描方向相反的横截面中的亮度或变暗方向打开或关闭光束。刷子中的光束的新颖布置允许均匀的分度步长以均匀地曝光图像区域。在一个实施例中，定时发生器包括：像素周期值的源; 选择用于像素的像素周期值的选择电路，以及从为像素选择的像素周期值加载第一值的计数器，计数由第一值指示的时间段，并且断言标记期。来自计数器的信号之后的附加延迟可以比针对计数器的时钟信号的周期短，而且还受到像素周期值的控制。

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