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1. 发明申请

US20050062465A1 Method and system for loading substrate supports into a substrate holder 有权
标题翻译：将基板支撑件装载到基板支架中的方法和系统
公开(公告)号：US20050062465A1
公开(公告)日：2005-03-24
申请号：US10913945
申请日：2004-08-05
申请人： Christianus De Ridder
发明人： Christianus De Ridder
IPC分类号： B65G49/07 , G01R1/00 , G01R31/28 , H01L21/324 , H01L21/677 , H01L21/68 , H01L21/683
CPC分类号： G01R31/2893
摘要： Wafer supports are provided that have a diameter smaller than the diameter of the wafer that they are to support in a wafer boat. The perimeter of the wafer support is preferably continuous, extending completely around in a 360° span, and is sized to fit between the protrusions supporting a particular wafer in a wafer cassette. To load the wafer boat, an end effector removes the wafer support from a wafer boat and moves the wafer support into a wafer cassette, where the end effector moves upward to seat a wafer upon the wafer support. The wafer and wafer support are then transported to the wafer boat and the wafer support and the wafer are lowered onto a wafer slot surface in a wafer slot in the wafer boat, to transfer the wafer support and wafer from the end effector to the wafer boat.
摘要翻译：提供的晶片支撑件的直径小于它们将在晶片舟皿中支撑的晶片的直径。晶片支撑件的周边优选地是连续的，以360°跨度完全延伸，并且其尺寸适于装配在支撑晶片盒中的特定晶片的突起之间。为了装载晶片舟，末端执行器从晶片舟皿移除晶片支撑并将晶片支撑件移动到晶片盒中，其中端部执行器向上移动以将晶片置于晶片支撑件上。然后将晶片和晶片支撑件输送到晶片舟皿，并且晶片支撑件和晶片下降到晶片舟皿的晶片槽中的晶片槽表面上，以将晶片支撑件和晶片从端部执行器传送到晶片舟。

2. 发明申请

US20070122128A1 METHOD AND SYSTEM FOR LOADING SUBSTRATE SUPPORTS INTO A SUBSTRATE HOLDER 有权
标题翻译：用于将基板支撑件装载到基板支架中的方法和系统
公开(公告)号：US20070122128A1
公开(公告)日：2007-05-31
申请号：US11669842
申请日：2007-01-31
申请人： Christianus De Ridder
发明人： Christianus De Ridder
IPC分类号： A21B2/00
CPC分类号： G01R31/2893
摘要： Wafer supports are provided that have a diameter smaller than the diameter of the wafer that they are to support in a wafer boat. The perimeter of the wafer support is preferably continuous, extending completely around in a 360° span, and is sized to fit between the protrusions supporting a particular wafer in a wafer cassette. To load the wafer boat, an end effector removes the wafer support from a wafer boat and moves the wafer support into a wafer cassette, where the end effector moves upward to seat a wafer upon the wafer support. The wafer and wafer support are then transported to the wafer boat and the wafer support and the wafer are lowered onto a wafer slot surface in a wafer slot in the wafer boat, to transfer the wafer support and wafer from the end effector to the wafer boat.
摘要翻译：提供的晶片支撑件的直径小于它们将在晶片舟皿中支撑的晶片的直径。晶片支撑件的周边优选地是连续的，以360°跨度完全延伸，并且其尺寸适于装配在支撑晶片盒中的特定晶片的突起之间。为了装载晶片舟，末端执行器从晶片舟皿移除晶片支撑并将晶片支撑件移动到晶片盒中，其中端部执行器向上移动以将晶片置于晶片支撑件上。然后将晶片和晶片支撑件输送到晶片舟皿，并且晶片支撑件和晶片下降到晶片舟皿的晶片槽中的晶片槽表面上，以将晶片支撑件和晶片从端部执行器传送到晶片舟。

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