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1. 发明授权

US06449036B1 Sensor unit, process and device for inspecting the surface of an object 失效
标题翻译：用于检查物体表面的传感器单元，过程和装置
公开(公告)号：US06449036B1
公开(公告)日：2002-09-10
申请号：US09403735
申请日：2000-01-10
申请人： Christian Wollmann , Lutz Wenert , Joachim Ihlefeld , Ralf Grieser
发明人： Christian Wollmann , Lutz Wenert , Joachim Ihlefeld , Ralf Grieser
IPC分类号： G01N2100
CPC分类号： G01N21/8986 , G01B11/24 , G01N21/8901 , G01S7/4817 , G01S17/48 , G02B26/126
摘要： A sensor unit (50), a device, and a process for inspection of a surface (10′, 10&Dgr;) of an object (10) for the purpose of identifying surface characteristics, such as structural defects. The device contains an emitting module (51) and a receiving module (52). The emitting module emits at least one beam bundle (6, 6′, 6″). The receiving module has at least one light receiver (15, 16, 20). A rotating polygonal mirror wheel (2) is located in the focal point of a parabolic mirror (1). A beam bundle (6) of the laser (3, 4) is directed onto the mirror (1) by means of a telecentric lens, which guides the emitter and receiver beam on the same optical axis, whereby the parabolic mirror (1) guides the deflected beam bundle (6, 6′, 6″) under a constant angle relative to the axis of symmetry (7) of the parabolic mirror (1) along a scanning line (23, 24) over the object (10). The diffusely reflected beam bundle, after being deflected out of the common beam path, impinges on the processing unit (5).
摘要翻译：传感器单元（50），装置和用于检查物体（10）的表面（10'，10DEL）的方法，用于识别诸如结构缺陷的表面特性。该装置包含发射模块（51）和接收模块（52）。发射模块发射至少一个光束束（6,6'，6“）。接收模块具有至少一个光接收器（15,16,20）。旋转多面镜轮（2）位于抛物面镜（1）的焦点。激光束（3,4）的束束（6）通过远心透镜被引导到反射镜（1）上，远心透镜将发射器和接收器光束引导在相同的光轴上，由此抛物面镜（1）引导所述偏转束束（6,6'，6“）沿着所述物体（10）上的扫描线（23,24）相对于所述抛物面镜（1）的对称轴线（7）保持一定角度。漫反射束束在从公共光束路径偏转之后撞击处理单元（5）。

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