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1. 发明申请

US20130079912A1 METHODS AND SYSTEMS FOR SEMICONDUCTOR FABRICATION WITH LOCAL RETICLE MANAGEMENT 审中-公开
标题翻译：用于本地化管理的半导体制造方法与系统
公开(公告)号：US20130079912A1
公开(公告)日：2013-03-28
申请号：US13245576
申请日：2011-09-26
申请人： Chinmay S. Oza
发明人： Chinmay S. Oza
IPC分类号： G06F19/00
CPC分类号： H01L21/67276
摘要： A method and system of semiconductor fabrication are provided. In the method, an equipment unit performs a process on substrates using a current reticle. The equipment unit also communicates processing data to a local reticle controller. The local reticle controller schedules removal of the current reticle from the equipment unit and delivery of a subsequent reticle to the equipment unit based on the processing data for further substrate processing.
摘要翻译：提供了半导体制造的方法和系统。在该方法中，设备单元使用当前的掩模进行在基板上的处理。设备单元还将处理数据传送到本地标线控制器。本地标线控制器基于用于进一步的基板处理的处理数据，将设备单元上的当前掩模版移除并将随后的掩模版传送到设备单元。

2. 发明申请

US20130079913A1 METHODS AND SYSTEMS FOR SEMICONDUCTOR FABRICATION WITH LOCAL PROCESSING MANAGEMENT 审中-公开
标题翻译：用于本地加工管理的半导体制造的方法和系统
公开(公告)号：US20130079913A1
公开(公告)日：2013-03-28
申请号：US13247792
申请日：2011-09-28
申请人： Chinmay S. Oza , William J. Fosnight , Jan Rothe , John R. Robinson , Gabriel Gaxiola
发明人： Chinmay S. Oza , William J. Fosnight , Jan Rothe , John R. Robinson , Gabriel Gaxiola
IPC分类号： G06F19/00
CPC分类号： H01L21/67276
摘要： A method and system of semiconductor fabrication are provided. In the method, an equipment unit performs a process on substrates to form processed substrates. The equipment unit also communicates processing data to a local scheduler. The local scheduler schedules removal of processed substrates from the equipment unit and delivery of unprocessed substrates to the equipment unit based on the processing data.
摘要翻译：提供了半导体制造的方法和系统。在该方法中，设备单元在基板上进行处理以形成经处理的基板。设备单元还将处理数据传送到本地调度器。本地调度器基于处理数据调度从设备单元移除经处理的基板并将未处理的基板传送到设备单元。

3. 发明申请

US20130226325A1 METHODS AND SYSTEMS FOR FABRICATING INTEGRATED CIRCUITS WITH LOCAL PROCESSING MANAGEMENT 审中-公开
标题翻译：用本地加工管理制造集成电路的方法与系统
公开(公告)号：US20130226325A1
公开(公告)日：2013-08-29
申请号：US13404053
申请日：2012-02-24
申请人： Chinmay S. Oza
发明人： Chinmay S. Oza
IPC分类号： G06F19/00
CPC分类号： G06Q10/06
摘要： Methods and systems for fabricating integrated circuits are provided. In an embodiment, a method for fabricating integrated circuits includes hosting process recipes on a recipe management system (RMS). Processes are performed according to the process recipes on substrates with equipment units. Movement of substrates to and from equipments units is controlled with a local storage controller. A real time dispatcher (RTD) establishes a priority for processes on substrates. Further, a manufacturing execution system (MES) supervises locations of substrates and processes to be performed. Information is communicated to a local scheduler from the RMS, from each equipment unit, from the local storage controller, from the RTD, and from the MES. Based on the information, the local scheduler schedules movement of the substrates to and from the equipment units.
摘要翻译：提供了用于制造集成电路的方法和系统。在一个实施例中，用于制造集成电路的方法包括在食谱管理系统（RMS）上托管过程配方。根据工艺配方在具有设备单位的基材上进行工艺。使用本地存储控制器控制基板与设备单元的移动。实时调度员（RTD）确定了基板上的处理过程的优先级。此外，制造执行系统（MES）监督要执行的基板和处理的位置。信息从RMS，来自每个设备单元，本地存储控制器，RTD和MES传送到本地调度器。基于该信息，本地调度器调度基板与设备单元的移动。

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