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1. 发明申请

US20050090095A1 Method to fabricate aligned dual damascene openings 有权
公开(公告)号：US20050090095A1
公开(公告)日：2005-04-28
申请号：US10690998
申请日：2003-10-22
申请人： Yeow Lim , Wuping Liu , Tae Lee , Bei Zhang , Juan Tan , Alan Cuthbertson , Chin Neo
发明人： Yeow Lim , Wuping Liu , Tae Lee , Bei Zhang , Juan Tan , Alan Cuthbertson , Chin Neo
IPC分类号： H01L21/4763 , H01L21/768 , H01L29/06
CPC分类号： H01L21/76807 , H01L21/76829 , H01L21/76834
摘要： A method of forming an aligned dual damascene opening, comprising including the following sequential steps. A structure having a metal structure formed thereover is provided. A layer stack is formed over the metal structure. The layer stack comprises, in ascending order: a bottom etch stop layer; a lower dielectric material layer; a middle etch stop layer; a middle dielectric material layer; and an upper dielectric layer. The upper dielectric layer is patterned to form an opening exposing a portion of the underlying middle dielectric material layer. The opening having a width. A patterned mask layer is formed over the patterned upper dielectric layer leaving exposed opposing portions of the patterned upper dielectric layer. The middle dielectric material layer is patterned to form an opening therein using the patterned mask layer and the exposed portions of the upper dielectric layer as masks. The middle dielectric material layer opening exposing a portion of the middle etch stop layer. The middle etch stop layer is removed at its exposed portion to form a patterned middle etch stop layer having an opening exposing a portion of the lower dielectric material layer. Simultaneously patterning: the patterned middle dielectric material layer using the patterned upper dielectric layer as a mask to form an inchoate upper trench opening; and the lower dielectric material layer using the patterned mask layer and the patterned middle etch stop layer as masks to form an inchoate lower via opening aligned with the inchoate upper trench opening. The inchoate lower via opening exposing a portion of the underlying bottom etch stop layer. The patterned mask layer is removed. The patterned upper dielectric material layer, the exposed portions of the patterned middle etch stop layer and the exposed portion of the bottom etch stop layer are removed to convert: the inchoate upper trench opening into a final upper trench opening; and the inchoate lower via opening into a final lower via opening to form the dual damascene opening.

2. 发明申请

US20100145096A1 Process for Recovery and Purification of Lactic Acid 失效
标题翻译：乳酸的回收和纯化方法
公开(公告)号：US20100145096A1
公开(公告)日：2010-06-10
申请号：US12443413
申请日：2005-10-06
申请人： Ooi Lin Lum , Govindharaju Venkidachalam , Yew Chin Neo
发明人： Ooi Lin Lum , Govindharaju Venkidachalam , Yew Chin Neo
IPC分类号： C07C51/42
CPC分类号： C12P7/56 , C12M47/10
摘要： The present invention relates to a process for recovery and purification of lactic acid from a fermentation broth containing lactic acid. The process comprises subjecting the fermentation broth to ultrafiltration and/or microfiltration to form a first permeate, concentrating the first permeate to form concentrated broth, subjecting the concentrated broth to supported liquid membrane for extraction of lactic acid into a separate stream, subjecting the extracted lactic acid solution to activated carbon for removal of colour, subjecting the extracted lactic acid solution to cation exchange resin for deminerization, subjecting the extracted lactic acid solution to anion exchange resin for removal of anionic impurities and concentrating the extracted lactic acid solution to desired concentration. The supported liquid membrane of the present invention contains an organic layer that comprises a earner, a co-extractant, a diluent and a stabilizer.
摘要翻译：本发明涉及从含有乳酸的发酵液中回收和提纯乳酸的方法。该方法包括使发酵液经过超滤和/或微滤以形成第一渗透物，浓缩第一渗透物以形成浓缩的肉汤，将浓缩的肉汤加载到支撑液膜上以将乳酸提取到单独的流中，使提取的乳酸将酸提取到活性炭上以去除颜色，将提取的乳酸溶液进行阳离子交换树脂进行脱矿，将萃取的乳酸溶液进行阴离子交换树脂去除阴离子杂质，并将提取的乳酸溶液浓缩至所需浓度。本发明的支撑液膜含有一种有机层，它包括一种载体，共萃取剂，稀释剂和稳定剂。

3. 发明申请

US20060003573A1 Method to fabricate aligned dual damacene openings 有权
标题翻译：制造对齐双重断裂孔的方法
公开(公告)号：US20060003573A1
公开(公告)日：2006-01-05
申请号：US11174805
申请日：2005-07-05
申请人： Yeow Lim , Wuping Liu , Tae Lee , Bei Zhang , Juan Boon Tan , Alan Cuthbertson , Chin Neo
发明人： Yeow Lim , Wuping Liu , Tae Lee , Bei Zhang , Juan Boon Tan , Alan Cuthbertson , Chin Neo
IPC分类号： H01L21/4763
CPC分类号： H01L21/76807 , H01L21/76829 , H01L21/76834
摘要： An aligned dual damascene opening structure, comprising the following. A structure having a metal structure formed thereover. A patterned layer stack over the metal structure; the layer stack comprising, in ascending order: a patterned bottom etch stop layer; a patterned lower dielectric material layer; a patterned middle etch stop layer; and a patterned middle dielectric material layer; the lower and middle dielectric layers being comprised of the same material. An upper trench opening in the patterned bottom etch stop layer and the patterned lower dielectric material layer; and a lower via opening in the patterned middle etch stop layer and the patterned middle dielectric material layer. The lower via opening being in communication with the upper trench opening. Wherein the upper trench opening and the lower via opening comprise an aligned dual damascene opening.
摘要翻译：对准的双镶嵌开口结构，包括以下。具有形成在其上的金属结构的结构。金属结构上的图案层叠层; 所述层堆叠按升序包括：图案化的底部蚀刻停止层; 图案化的下介电材料层; 图案化的中间蚀刻停止层; 和图案化的中间介电材料层; 下部和中间介电层由相同的材料组成。在图案化的底部蚀刻停止层和图案化的下部介电材料层中的上部沟槽开口; 以及图案化的中间蚀刻停止层和图案化的中间介电材料层中的下通孔开口。下通道开口与上沟槽开口连通。其中上沟槽开口和下通孔开口包括对准的双镶嵌开口。

4. 发明授权

US08293940B2 Process for recovery and purification of lactic acid 失效
标题翻译：乳酸回收和纯化方法
公开(公告)号：US08293940B2
公开(公告)日：2012-10-23
申请号：US12443413
申请日：2005-10-06
申请人： Ooi Lin Lum , Govindharaju Venkidachalam , Yew Chin Neo
发明人： Ooi Lin Lum , Govindharaju Venkidachalam , Yew Chin Neo
IPC分类号： C07C59/08
CPC分类号： C12P7/56 , C12M47/10
摘要： The present invention relates to a process for recovery and purification of lactic acid from a fermentation broth containing lactic acid. The process comprises subjecting the fermentation broth to ultrafiltration and/or microfiltration to form a first permeate, concentrating the first permeate to form concentrated broth, subjecting the concentrated broth to supported liquid membrane for extraction of lactic acid into a separate stream, subjecting the extracted lactic acid solution to activated carbon for removal of color, subjecting the extracted lactic acid solution to cation exchange resin for deminerization, subjecting the extracted lactic acid solution to anion exchange resin for removal of anionic impurities and concentrating the extracted lactic acid solution to desired concentration. The supported liquid membrane of the present invention contains an organic layer that comprises a earner, a co-extractant, a diluent and a stabilizer.
摘要翻译：本发明涉及从含有乳酸的发酵液中回收和提纯乳酸的方法。该方法包括使发酵液经过超滤和/或微滤以形成第一渗透物，浓缩第一渗透物以形成浓缩的肉汤，将浓缩的肉汤加载到支撑液膜上以将乳酸提取到单独的流中，使提取的乳酸将酸提取到活性炭上以去除颜色，将提取的乳酸溶液进行阳离子交换树脂进行脱矿，将萃取的乳酸溶液进行阴离子交换树脂去除阴离子杂质，并将提取的乳酸溶液浓缩至所需浓度。本发明的支撑液膜含有一种有机层，它包括一种载体，共萃取剂，稀释剂和稳定剂。

5. 发明申请

US20110028759A1 Process for the Purification of Organic Acids 审中-公开
标题翻译：纯化有机酸的方法
公开(公告)号：US20110028759A1
公开(公告)日：2011-02-03
申请号：US12792671
申请日：2010-06-02
申请人： Ooi Lin Lum , Govindharaju Venkidachalam , Yew Chin Neo
发明人： Ooi Lin Lum , Govindharaju Venkidachalam , Yew Chin Neo
IPC分类号： C07C51/48
CPC分类号： B01D61/38 , B01D61/145 , B01D61/147 , B01D61/58 , C07C51/42 , C07C51/47 , C07C51/48 , C07C59/08
摘要： A process for recovery and purification of an organic acid from a fermentation broth containing a salt form of the organic acid, comprises the steps of subjecting the fermentation broth to one of ultrafiltration and microfiltration to form a first permeate, concentrating the first permeate to form a concentrated broth, subjecting the concentrated broth to a supported liquid membrane for extraction of lactic acid into a separate stream comprising an extracted solution, subjecting the extracted solution to activated carbon for colour removal, a cation exchange resin for demineralization, and an anion exchange resin for removal of anionic impurities to form a post polished organic acid, filtering the post polished organic acid to remove impurities above a predetermined threshold and concentrating the post polished organic acid to a desired concentration.
摘要翻译：从含有有机酸的盐形式的发酵液中回收和纯化有机酸的方法包括以下步骤：将发酵液经过超滤和微滤过滤形成第一渗透物，浓缩第一渗透物以形成浓缩的肉汤，将浓缩的肉汤送到负载液体膜上，将乳酸提取到包含提取液的单独的流中，将提取的溶液进行活性炭去色处理，用于脱盐的阳离子交换树脂和用于脱盐的阴离子交换树脂去除阴离子杂质以形成后抛光的有机酸，过滤后抛光的有机酸以除去高于预定阈值的杂质，并将后抛光的有机酸浓缩至所需浓度。

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