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1. 发明授权

US06676769B2 Apparatus and method for cleaning a furnace torch 有权
标题翻译：清洗炉炬的装置和方法
公开(公告)号：US06676769B2
公开(公告)日：2004-01-13
申请号：US09993238
申请日：2001-11-06
申请人： June-Yie Kao , Yie-Min Wu , Ming-Hsun Yang , Chii-Shing Yang
发明人： June-Yie Kao , Yie-Min Wu , Ming-Hsun Yang , Chii-Shing Yang
IPC分类号： B08B900
CPC分类号： B08B11/02 , B08B9/00 , Y10S438/905
摘要： An apparatus and a method for cleaning a torch for a vertical furnace used in semiconductor processing are disclosed. The apparatus is constructed by two main components of a basket-shaped fixture body and a cleaning bath. The fixture body is formed of cylindrical shape with a top ring, a bottom ring and three support rods connecting the two rings together. The top ring is provided with an outwardly extending flange portion for engaging an opening in a cleaning bath for supporting and suspending the fixture body in the bath. The bottom ring is equipped with a pair of symmetrically positioned, inwardly extending arcuate-shaped flange portions adapted for supporting an edge of a bottom surface of the furnace torch in the cleaning bath.
摘要翻译：公开了一种用于清洁半导体加工中使用的立式炉的割炬的装置和方法。该装置由篮状夹具本体和清洗槽的两个主要部件构成。夹具主体由具有顶环，底环和三个将两个环连接在一起的支撑杆形成为圆柱形。顶环设置有向外延伸的凸缘部分，用于接合清洗槽中的开口，用于将固定体支撑并悬挂在浴中。底环配备有一对对称定位的向内延伸的弧形凸缘部分，其适于支撑清洗槽中炉炬底面的边缘。

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