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    • 1. 发明申请
    • Assembly of nano-particles using DNA-mediated charge trapping
    • 使用DNA介导的电荷捕获装配纳米颗粒
    • US20090053425A1
    • 2009-02-26
    • US11894280
    • 2007-08-21
    • Chii-Dong ChenHung-Yi LinLi-Chu Tsai
    • Chii-Dong ChenHung-Yi LinLi-Chu Tsai
    • B05D3/00B05D1/00
    • C23C18/02B22F1/0022B22F1/0062B22F2998/00B82Y10/00B82Y15/00B82Y20/00B82Y30/00C23C18/04C23C18/06C23C18/08C23C18/42H01L21/32051H01L51/0093H01L2221/1094Y02P10/295B22F3/1055
    • A method for producing single-dimensioned gold-nano-particle patterns having a single-particle resolution in which the line-width is only limited by the particle size. Initially, a focused electron beam is used to generate a positive charge layer on an SiO2 surface. Biotinated DNA molecules attracted by these positive charges are then used to acquire Au-nano-particles revealing the e-beam exposure patterns. The particles in the single-line patterns become separated in an orderly manner, due to the repulsive force between different Au colloidal particles. Each single-line pattern has potential use in nano-photonics and nano-electronics. In nano-electronics, the line patterns serve as a template for high or low resistance conductive nano-wires. Low resistance wires exhibit linear current-voltage characteristics with an extremely high maximum allowed current density. The high resistance wires display charging effect with clear Coulomb oscillation behavior at low temperatures. The method of the invention can produce interconnects as well as single-electron-transistors. In addition, the method permits flexibility and opens up possibilities for fabrication of integrated circuits.
    • 一种具有单粒子分辨率的单维金纳米颗粒图案的方法,其中线宽仅受粒度的限制。 最初,聚焦电子束用于在SiO 2表面上产生正电荷层。 然后用这些正电荷吸引的生物化DNA分子获得显示电子束曝光图案的Au纳米颗粒。 由于不同的Au胶体颗粒之间的排斥力,单线图案中的颗粒有序地分离。 每个单线图案都有潜力用于纳米光子学和纳米电子学。 在纳米电子学中,线图案用作高电阻或低电阻导电纳米线的模板。 低电阻线具有极高的最大允许电流密度的线性电流 - 电压特性。 高电阻线显示充电效果,在低温下具有清晰的库仑振荡特性。 本发明的方法可以产生互连以及单电子晶体管。 此外,该方法允许灵活性并且开辟集成电路的制造的可能性。