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1. 发明申请

US20080192257A1 INSPECTION APPARATUS AND INSPECTION METHOD FOR PATTERN PROFILE, AND EXPOSURE APPARATUS 有权
标题翻译：检查装置和检查方法的图案和曝光装置
公开(公告)号：US20080192257A1
公开(公告)日：2008-08-14
申请号：US11924126
申请日：2007-10-25
申请人： Mitsuru Uda , Kazunari Terakawa , Akira Susuki , Chiaki Oishi , Yasuharu Yamada , Teruhiko Havano
发明人： Mitsuru Uda , Kazunari Terakawa , Akira Susuki , Chiaki Oishi , Yasuharu Yamada , Teruhiko Havano
IPC分类号： G01N21/55
CPC分类号： G03F7/70616 , G01N21/956 , G03F7/70641
摘要： Disclosed is a pattern inspection apparatus which easily and highly accurately detects a profile error (deviation) of at least one pattern having a cross section with projections and recesses. The inspection apparatus for the pattern 32 is for detecting the profile error of the pattern having a cross section with a projection and a recess. This inspection apparatus includes a plate 30 on which a pattern is mounted, light sources 40, 42 and 44 which can change angles of illuminating light emitted onto the pattern, within a range of 15 to 75 degrees with reference to the top surface of the pattern, and photodetectors 52 and 54 which can receive reflected light from the pattern at an angle within a range of 15 to 75 degrees with reference to the top surface of the pattern. The inspection apparatus is characterized by that the profile error of the pattern is detected based on an amount of the reflected light from an edge between the top surface and the side surface of each of the patterns.
摘要翻译：公开了一种图案检查装置，其容易且高精度地检测至少一个具有突起和凹陷的横截面的图案的轮廓误差（偏差）。用于图案32的检查装置用于检测具有突起和凹部的横截面的图案的轮廓误差。该检查装置包括其上安装图案的板30，可以将照射到图案上的照明光的角度相对于图案的顶表面在15至75度的范围内变化的光源40,42和44 以及光电检测器52和54，其可以以相对于图案的顶表面以15至75度的范围内的角度接收来自图案的反射光。检查装置的特征在于，基于来自每个图案的顶表面和侧表面之间的边缘的反射光的量来检测图案的轮廓误差。

2. 发明授权

US07310141B2 Inspection device and inspection method for pattern profile, exposure system 有权
标题翻译：检测装置和检验方法，用于图案轮廓，曝光系统
公开(公告)号：US07310141B2
公开(公告)日：2007-12-18
申请号：US10497053
申请日：2002-11-28
申请人： Mitsuru Uda , Kazunari Terakawa , Akira Suzuki , Chiaki Oishi , Yasuharu Yamada , Teruhiko Hayano
发明人： Mitsuru Uda , Kazunari Terakawa , Akira Suzuki , Chiaki Oishi , Yasuharu Yamada , Teruhiko Hayano
IPC分类号： G01N21/00
CPC分类号： G03F7/70616 , G01N21/956 , G03F7/70641
摘要： Disclosed is a pattern inspection apparatus which easily and highly accurately detects a profile error (deviation) of at least one pattern having a cross section with projections and recesses. The inspection apparatus for the pattern 32 is for detecting the profile error of the pattern having a cross section with a projection and a recess. This inspection apparatus includes a plate 30 on which a pattern is mounted, light sources 40, 42 and 44 which can change angles of illuminating light emitted onto the pattern, within a range of 15 to 75 degrees with reference to the top surface of the pattern, and photodetectors 52 and 54 which can receive reflected light from the pattern at an angle within a range of 15 to 75 degrees with reference to the top surface of the pattern. The inspection apparatus is characterized by that the profile error of the pattern is detected based on an amount of the reflected light from an edge between the top surface and the side surface of each of the patterns.
摘要翻译：公开了一种图案检查装置，其容易且高精度地检测至少一个具有突起和凹陷的横截面的图案的轮廓误差（偏差）。用于图案32的检查装置用于检测具有突起和凹部的横截面的图案的轮廓误差。该检查装置包括其上安装图案的板30，可以将照射到图案上的照明光的角度相对于图案的顶表面在15至75度的范围内变化的光源40,42和44 以及光电检测器52和54，其可以以相对于图案的顶表面以15至75度的范围内的角度接收来自图案的反射光。检查装置的特征在于，基于来自每个图案的顶表面和侧表面之间的边缘的反射光的量来检测图案的轮廓误差。

3. 发明授权

US07525651B2 Inspection apparatus and inspection method for pattern profile, and exposure apparatus 有权
标题翻译：图案轮廓的检查装置和检查方法以及曝光装置
公开(公告)号：US07525651B2
公开(公告)日：2009-04-28
申请号：US11924126
申请日：2007-10-25
申请人： Mitsuru Uda , Kazunari Terakawa , Akira Susuki , Chiaki Oishi , Yasuharu Yamada , Teruhiko Havano
发明人： Mitsuru Uda , Kazunari Terakawa , Akira Susuki , Chiaki Oishi , Yasuharu Yamada , Teruhiko Havano
IPC分类号： G01N21/00
CPC分类号： G03F7/70616 , G01N21/956 , G03F7/70641
摘要： Disclosed is a pattern inspection apparatus which easily and highly accurately detects a profile error (deviation) of at least one pattern having a cross section with projections and recesses. The inspection apparatus for the pattern 32 is for detecting the profile error of the pattern having a cross section with a projection and a recess. This inspection apparatus includes a plate 30 on which a pattern is mounted, light sources 40, 42 and 44 which can change angles of illuminating light emitted onto the pattern, within a range of 15 to 75 degrees with reference to the top surface of the pattern, and photodetectors 52 and 54 which can receive reflected light from the pattern at an angle within a range of 15 to 75 degrees with reference to the top surface of the pattern. The inspection apparatus is characterized by that the profile error of the pattern is detected based on an amount of the reflected light from an edge between the top surface and the side surface of each of the patterns.
摘要翻译：公开了一种图案检查装置，其容易且高精度地检测至少一个具有突起和凹陷的横截面的图案的轮廓误差（偏差）。用于图案32的检查装置用于检测具有突起和凹部的横截面的图案的轮廓误差。该检查装置包括其上安装图案的板30，可以将照射到图案上的照明光的角度相对于图案的顶表面在15至75度的范围内变化的光源40,42和44 以及光电检测器52和54，其可以以相对于图案的顶表面以15至75度的范围内的角度接收来自图案的反射光。检查装置的特征在于，基于来自每个图案的顶表面和侧表面之间的边缘的反射光的量来检测图案的轮廓误差。

4. 发明申请

US20050116187A1 Inspection device and inspection method for pattern profile, exposure system 有权
标题翻译：检测装置和检验方法，用于图案轮廓，曝光系统
公开(公告)号：US20050116187A1
公开(公告)日：2005-06-02
申请号：US10497053
申请日：2002-11-28
申请人： Mitsuru Uda , Kazunari Terakawa , Akira Suzuki , Chiaki Oishi , Yasuharu Yamada , Teruhiko Hayano
发明人： Mitsuru Uda , Kazunari Terakawa , Akira Suzuki , Chiaki Oishi , Yasuharu Yamada , Teruhiko Hayano
IPC分类号： G01N21/956 , G03F7/20 , G01N21/88
CPC分类号： G03F7/70616 , G01N21/956 , G03F7/70641
摘要： Disclosed is a pattern inspection apparatus which easily and highly accurately detects a profile error (deviation) of at least one pattern having a cross section with projections and recesses. The inspection apparatus for the pattern 32 is for detecting the profile error of the pattern having a cross section with a projection and a recess. This inspection apparatus includes a plate 30 on which a pattern is mounted, light sources 40, 42 and 44 which can change angles of illuminating light emitted onto the pattern, within a range of 15 to 75 degrees with reference to the top surface of the pattern, and photodetectors 52 and 54 which can receive reflected light from the pattern at an angle within a range of 15 to 75 degrees with reference to the top surface of the pattern. The inspection apparatus is characterized by that the profile error of the pattern is detected based on an amount of the reflected light from an edge between the top surface and the side surface of each of the patterns.
摘要翻译：公开了一种图案检查装置，其容易且高精度地检测至少一个具有突起和凹陷的横截面的图案的轮廓误差（偏差）。用于图案32的检查装置用于检测具有突起和凹部的横截面的图案的轮廓误差。该检查装置包括其上安装图案的板30，可以将照射到图案上的照明光的角度相对于图案的顶表面在15至75度的范围内变化的光源40,42和44 以及光电检测器52和54，其可以以相对于图案的顶表面以15至75度的范围内的角度接收来自图案的反射光。检查装置的特征在于，基于来自每个图案的顶表面和侧表面之间的边缘的反射光的量来检测图案的轮廓误差。

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