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1. 发明授权

US06243939B1 High ion beam etch selectivity for partial pole trim application 失效
标题翻译：高离子束蚀刻选择性用于部分极细修补应用
公开(公告)号：US06243939B1
公开(公告)日：2001-06-12
申请号：US09412630
申请日：1999-10-04
申请人： Mao-Min Chen , Cherng-Chyi Han , Cheng-Teh Wu , Jei-Wei Chang
发明人： Mao-Min Chen , Cherng-Chyi Han , Cheng-Teh Wu , Jei-Wei Chang
IPC分类号： G11B542
CPC分类号： G11B5/3967 , G11B5/3163 , Y10T29/49044 , Y10T29/49046
摘要： A method of manufacturing a magnetic transducer structure using a special pole etch using an IBE preferably with Kr or Xe, and a write gap material with a high IBE etch rate such as Ta, NiCu alloys, Pd, Pd—Cu alloys. A first layer of pole material and a write gap insulating layer are formed over the substrate. The write gap layer is composed of a material having a high ion beam etch rate compared to the first and second layers of pole material. The write gap insulating layer is preferably composed of Ni—Cu alloy, Pd, Pd—Cu alloys. Next, a second layer of pole material is formed on the first insulating layer. In a key step, we ion beam etch (IBE) the second pole; the write gap insulating layer and the first layer; the second pole serving as an etch mask during the ion beam etching to form a head. In a second preferred embodiment of the invention, the ion beam etching performed using a gas of Kr or Xe. The invention teaches a high IBE etch selectivity from the write gap dielectric to the upper pole (NeFe) for partial pole trim (PPT) applications by three embodiments: (a) selecting high IBE rate gap dielectric materials (e.g., NiCu alloys, Pd, and Pd—Cu alloys, (b) using an IBE gas Kr or Xr or both, instead of Ar, and (c) both (a) and (b).
摘要翻译：使用优选用Kr或Xe的IBE制造使用特殊极蚀刻的磁换能器结构的方法以及具有高IBE蚀刻速率的写间隙材料，例如Ta，NiCu合金，Pd，Pd-Cu合金。第一层极材料层和写间隙绝缘层形成在衬底上。写间隙层由与第一和第二极材料层相比具有高离子束蚀刻速率的材料组成。写间隙绝缘层优选由Ni-Cu合金，Pd，Pd-Cu合金构成。接下来，在第一绝缘层上形成第二极极材料层。在关键的一步中，我们离子束蚀刻（IBE）是第二极; 写间隙绝缘层和第一层; 第二极在离子束蚀刻期间用作蚀刻掩模以形成头部。在本发明的第二优选实施例中，使用Kr或Xe的气体进行离子束蚀刻。本发明通过三个实施例教导了从写间隙电介质到上极（NeFe）的高IBE蚀刻选择性：（a）选择高IBE速率间隙电介质材料（例如，NiCu合金，Pd，和Pd-Cu合金，（b）使用IBE气体Kr或Xr或两者代替Ar，和（c）（a）和（b）两者。

2. 发明授权

US4878290A Method for making thin film magnetic head 失效
标题翻译：制造薄膜磁头的方法
公开(公告)号：US4878290A
公开(公告)日：1989-11-07
申请号：US310414
申请日：1989-02-13
申请人： Charles R. Masud , Cheng-Teh Wu
发明人： Charles R. Masud , Cheng-Teh Wu
IPC分类号： G11B5/31
CPC分类号： G11B5/3116 , G11B5/3163 , Y10T29/49044 , Y10T29/49046
摘要： A method for making a thin film magnetic head in which the pole tips are trimmed to a predetermined width prior to the completion of the magnetic yoke structure. The thin film magnetic head is produced through deposition of the first magnetic layer in two stages, through deposition of the coil, the insulating material for the coil and through deposition of the second magnetic layer. The thin film head is then masked by a photoresist mask having openings to expose specific parts of the pole tip region, and an ion milling operation is used to etch the head assembly to form pole tips having a predetermined width. The shaping layer for the second magnetic layer is then deposited to complete the magnetic yoke structure.

3. 发明授权

US5768055A Magnetic recording head having a carbon overcoat array on slider air bearings surfaces 失效
标题翻译：磁性记录头在滑块空气轴承表面上具有碳覆盖层阵列
公开(公告)号：US5768055A
公开(公告)日：1998-06-16
申请号：US716040
申请日：1996-09-19
申请人： Hong Tian , Hao Qing Pan , Po-Kang Wang , Takehiro Kamigama , Cheng-Teh Wu , Tommy Chan
发明人： Hong Tian , Hao Qing Pan , Po-Kang Wang , Takehiro Kamigama , Cheng-Teh Wu , Tommy Chan
IPC分类号： G11B21/21 , G11B5/187 , G11B5/40 , G11B5/60 , G11B19/04
CPC分类号： G11B5/6005 , G11B5/6082 , G11B19/04 , G11B5/40 , Y10S977/724
摘要： A magnetic head is described for use in a disk drive having a disk that is rotated during operation of the disk drive and stationary when the disk drive is non-operational. The disk includes a surface containing data tracks. The magnetic head compromises a slider including a forward edge, a trailing edge and an air bearing surface. A read/write transducer is mounted at the trailing edge of the slider. The slider and transducer are mounted within the disk drive, relative to the surface of the rotating disk, to fly above the surface of the disk during rotation of the disk, for reading and writing data from and to the data tracks, and to come to rest on the surface of the disk during non-operation of the disk drive. An array of overcoat protrusions is formed on and spaced across the slider to cover a predetermined and discrete area of the slider in a manner so that when the slider and transducer come to rest on the surface of the disk, contact with the surface of the disk occurs only at the array of overcoat protrusions.
摘要翻译：描述了一种用于具有在盘驱动器的操作期间旋转的盘的磁盘驱动器的磁头，并且当磁盘驱动器不可操作时磁头是静止的。磁盘包括一个包含数据磁道的表面。磁头损害包括前边缘，后缘和空气轴承表面的滑块。读/写换能器安装在滑块的后缘。滑块和换能器相对于旋转盘的表面安装在磁盘驱动器内，以在盘的旋转期间在盘的表面上方飞行，用于从数据轨道读取数据并向数据轨道写入数据，并且到达在磁盘驱动器的非操作期间，放在磁盘的表面上。一个覆盖层突起的阵列形成在滑块上并在其间隔开以覆盖滑块的预定和离散的区域，使得当滑块和换能器停在盘的表面上时，与盘的表面接触仅发生在外罩突起阵列上。

4. 发明授权

US4064029A Method of making an improved superconducting quantum interference device 失效
标题翻译：制造改进的超导量子干涉装置的方法
公开(公告)号：US4064029A
公开(公告)日：1977-12-20
申请号：US766653
申请日：1977-02-08
申请人： Cheng-Teh Wu , Charles M. Falco , Robert T. Kampwirth
发明人： Cheng-Teh Wu , Charles M. Falco , Robert T. Kampwirth
IPC分类号： G01R33/035 , H01L39/24 , C23C15/00 , G01R33/02
CPC分类号： G01R33/0354 , H01L39/2493 , Y10S505/816 , Y10T29/49014
摘要： An improved superconducting quantum interference device is made by sputtering a thin film of an alloy of three parts niobium to one part tin in a pattern comprising a closed loop with a narrow region, depositing a thin film of a radiation shield such as copper over the niobium-tin, scribing a narrow line in the copper over the narrow region, exposing the structure at the scribed line to radiation and removing the deposited copper.
摘要翻译：一种改进的超导量子干涉装置是通过将包含三部分铌的合金薄膜以包含窄区域的闭环的图案以一部分锡的方式溅射，在铌上沉积诸如铜的辐射屏蔽薄膜在狭窄区域的铜上划线窄线，将划线处的结构暴露于辐射并除去沉积的铜。

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