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    • 3. 发明授权
    • Low inductance large area coil for an inductively coupled plasma source
    • 用于电感耦合等离子体源的低电感大面积线圈
    • US5874704A
    • 1999-02-23
    • US491342
    • 1995-06-30
    • Duane Charles Gates
    • Duane Charles Gates
    • H05H1/46H01J37/32H01L21/302H01L21/3065B23K10/00
    • H01J37/321
    • A low inductance large area coil (LILAC) is provided as a source for generating a large area plasma. The LILAC comprises at least two windings which, when connected to an RF source via impedance matching circuitry, produce a circulating flow of electrons to cause a magnetic field in the plasma. Because the LILAC employs multiple windings, few turns of winding are required to obtain a large area coil, so that the inductance of the LILAC is low. The low inductance of the LILAC ensures that the self-resonating frequency of the LILAC is kept at a level far above the RF driving frequency, allowing a broad frequency range for impedance matching. Thus, there is no difficulty in impedance matching, and power transfer can be maximized, permitting efficient generation of a large area plasma.
    • 提供低电感大面积线圈(LILAC)作为产生大面积等离子体的源。 LILAC包括至少两个绕组,当通过阻抗匹配电路连接到RF源时,其产生电子的循环流以在等离子体中产生磁场。 由于LILAC采用多个绕组,所以需要很少的绕组匝数才能获得大面积的线圈,因此LILAC的电感较低。 LILAC的低电感确保LILAC的自谐振频率保持在远高于RF驱动频率的水平,允许宽频率范围进行阻抗匹配。 因此,阻抗匹配没有困难,能够最大化功率传递,能够有效地生成大面积等离子体。
    • 6. 发明授权
    • Flooring containing microbeads
    • 地板含微珠
    • US06297297B1
    • 2001-10-02
    • US09519503
    • 2000-03-06
    • Robert S. BrookmanCharles GatesLawrence Wallace
    • Robert S. BrookmanCharles GatesLawrence Wallace
    • B32B2730
    • B44C5/04B44C1/26D06N3/06D06N7/0028D06N7/0055E04F15/10Y10T428/31935
    • A method of making a multilayered, resilient flooring containing a multicolored pattern is disclosed. The method includes applying a multiplicity of pigmented, thermoplastic microbeads to a top surface of a thermoplastic base layer to form a pattern layer on the base layer, which typically remains sufficiently hot so that it is molten or tacky when the microbeads are applied. The base layer and pattern layer can be covered with a substantially transparent material to form a clear top layer. The base layer can be formed by melting a dry blend comprising polyvinylchloride (PVC) to produce a molten PVC output, shaping the molten PVC output into a smooth PVC sheet of uniform thickness. The microbeads can be applied to the base layer using a stencil. The multiplicity of microbeads can include microbeads of two or more colors. Preferably, the microbeads are approximately spherical and have an average diameter between 0.002″ and 0.040″. Optionally, the method includes bonding a backing layer to bottom of the base layer.
    • 公开了一种制造含有多色图案的多层弹性地板的方法。 该方法包括将多种着色的热塑性微珠施加到热塑性基底层的顶表面,以在基底层上形成图案层,该图案层通常保持足够热,使得当施加微珠时熔融或发粘。 基层和图案层可以用基本透明的材料覆盖以形成透明的顶层。 可以通过熔化包含聚氯乙烯(PVC)的干混合物来形成基层,以产生熔融的PVC输出,将熔融的PVC输出成形为均匀厚度的光滑的PVC片。 微珠可以使用模板施加到基层。 微珠的多样性可以包括两种或更多种颜色的微珠。 优选地,微珠近似为球形,平均直径为0.002“至0.040”。 可选地,该方法包括将背衬层粘合到底层的底部。