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    • 4. 发明申请
    • SURFACE PLASMON POLARITON MODULATOR
    • 表面等离子体POLARITON调制器
    • US20120057215A1
    • 2012-03-08
    • US13090453
    • 2011-04-20
    • Hwansoo SUHChang Won LEEYeonsang PARKJineun KIM
    • Hwansoo SUHChang Won LEEYeonsang PARKJineun KIM
    • G02F1/09G02F1/11G02F1/01
    • G02F1/00G02B6/1226G02F1/01G02F1/035G02F1/29G02F2203/10
    • A surface plasmon polariton modulator capable of locally varying a physical property of a dielectric material to control a surface plasmon polariton. The surface plasmon polariton modulator includes a dielectric layer, including first and second dielectric portions, which is interposed between two metal layers. The second dielectric portion has a refractive index which varies with an electric field, a magnetic field, heat, a sound wave, or a chemical and/or biological operation applied thereto. The surface plasmon polariton modulator is configured to control one of an advancing direction, an intensity, a phase, or the like of a surface plasmon using an electric signal. The surface plasmon polariton modulator can operate as a surface plasmon polariton multiplexer or a surface plasmon polariton demultiplexer.
    • 能够局部地改变介电材料的物理性质以控制表面等离子体激元的表面等离子体激元调制器。 表面等离子体激元调制器包括介于介电层,介电层包括介于两个金属层之间的第一和第二电介质部分。 第二电介质部分具有随着施加到其上的电场,磁场,热,声波或化学和/或生物操作而变化的折射率。 表面等离子体激元调制器被配置为使用电信号来控制表面等离子体的前进方向,强度,相位等之一。 表面等离子体激元调制器可以作为表面等离子体激元多极化多路复用器或表面等离子体激元解离器来操作。
    • 5. 发明授权
    • Methods of forming integrated circuit devices having stacked gate electrodes
    • 形成具有层叠栅电极的集成电路器件的方法
    • US07998810B2
    • 2011-08-16
    • US12424922
    • 2009-04-16
    • Byung-hee KimGil-heyun ChoiSang-woo LeeChang-won LeeJin-ho ParkEun-ji JungJeong-gil Lee
    • Byung-hee KimGil-heyun ChoiSang-woo LeeChang-won LeeJin-ho ParkEun-ji JungJeong-gil Lee
    • H01L21/336
    • H01L27/11521H01L21/28273H01L29/66545
    • A method of forming a gate electrode of a semiconductor device is provided, the method including: forming a plurality of stacked structures each comprising a tunnel dielectric layer, a first silicon layer for floating gates, an intergate dielectric layer, a second silicon layer for control gates, and a mask pattern, on a semiconductor substrate in the stated order; forming a first interlayer dielectric layer between the plurality of stacked structures so that a top surface of the mask pattern is exposed; selectively removing the mask pattern of which the top surface is exposed; forming a third silicon layer in an area from which the hard disk layer was removed, and forming a silicon layer comprising the third silicon layer and the second silicon layer; recessing the first interlayer dielectric layer so that an upper portion of the silicon layer protrudes over the he first interlayer dielectric layer; and forming a metal silicide layer on the upper portion of the silicon layer.
    • 提供一种形成半导体器件的栅电极的方法,所述方法包括:形成多个堆叠结构,每个堆叠结构包括隧道介电层,用于浮置栅极的第一硅层,栅极间介电层,用于控制的第二硅层 栅极和掩模图案,以所述顺序在半导体衬底上; 在所述多个堆叠结构之间形成第一层间电介质层,使得所述掩模图案的顶表面露出; 选择性地去除其顶表面暴露的掩模图案; 在去除所述硬盘层的区域中形成第三硅层,以及形成包含所述第三硅层和所述第二硅层的硅层; 使第一层间电介质层凹陷,使得硅层的上部突出在第一层间介电层上; 以及在所述硅层的上部形成金属硅化物层。
    • 8. 发明授权
    • Methods of fabricating semiconductor device having a metal gate pattern
    • 制造具有金属栅极图案的半导体器件的方法
    • US07772643B2
    • 2010-08-10
    • US12457323
    • 2009-06-08
    • Ja-Hum KuChang-Won LeeSeong-Jun HeoSun-Pil YounSung-Man Kim
    • Ja-Hum KuChang-Won LeeSeong-Jun HeoSun-Pil YounSung-Man Kim
    • H01L29/94H01L29/78
    • H01L21/823437H01L21/28247H01L29/4941H01L29/6656
    • A method of fabricating a semiconductor device having a metal gate pattern is provided in which capping layers are used to control the relative oxidation rates of portions of the metal gate pattern during a oxidation process. The capping layer may be a multilayer structure and may be etched to form insulating spacers on the sidewalls of the metal gate pattern. The capping layer(s) allow the use of a selective oxidation process, which may be a wet oxidation process utilizing partial pressures of both H2O and H2 in an H2-rich atmosphere, to oxidize portions of the substrate and metal gate pattern while suppressing the oxidation of metal layers that may be included in the metal gate pattern. This allows etch damage to the silicon substrate and edges of the metal gate pattern to be reduced while substantially maintaining the original thickness of the gate insulating layer and the conductivity of the metal layer(s).
    • 提供一种制造具有金属栅极图案的半导体器件的方法,其中使用覆盖层来控制氧化过程中金属栅极图案的部分的相对氧化率。 覆盖层可以是多层结构,并且可以被蚀刻以在金属栅极图案的侧壁上形成绝缘间隔物。 封盖层允许使用选择性氧化工艺,其可以是在富H2气氛中使用H 2 O和H 2的分压的湿式氧化工艺,以氧化基板和金属栅极图案的部分,同时抑制 可以包括在金属栅极图案中的金属层的氧化。 这允许对硅衬底的蚀刻损伤和金属栅极图案的边缘减小,同时基本上保持栅极绝缘层的原始厚度和金属层的导电性。
    • 10. 发明授权
    • Methods of forming gate structures for semiconductor devices
    • 形成半导体器件栅极结构的方法
    • US07521316B2
    • 2009-04-21
    • US11221062
    • 2005-09-07
    • Woong-Hee SohnChang-Won LeeSun-Pil YounGil-Heyun ChoiByung-Hak LeeJong-Ryeol YooHee-Sook Park
    • Woong-Hee SohnChang-Won LeeSun-Pil YounGil-Heyun ChoiByung-Hak LeeJong-Ryeol YooHee-Sook Park
    • H01L21/00
    • H01L21/28273H01L29/42324
    • Methods of forming a semiconductor device may include forming a tunnel oxide layer on a semiconductor substrate, forming a gate structure on the tunnel oxide layer, forming a leakage barrier oxide, and forming an insulating spacer. More particularly, the tunnel oxide layer may be between the gate structure and the substrate, and the gate structure may include a first gate electrode on the tunnel oxide layer, an inter-gate dielectric on the first gate electrode, and a second gate electrode on the inter-gate dielectric with the inter-gate dielectric between the first and second gate electrodes. The leakage barrier oxide may be formed on sidewalls of the second gate electrode. The insulating spacer may be formed on the leakage barrier oxide with the leakage barrier oxide between the insulating spacer and the sidewalls of the second gate electrode. In addition, the insulating spacer and the leakage barrier oxide may include different materials. Related structures are also discussed.
    • 形成半导体器件的方法可以包括在半导体衬底上形成隧道氧化物层,在隧道氧化物层上形成栅极结构,形成漏电阻氧化物,形成绝缘衬垫。 更具体地,隧道氧化物层可以在栅极结构和衬底之间,并且栅极结构可以包括隧道氧化物层上的第一栅极电极,第一栅电极上的栅极间电介质和第二栅电极 所述栅极间电介质与所述第一和第二栅电极之间的栅极间电介质。 漏电阻氧化物可以形成在第二栅电极的侧壁上。 绝缘间隔物可以在绝缘隔离物和第二栅电极的侧壁之间的泄漏阻挡氧化物形成在漏电阻氧化物上。 此外,绝缘间隔物和漏电阻氧化物可以包括不同的材料。 还讨论了相关结构。