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    • 7. 发明申请
    • Photonic-electronic circuit boards
    • 光电子电路板
    • US20050111781A1
    • 2005-05-26
    • US10718223
    • 2003-11-20
    • Kanti JainCarl Kling
    • Kanti JainCarl Kling
    • G02B6/12G02B6/42G02B6/43H05K1/02G02B6/26
    • G02B6/43G02B6/4214G02B2006/12104H05K1/0274
    • Significant advances in semiconductor microelectronics technologies have resulted in greatly enhanced chip performance. Systems studies have continuously shown that on-board interconnects between chips are the bottleneck in achieving board level performance that is comparable with this chip performance. This invention provides a multiple-layer photonic-electronic circuit board family that solves this interconnect performance problem. Multiple layers of patterned optical channel waveguides and patterned electrical conductors co-exist in a single circuit board structure, with optical vias to transport light between different photonics layers and electrical vias to transport electrical signals and power between different electronics layers. An all-lithographic fabrication technology is used to build the entire board structure with mutually compatible planar processing steps. Novel techniques are used to produce channel optical waveguides connected to in-plane 45 degree turning mirrors and channel optical waveguides connected to optical vias with out-of-plane 45 degree turning mirrors. The mirrors can have either total internal reflection or metallized facets.
    • 半导体微电子技术的显着进步已经大大提高了芯片性能。 系统研究不断表明,芯片之间的板载互连是实现板级性能的瓶颈,与此芯片性能相当。 本发明提供了解决这种互连性能问题的多层光子电子电路板族。 图案化光通道波导和图案化电导体的多层共存于单个电路板结构中,其具有用于在不同光子层和电通路之间传输光的光学通孔,以在不同电子层之间传输电信号和功率。 全光刻制造技术用于通过相互兼容的平面处理步骤构建整个板结构。 使用新技术来生产连接到平面内45度转向镜的通道光波导和连接到具有外平面45度转向镜的光学通路的通道光波导。 反射镜可以具有全内反射或金属化刻面。