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1. 发明授权

US07808656B2 Probe sensor with multi-dimensional optical grating 有权
标题翻译：具有多维光栅的探头传感器
公开(公告)号：US07808656B2
公开(公告)日：2010-10-05
申请号：US12730603
申请日：2010-03-24
申请人： Zhong L. Wang , William L. Hughes , Brent Burchine
发明人： Zhong L. Wang , William L. Hughes , Brent Burchine
IPC分类号： G01B11/14
CPC分类号： G01Q60/38 , G01Q20/02 , G01Q20/04
摘要： A displacement sensor employs an electromagnetic radiation source that generates a beam of electromagnetic radiation for measuring a feature of an object. The displacement sensor includes a displacement probe, a multi-dimensional diffraction grating and a plurality of photon detectors. A reflection surface, which is changed when the probe interacts with the object, interacts with the beam from the electromagnetic radiation source and reflects a beam from the reflection surface. The multi-dimensional diffraction grating interacts with the reflected beam and generates a pattern of diffracted beams. Each photon detector senses a different diffracted beam, thereby providing information about the state of the probe.
摘要翻译：位移传感器使用产生用于测量物体的特征的电磁辐射束的电磁辐射源。位移传感器包括位移探测器，多维衍射光栅和多个光子检测器。当探针与物体相互作用时改变的反射表面与来自电磁辐射源的光束相互作用并且反射来自反射表面的光束。多维衍射光栅与反射光束相互作用并产生衍射光束的图案。每个光子检测器感测不同的衍射光束，从而提供关于探针的状态的信息。

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