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1. 发明申请

US20130125815A1 PLASMA ENHANCED ATOMIC LAYER DEPOSITION SYSTEM 有权
标题翻译：等离子体增强原子层沉积系统
公开(公告)号：US20130125815A1
公开(公告)日：2013-05-23
申请号：US13412675
申请日：2012-03-06
申请人： Bo-Heng Liu , Chi-Chung Kei , Meng-Yen Tsai , Wen-Hao Cho , Chih-Chieh Yu , Chien-Nan Hsiao , Da-Ren Liu
发明人： Bo-Heng Liu , Chi-Chung Kei , Meng-Yen Tsai , Wen-Hao Cho , Chih-Chieh Yu , Chien-Nan Hsiao , Da-Ren Liu
IPC分类号： C23C16/455
CPC分类号： C23C16/45536 , C23C16/45548
摘要： A plasma enhanced atomic layer deposition (PEALD) system used to form thin films on substrates includes a plasma chamber, a processing chamber, two or more ring units and a control piece. The plasma chamber includes an outer and an inner quartz tubular units, whose central axes are aligned with each other. Therefore, plasma is held and concentrated in a cylindrical space formed between the outer and outer quartz tubular units. Due to the first and second through holes, the plasma flow may be more evenly distributed on most of the surface of the substrate to form evenly distributed thin films and nano particles on the substrate. In addition, due to the alignment and misalignment between the first and second through holes, the plasma generated in the plasma chamber may be swiftly allowed or disallowed to enter to the processing chamber to prevent the precursor from forming a CVD.
摘要翻译：用于在衬底上形成薄膜的等离子体增强原子层沉积（PEALD）系统包括等离子体室，处理室，两个或多个环形单元和控制件。等离子体室包括外部和内部石英管状单元，其中心轴彼此对准。因此，等离子体被保持并集中在形成在外部和外部石英管状单元之间的圆柱形空间中。由于第一和第二通孔，等离子体流可以更均匀地分布在基板的大部分表面上，以在基板上形成均匀分布的薄膜和纳米颗粒。此外，由于第一和第二通孔之间的对准和不对准，可以迅速地允许或禁止在等离子体室中产生的等离子进入处理室以防止前体形成CVD。

2. 发明授权

US09404181B2 Plasma enhanced atomic layer deposition system 有权
标题翻译：等离子体增强原子层沉积系统
公开(公告)号：US09404181B2
公开(公告)日：2016-08-02
申请号：US13412675
申请日：2012-03-06
申请人： Bo-Heng Liu , Chi-Chung Kei , Meng-Yen Tsai , Wen-Hao Cho , Chih-Chieh Yu , Chien-Nan Hsiao , Da-Ren Liu
发明人： Bo-Heng Liu , Chi-Chung Kei , Meng-Yen Tsai , Wen-Hao Cho , Chih-Chieh Yu , Chien-Nan Hsiao , Da-Ren Liu
IPC分类号： C23C16/00 , C23C16/455
CPC分类号： C23C16/45536 , C23C16/45548
摘要： A plasma enhanced atomic layer deposition (PEALD) system used to form thin films on substrates includes a plasma chamber, a processing chamber, two or more ring units and a control piece. The plasma chamber includes an outer and an inner quartz tubular units, whose central axes are aligned with each other. Therefore, plasma is held and concentrated in an annular space formed between the outer and outer quartz tubular units. Due to the first and second through holes, the plasma flow may be more evenly distributed on most of the surface of the substrate to form evenly distributed thin films and nano particles on the substrate. In addition, due to the alignment and misalignment between the first and second through holes, the plasma generated in the plasma chamber may be swiftly allowed or disallowed to enter to the processing chamber to prevent the precursor from forming a CVD.
摘要翻译：用于在衬底上形成薄膜的等离子体增强原子层沉积（PEALD）系统包括等离子体室，处理室，两个或多个环形单元和控制件。等离子体室包括外部和内部石英管状单元，其中心轴彼此对准。因此，等离子体被保持并集中在形成在外部和外部石英管状单元之间的环形空间中。由于第一和第二通孔，等离子体流可以更均匀地分布在基板的大部分表面上，以在基板上形成均匀分布的薄膜和纳米颗粒。此外，由于第一和第二通孔之间的对准和不对准，可以迅速地允许或禁止在等离子体室中产生的等离子进入处理室以防止前体形成CVD。

3. 发明申请

US20130045374A1 NANO-LAMINATED FILM WITH TRANSPARENT CONDUCTIVE PROPERTY AND WATER-VAPOR RESISTANCE FUNCTION AND METHOD THEREOF 审中-公开
标题翻译：具有透明导电性能和水蒸汽电阻功能的纳米层压膜及其方法
公开(公告)号：US20130045374A1
公开(公告)日：2013-02-21
申请号：US13458458
申请日：2012-04-27
申请人： CHIH-CHIEH YU , MENG-YEN TSAI , CHI-CHUNG KEI , BO-HENG LIU , CHIEN-NAN HSIAO
发明人： CHIH-CHIEH YU , MENG-YEN TSAI , CHI-CHUNG KEI , BO-HENG LIU , CHIEN-NAN HSIAO
IPC分类号： B32B9/04 , B05D5/12
CPC分类号： B32B19/048 , B32B2264/102 , B32B2457/206 , C23C16/45529 , H01L51/5008 , H01L51/5215 , H01L51/5234 , H01L51/5256 , H01L2251/55 , H01L2251/558 , Y10T428/26
摘要： The present invention discloses a nano-laminated film with transparent conductive property and water-vapor resistance function and method thereof. The nano-laminated film comprises a plurality of first metal oxide layers and a plurality of second metal oxide layers. Wherein, the first metal layers and the second metal layers are made of different materials, and there is a spinel phase formed between the first metal layers and the second metal layers.
摘要翻译：本发明公开了一种具有透明导电性和耐水汽性的纳米层叠膜及其方法。纳米层叠膜包括多个第一金属氧化物层和多个第二金属氧化物层。其中，第一金属层和第二金属层由不同的材料制成，并且在第一金属层和第二金属层之间形成有尖晶石相。

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