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1. 发明授权

US08279072B2 System to monitor a consumable part and method to monitor performance life and predict maintenance thereof 有权
标题翻译：用于监测消耗部件的系统和监测性能寿命并预测其维护的方法
公开(公告)号：US08279072B2
公开(公告)日：2012-10-02
申请号：US12404746
申请日：2009-03-16
申请人： Kevin B. Peck , Bjorn W. Larsson
发明人： Kevin B. Peck , Bjorn W. Larsson
IPC分类号： G08B17/00 , G08B21/00 , H04Q5/22 , G01K1/00 , H01L29/00 , H05G1/08 , H05G1/54 , G05D23/00 , G06F11/00
CPC分类号： G01K3/04
摘要： A method for determining a maintenance interval for a consumable part and/or for equipment containing a consumable part obtains a plurality of measurements of temperature of the consumable part, receives each of the measurements at a totalizing unit, correlates each of the measurements to one of a plurality of temperature subranges, accumulates for each of the subranges an amount of time the measurements of temperature were correlated to each of the subranges, determines a total time by aggregating the accumulated time for each subrange with a weighting function, and generates a signal to prompt a maintenance event when the total time equals or passes a runtime setpoint. In supplement to or in alternative to the above, the method also correlates a subrange of two sequential measurements, indexes a breakpoint register if the correlated subranges are different, and generates a signal to prompt a maintenance event when a value of the breakpoint register equals or passes a breakpoint setpoint. A system for collecting, storing, and displaying runtime data of a resistive heating element in a semiconductor processing unit is also disclosed.
摘要翻译：用于确定消耗部件和/或包含消耗部件的设备的维护间隔的方法获得可消耗部件的多个温度测量值，以总计单元接收每个测量值，将每个测量值与多个温度子范围，对于每个子范围累积温度测量值与每个子范围相关的时间量，通过用加权函数聚合每个子范围的累积时间来确定总时间，并产生信号当总时间等于或通过运行时设定值时，提示维护事件。在上述的补充或替代方案中，该方法还将两个连续测量的子范围相关联，如果相关子范围不同则对断点寄存器进行索引，并且当断点寄存器的值等于或等于或者产生一个信号以提示维护事件通过断点设定点。还公开了一种用于在半导体处理单元中收集，存储和显示电阻加热元件的运行时间数据的系统。

2. 发明申请

US20090231147A1 SYSTEM TO MONITOR A CONSUMABLE PART AND METHOD TO MONITOR PERFORMANCE LIFE AND PREDICT MAINTENANCE THEREOF 有权
标题翻译：监控消耗性部分的系统和监测性能寿命及其预测维护的方法
公开(公告)号：US20090231147A1
公开(公告)日：2009-09-17
申请号：US12404746
申请日：2009-03-16
申请人： Kevin B. PECK , Bjorn W. Larsson
发明人： Kevin B. PECK , Bjorn W. Larsson
IPC分类号： G08B21/00 , G06F15/00 , G01K3/00
CPC分类号： G01K3/04
摘要： A method for determining a maintenance interval for a consumable part and/or for equipment containing a consumable part obtains a plurality of measurements of temperature of the consumable part, receives each of the measurements at a totalizing unit, correlates each of the measurements to one of a plurality of temperature subranges, accumulates for each of the subranges an amount of time the measurements of temperature were correlated to each of the subranges, determines a total time by aggregating the accumulated time for each subrange with a weighting function, and generates a signal to prompt a maintenance event when the total time equals or passes a runtime setpoint. In supplement to or in alternative to the above, the method also correlates a subrange of two sequential measurements, indexes a breakpoint register if the correlated subranges are different, and generates a signal to prompt a maintenance event when a value of the breakpoint register equals or passes a breakpoint setpoint. A system for collecting, storing, and displaying runtime data of a resistive heating element in a semiconductor processing unit is also disclosed.
摘要翻译：用于确定消耗部件和/或包含消耗部件的设备的维护间隔的方法获得可消耗部件的多个温度测量值，以总计单元接收每个测量值，将每个测量值与多个温度子范围，对于每个子范围累积温度测量值与每个子范围相关的时间量，通过用加权函数聚合每个子范围的累积时间来确定总时间，并产生信号当总时间等于或通过运行时设定值时，提示维护事件。在上述的补充或替代方案中，该方法还将两个连续测量的子范围相关联，如果相关子范围不同则对断点寄存器进行索引，并且当断点寄存器的值等于或等于或者产生一个信号以提示维护事件通过断点设定点。还公开了一种用于在半导体处理单元中收集，存储和显示电阻加热元件的运行时间数据的系统。

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