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    • 5. 发明授权
    • Process for producing doped silicon layers, silicon layers obtainable by the process and use thereof
    • 用于制造掺杂硅层的方法,可通过该方法获得的硅层及其用途
    • US08470632B2
    • 2013-06-25
    • US13502629
    • 2010-11-10
    • Bernhard StuetzelWolfgang Fahrner
    • Bernhard StuetzelWolfgang Fahrner
    • H01L21/00
    • H01L21/228H01L21/02532H01L21/02579H01L21/02628H01L21/02667H01L31/1804Y02E10/547Y02P70/521
    • The present invention relates to a process for producing a doped silicon layer on a substrate, comprising the steps of (a) providing a liquid silane formulation and a substrate, (b) applying the liquid silane formulation to the substrate, (c) introducing electromagnetic and/or thermal energy to obtain an at least partly polymorphic silicon layer, (d) providing a liquid formulation which comprises at least one aluminum-containing metal complex, (e) applying this formulation to the silicon layer obtained after step (c) and then (f) heating the coating obtained after step (e) by introducing electromagnetic and/or thermal energy, which decomposes the formulation obtained after step (d) at least to metal and hydrogen, and then (g) cooling the coating obtained after step (f) to obtain an Al-doped or Al- and metal-doped silicon layer, to doped silicon layers obtainable by the process and to the use thereof for production of light-sensitive elements and electronic components.
    • 本发明涉及一种在衬底上制造掺杂硅层的方法,其包括以下步骤:(a)提供液态硅烷配方和衬底,(b)将液态硅烷配制物施用于衬底,(c)引入电磁 和/或热能以获得至少部分多晶硅的硅层,(d)提供包含至少一种含铝金属络合物的液体制剂,(e)将该制剂施用到在步骤(c)之后获得的硅层和 然后(f)通过引入电磁和/或热能来加热在步骤(e)之后获得的涂层,其将在步骤(d)之后获得的制剂至少分解成金属和氢,然后(g)冷却步骤 (f)获得Al掺杂或Al和金属掺杂的硅层,可以通过该方法获得的掺杂硅层及其用于生产光敏元件和电子元件的用途。
    • 10. 发明申请
    • PROCESS FOR PRODUCING DOPED SILICON LAYERS, SILICON LAYERS OBTAINABLE BY THE PROCESS AND USE THEREOF
    • 生产硅酸盐层的方法,可由该方法获得的硅层及其用途
    • US20120199832A1
    • 2012-08-09
    • US13502629
    • 2010-11-10
    • Bernhard StuetzelWolfgang Fahrner
    • Bernhard StuetzelWolfgang Fahrner
    • H01L29/04H01L31/18H01L21/20
    • H01L21/228H01L21/02532H01L21/02579H01L21/02628H01L21/02667H01L31/1804Y02E10/547Y02P70/521
    • The present invention relates to a process for producing a doped silicon layer on a substrate, comprising the steps of (a) providing a liquid silane formulation and a substrate, (b) applying the liquid silane formulation to the substrate, (c) introducing electromagnetic and/or thermal energy to obtain an at least partly polymorphic silicon layer, (d) providing a liquid formulation which comprises at least one aluminium-containing metal complex, (e) applying this formulation to the silicon layer obtained after step (c) and then (f) heating the coating obtained after step (e) by introducing electromagnetic and/or thermal energy, which decomposes the formulation obtained after step (d) at least to metal and hydrogen, and then (g) cooling the coating obtained after step (f) to obtain an Al-doped or Al- and metal-doped silicon layer, to doped silicon layers obtainable by the process and to the use thereof for production of light-sensitive elements and electronic components.
    • 本发明涉及一种在衬底上制造掺杂硅层的方法,其包括以下步骤:(a)提供液态硅烷配方和衬底,(b)将液态硅烷配制物施用于衬底,(c)引入电磁 和/或热能以获得至少部分多晶硅的硅层,(d)提供包含至少一种含铝金属络合物的液体制剂,(e)将该制剂施用到在步骤(c)之后获得的硅层和 然后(f)通过引入电磁和/或热能来加热在步骤(e)之后获得的涂层,其将在步骤(d)之后获得的制剂至少分解成金属和氢,然后(g)冷却步骤 (f)获得Al掺杂或Al和金属掺杂的硅层,可以通过该方法获得的掺杂硅层及其用于生产光敏元件和电子元件的用途。