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    • 1. 发明申请
    • Pressure Measuring Instrument
    • 压力测量仪器
    • US20130055820A1
    • 2013-03-07
    • US13491842
    • 2012-06-08
    • Kevin M. BourbeauEric C. BeishlineMichael J. AmirtoGino A. PintoBenjamin F. Fontaine
    • Kevin M. BourbeauEric C. BeishlineMichael J. AmirtoGino A. PintoBenjamin F. Fontaine
    • G01L9/00
    • G01L19/04G01L9/0072
    • A pressure sensor (40) useful as a vacuum manometer. A reference pressure cavity (50) of the sensor is evacuated through an evacuation opening (72) located behind a plate portion (54) of the sensor electrode (52) having a non-planar surface for supporting the diaphragm (44) during an overpressure event. The electrode is hermetically sealed to the body (42) of the sensor by a brazed joint with a ceramic seal member (60) disposed there between. The brazed joint may include a layer of buffer material (79) which provides a degree of malleability to the joint to avoid cracking of the ceramic seal member. The brazed ceramic/metal joint permits the selection of materials such that differential thermal expansion effects can be passively minimized. The electrode is connected to the sensor circuitry (84) by a wire having a spring section (53), thereby providing a stress free interconnection.
    • 用作真空压力计的压力传感器(40)。 传感器的参考压力腔(50)通过位于传感器电极(52)的板部分(54)后面的抽空开口(72),该抽气开口具有用于在超压期间支撑膜片(44)的非平面表面 事件。 电极通过钎焊接头与传感器的主体(42)气密密封,陶瓷密封件(60)设置在其间。 钎焊接头可以包括缓冲材料层(79),该层向接头提供一定程度的延展性,以避免陶瓷密封构件的开裂。 钎焊的陶瓷/金属接头允许选择材料,使得不同的热膨胀效应可被动地最小化。 电极通过具有弹簧部分(53)的导线连接到传感器电路(84),从而提供无应力的互连。
    • 2. 发明授权
    • Pressure measuring instrument
    • 压力测量仪
    • US08893555B2
    • 2014-11-25
    • US13491842
    • 2012-06-08
    • Kevin M. BourbeauEric C. BeishlineMichael J. AmirtoGino A. PintoBenjamin F. Fontaine
    • Kevin M. BourbeauEric C. BeishlineMichael J. AmirtoGino A. PintoBenjamin F. Fontaine
    • G01L9/00G01L19/04
    • G01L19/04G01L9/0072
    • A pressure sensor (40) useful as a vacuum manometer. A reference pressure cavity (50) of the sensor is evacuated through an evacuation opening (72) located behind a plate portion (54) of the sensor electrode (52) having a non-planar surface for supporting the diaphragm (44) during an overpressure event. The electrode is hermetically sealed to the body (42) of the sensor by a brazed joint with a ceramic seal member (60) disposed there between. The brazed joint may include a layer of buffer material (79) which provides a degree of malleability to the joint to avoid cracking of the ceramic seal member. The brazed ceramic/metal joint permits the selection of materials such that differential thermal expansion effects can be passively minimized. The electrode is connected to the sensor circuitry (84) by a wire having a spring section (53), thereby providing a stress free interconnection.
    • 用作真空压力计的压力传感器(40)。 传感器的参考压力腔(50)通过位于传感器电极(52)的板部分(54)后面的抽气开口(72),该抽气开口具有用于在超压期间支撑膜片(44)的非平面表面 事件。 电极通过钎焊接头与传感器的主体(42)气密密封,陶瓷密封件(60)设置在其间。 钎焊接头可以包括缓冲材料层(79),该层向接头提供一定程度的延展性,以避免陶瓷密封构件的开裂。 钎焊的陶瓷/金属接头允许选择材料,使得不同的热膨胀效应可被动地最小化。 电极通过具有弹簧部分(53)的导线连接到传感器电路(84),从而提供无应力的互连。